Patents-Review.com
ClassID:

84103 ⎘

B81C2201/0157 - CPC Classification

Classification description:

Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning; Lithographic techniques Gray-scale mask technology

Recent Application in this class:
#1
20260027584
2026-01-29

METHODS OF OPERATING AND MANUFACTURING CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER WITH CONTOURED ELECTRODE

 #2
20250093212
2025-03-20

DEVICE FOR NANOSCALE THERMAL MEASUREMENTS AND ASSOCIATED METHOD FOR MANUFACTURING SAID DEVICE

 #3
20250042721
2025-02-06

MEMS COMPONENT WITH A MEMBRANE SPRING AND METHOD FOR PRODUCING A MEMBRANE SPRING

 #4
20240165663
2024-05-23

Capacitive micromachined ultrasonic transducer with contoured electrode

 #5
20230110246
2023-04-13

Gradient Structures Interfacing Microfluidics and Nanofluidics, Methods for Fabrication and Uses Thereof

 #6
20220152651
2022-05-19

Pulse train excitation for capacitive micromachined ultrasonic transducer

 #7
20210220873
2021-07-22

Contoured electrode for capacitive micromachined ultrasonic transducer

 #8
20200207608
2020-07-02

Isolated protrusion/recession features in microelectromechanical systems

 #9
20200158644
2020-05-21

Gradient Structures Interfacing Microfluidics and Nanofluidics, Methods for Fabrication and Uses Thereof

 #10
20200070151
2020-03-05

Method to create multilayer microfluidic chips using spin-on carbon as gap fill and spin-on glass tone inversion

 #11
20200064745
2020-02-27

METHODS AND APPARATUS TO CONTROL GRAYSCALE PHOTOLITHOGRAPHY

 #12
20200039819
2020-02-06

Localized functionalization of nanotextured surfaces

 #13
20190227434
2019-07-25

Method for making three dimensional structures using photolithography and an adhesively bondable material

 #14
20190169020
2019-06-06

PACKAGE SUBSTRATE INTEGRATED DEVICES

 #15
20190129298
2019-05-02

Methods and apparatus to control grayscale photolithography

 #16
20180301344
2018-10-18

Spectrally and temporally engineered processing using photoelectrochemistry

 #17
20180290880
2018-10-11

Isolated protrusion/recession features in a micro electro mechanical system

 #18
20170328835
2017-11-16

Gradient structures interfacing microfluidics and nanofluidics, methods for fabrication and uses thereof

 #19
20160118265
2016-04-28

Spectrally and temporally engineered processing using photoelectrochemistry

 #20
20150175410
2015-06-25

Process for manufacturing a micromechanical structure having a buried area provided with a filter

 #21
20140191375
2014-07-10

Methods for fabricating three-dimensional nano-scale structures and devices

 #22
20140030811
2014-01-30

Gradient structures interfacing microfluidics and nanofluidics, methods for fabrication and uses thereof

 #23
20120018819
2012-01-26

Process for manufacturing a micromechanical structure having a buried area provided with a filter

 #24
20100244162
2010-09-30

MEMS device with reduced stress in the membrane and manufacturing method

 #25
20090155728
2009-06-18

Fabrication method of topographically modulated microstructures using pattern homogenization with UV light

 #26
20080268575
2008-10-30

Orientation-dependent etching of deposited AlN for structural use and sacrificial layers in MEMS

 #27
20070020772
2007-01-25

Gradient structures interfacing microfluidics and nanofluidics

 #28
20060104164
2006-05-18

Effecting dynamic measurement of low mass devices