84098 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning; Film patterning Imprinting
Sub-classes:Microfluidic chip and a method for the manufacture of a microfluidic chip
#2Method and system for fabricating glass-based nanostructures on large-area planar substrates, fibers, and textiles
#3Imprint lithography method, method for manufacturing master template using the method and master template manufactured by the method