B81C2201/0166 - CPC Classification Index

ClassID:

84109 ⎘

B81C2201/0166 - CPC Classification

Classification description:

Manufacture or treatment of microstructural devices or systems in or on a substrate; Controlling physical properties of the material; Controlling internal stress of deposited layers by ion implantation

Recent Application in this class:

20230382714

2023-11-30

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

20220324698

2022-10-13

PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY

20220144628

2022-05-12

Modification to rough polysilicon using ion implantation and silicide

20200270123

2020-08-27

Modification to rough polysilicon using ion implantation and silicide

20180222748

2018-08-09

Method for frequency trimming a microelectromechanical resonator

20180002167

2018-01-04

Micromechanical structure and method for manufacturing the same