Patents-Review.com
ClassID:

84102 ⎘

B81C2201/0156 - CPC Classification

Classification description:

Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning Lithographic techniques

Sub-classes:
Recent Application in this class:
#1
20260125262
2026-05-07

METHOD FOR MANUFACTURING A MICROELECTROMECHANICAL SYSTEM MIRROR DEVICE, MANUFACTURING APPARATUS, SET OF MIRROR DEVICES AND WAFER

 #2
20250346484
2025-11-13

MICROMECHANICAL DEVICE AND METHOD FOR PRODUCING A MICROMECHANICAL DEVICE HAVING A MEMS SUBSTRATE AND A CAP SUBSTRATE AND A CAVERN ENCLOSED BY MEMS SUBSTRATE AND CAP SUBSTRATE

 #3
20250296832
2025-09-25

Electrostatic MEMS Transducer with Vertical Actuator Cells

 #4
20250122073
2025-04-17

MICROSCALE FLEXIBLE STRAIN SENSOR

 #5
20250011165
2025-01-09

MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF

 #6
20240043263
2024-02-08

PROCESS FOR MANUFACTURING AN OPTICAL MICROELECTROMECHANICAL DEVICE HAVING A TILTABLE STRUCTURE WITH AN ANTIREFLECTIVE SURFACE

 #7
20230406698
2023-12-21

MICROELECTROMECHANICAL ELEMENT AND A METHOD FOR MANUFACTURING IT

 #8
20230406692
2023-12-21

MICROELECTROMECHANICAL SYSTEM (MEMS) MICROPHONE AND FABRICATION METHOD THEREOF

 #9
20230348258
2023-11-02

MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBERANCES, AND MANUFACTURING METHODS THEREOF

 #10
20230219804
2023-07-13

COMPACT ENHANCED SENSITIVITY TEMPERATURE SENSOR USING AN ENCAPSULATED CLAMPED-CLAMPED MEMS BEAM RESONATOR

 #11
20230061174
2023-03-02

CHARGE TRANSFER CIRCUITRY FOR MEMS DEVICES

 #12
20220371881
2022-11-24

Micro-electro-mechanical system (MEMS) vibration sensor and fabricating method thereof

 #13
20220033247
2022-02-03

Micro-electro-mechanical system silicon on insulator pressure sensor and method for preparing same

 #14
20210236700
2021-08-05

TUNING ADHESION AT CONTACTING DEVICE INTERFACES: GEOMETRIC TOOLS FOR MINIMIZING SURFACE FOULING

 #15
20210204410
2021-07-01

High-density soft-matter electronics

 #16
20210188620
2021-06-24

Process for manufacturing an optical microelectromechanical device having a tiltable structure with an antireflective surface

 #17
20210147221
2021-05-20

Manufacturing method of miniature fluid actuator

 #18
20200283288
2020-09-10

Semiconductor device package and method of manufacturing the same

 #19
20200247667
2020-08-06

Atomic-scale e-beam sculptor

 #20
20190100430
2019-04-04

Method of forming semiconductor device

 #21
20180265347
2018-09-20

Semiconductor device package and method of manufacturing the same

 #22
20170145139
2017-05-25

Methods of making crosslinked copolymer films from inimer-containing random copolymers

 #23
20160234931
2016-08-11

High-density soft-matter electronics

 #24
20140235755
2014-08-21

Inimer-containing random copolymers and crosslinked copolymer films for dense polymer brush growth

 #25
20130126022
2013-05-23

Component of a biosensor and process for production

 #26
17320719
2024-07-23

On-chip integrated silicon carbide pressure and temperature sensors