Micromechanical component and method for producing a micromechanical component

Process for producing a base of an analysis cell for analyzing a biochemical material, and analysis cell

MEMS capacitive pressure sensors in fully depleted semiconductor on insulator (FDSOI)

Method for coating microstructured components

Cavity pressure modification using local heating with a laser

SENSOR ELEMENT, METHOD FOR MANUFACTURING SENSOR ELEMENT, DETECTION DEVICE, AND METHOD FOR MANUFACTURING DETECTION DEVICE

MEMS DISPLAY INCORPORATING EXTENDED HEIGHT ACTUATORS

Microelectromechanical structures, devices including the structures, and methods of forming and tuning same