B81C2201/0152 - CPC Classification Index

ClassID:

84099 ⎘

B81C2201/0152 - CPC Classification

Classification description:

Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning; Film patterning; Imprinting Step and Flash imprinting, UV imprinting

Recent Application in this class:

20170144152

2017-05-25

PROCESSES FOR RAPID MICROFABRICATION USING THERMOPLASTICS AND DEVICES THEREOF

20130340929

2013-12-26

Method of manufacturing stamp for plasmonic nanolithography apparatus and plasmonic nanolithography apparatus

20130078796

2013-03-28

Process for making a patterned metal oxide structure

20110122406

2011-05-26

Processes for rapid microfabrication using thermoplastics and devices thereof

20090039563

2009-02-12

METHOD OF FORMING FINE PATTERN

20070034600

2007-02-15

Planarization Method of Patterning a Substratte

20060192320

2006-08-31

Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same

20050257709

2005-11-24

Systems and methods for three-dimensional lithography and nano-indentation

20050170544

2005-08-04

Method for manufacturing MEMS structures

#10

20050156357

2005-07-21

Planarization method of patterning a substrate