B81C2201/0164 - CPC Classification Index

ClassID:

84108 ⎘

B81C2201/0164 - CPC Classification

Classification description:

Manufacture or treatment of microstructural devices or systems in or on a substrate; Controlling physical properties of the material; Controlling internal stress of deposited layers by doping the layer

Recent Application in this class:

20260100692

2026-04-09

MEMS Resonator

20250326629

2025-10-23

Monolithic Microelectromechanical Systems Based Spatial Light Modulators Including Ribbon-Type Modulators

20240425365

2024-12-26

LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) DESIGN AND MANUFACTURING FLOW

20240056054

2024-02-15

Non-Lid-Bonded MEMS Resonator With Phosphorus Dopant

20230382714

2023-11-30

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

20190275545

2019-09-12

Actuator, liquid discharge head, liquid discharge device, and liquid discharge apparatus

20130139377

2013-06-06

Method of manufacturing resonant transducer

20120286903

2012-11-15

Micromechanical device including N-type doping for providing temperature compensation and method of designing thereof

20090042372

2009-02-12

Polysilicon deposition and anneal process enabling thick polysilicon films for MEMS applications

#10

20060166403

2006-07-27

Fabrication of advanced silicon-based MEMS devices

#11

16591717

2024-09-17

MEMS resonator with colocated temperature sensor