84104 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning; Lithographic techniques Lithographic techniques not provided for in
INERTIA MEASUREMENT UNIT AND METHOD FOR FORMING THE SAME
#2METHOD FOR ATTACHING A BRIDGING METAL LAYER IN VIA HOLES FOR SUPPORTING POSTS
#3METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
#4MICROCHANNEL CHIP AND METHOD FOR PRODUCING THE SAME
#5METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
#6METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
#7MANUFACTURING METHOD OF MEMS DEVICE
#8MEMS SENSOR, AND METHOD FOR MANUFACTURING MEMS SENSOR
#9MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VIBRATION SENSOR AND FABRICATING METHOD THEREOF
#10MICRO ELECTRO MECHANICAL SYSTEM PROBE AND MANUFACTURING METHOD THEREOF
#11MEMS SENSOR PACKAGE AND ITS MANUFACTURING METHOD
#12METHOD TO ACHIEVE TILTED PATTERNING WITH A THROUGH RESIST THICKNESS USING PROJECTION OPTICS
#13Gradient Structures Interfacing Microfluidics and Nanofluidics, Methods for Fabrication and Uses Thereof
#14METHOD FOR PRODUCING MULTI-LAYERED TYPE MICROCHANNEL DEVICE USING PHOTOSENITIVE RESIN LAMINATE
#15METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
#16Method and system for fabricating a MEMS device
#17Method and system for fabricating a MEMS device
#18MICRO-ELECTROMECHANICAL SYSTEM PUMP
#19MICRO-ELECTRO-MECHANICAL SYSTEMS AND PREPARATION METHOD THEREOF
#20Microfluidic devices with electrodes formed as physically separated sections of microchannel side walls
#21Calcite channel structures with heterogeneous wettability
#22Method for Fabricating a Microfluidic Device
#23Calcite channel structures with heterogeneous wettability
#24High-density soft-matter electronics
#25Method to achieve tilted patterning with a through resist thickness using projection optics
#26Method for producing multi-layered type microchannel device using photosensitive resin laminate
#27Integrated package structure for MEMS element and ASIC chip and method for manufacturing the same
#28Method of providing a plurality of through-holes in a layer of structural material
#29Gradient Structures Interfacing Microfluidics and Nanofluidics, Methods for Fabrication and Uses Thereof
#30METHOD AND APPARATUS FOR ETCHING A SUBSTRATE
#31System and method for forming a biological microdevice
#32Micro-electro-mechanical-systems processing method, and micro-electro-mechanical-systems processing apparatus
#33Method for forming micro-electro-mechanical system (MEMS) device structure
#34Gradient structures interfacing microfluidics and nanofluidics, methods for fabrication and uses thereof
#35Method of manufacturing a plurality of through-holes in a layer of first material
#36Integrated capacitive humidity sensor
#37METHOD OF ADDRESSING FILM LIFTOFF IN MEMS FABRICATION
#38MEMS anti-phase vibratory gyroscope
#39Manufacturing method of micro-electro-mechanical system sensor capable of preventing diffusion phenomenon and reflow phenomenon
#40Open cavity package using chip-embedding technology
#41Method for fabricating suspended MEMS structures
#42METHODS FOR FABRICATING HIGH ASPECT RATIO PROBES AND DEFORMING HIGH ASPECT RATIO NANOPILLARS AND MICROPILLARS
#43Manufacture of microneedles
#44Microstructured substrate
#45High-density soft-matter electronics
#46Photolithography Structures and Methods
#47MEMS device with polymer layer, system of a MEMS device with a polymer layer, method of making a MEMS device with a polymer layer
#48Method for making patterns on the surface of a substrate using block copolymers
#49Gradient structures interfacing microfluidics and nanofluidics, methods for fabrication and uses thereof
#50Photostructured magnetic devices and methods for making same
#51METHOD AND SYSTEM FOR MANUFACTURING NANOSTRUCTURES
#52Process and system for fabrication of patterns on a surface
#53Method of making an embedded electromagnetic device
#54Fluidic channel system and method for fabricating fine structure
#55Method to fabricate a mould for lithography by nano-imprinting
#56Integrated Encapsulation for MEMS Devices
#57Methods for fabricating high aspect ratio probes and deforming high aspect ratio nanopillars and micropillars
#58Methods for fabrication of high aspect ratio micropillars and nanopillars
#59MICROSTRUCTURE SYNTHESIS BY FLOW LITHOGRAPHY AND POLYMERIZATION
#60Optofluidic lithography system, method of manufacturing two-layered microfluidic channel, and method of manufacturing three-dimensional microstructures
#61THREE-DIMENSIONAL NANO MATERIAL STRUCTURES
#62Massively parallel assembly of composite structures using depletion attraction
#63Photochemical method for manufacturing nanometrically surface-decorated substrates
#64Direct incident beam lithography for patterning nanoparticles, and the articles formed thereby
#65Printed metal mask for UV, e-beam, ion-beam and X-ray patterning
#66Graft Pattern-Forming Method, Graft Pattern Material, Lithography Method, Conductive Pattern - Forming Method, Conductive Pattern, Color Filter Producing Method, Color Filter, and Mircrolens Producing Method
#67Microstructure synthesis by flow lithography and polymerization
#68Gradient structures interfacing microfluidics and nanofluidics
#69$M(c)method for producing inclined flank patterns by photolithography
#70Method for manufacturing a patterned structure
#71Decal transfer lithography
#72Method for fabricating a shadow mask in a trench of a microelectronic or micromechanical structure
#73Three-dimensional lithographic fabrication technique
#74Systems and methods for three-dimensional lithography and nano-indentation
#75Semiconductor device manufacturing method
#76Multilayer MEMS device and method of making same
#77Fabrication of enclosed nanochannels using silica nanoparticles