Patents-Review.com
ClassID:

84110 ⎘

B81C2201/0167 - CPC Classification

Classification description:

Manufacture or treatment of microstructural devices or systems in or on a substrate; Controlling physical properties of the material; Controlling internal stress of deposited layers by adding further layers of materials having complementary strains, i.e. compressive or tensile strain

Recent Application in this class:
#1
20250313454
2025-10-09

METHODS AND APPARATUS FOR ELECTRONIC DEVICE PACKAGING

 #2
20230126914
2023-04-27

METHODS AND APPARATUS FOR ELECTRONIC DEVICE PACKAGING

 #3
20230051656
2023-02-16

Microphone device with single crystal piezoelectric film and method of forming the same

 #4
20200024127
2020-01-23

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #5
20200017356
2020-01-16

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #6
20200017355
2020-01-16

Planar cavity mems and related structures, methods of manufacture and design structures

 #7
20190315619
2019-10-17

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #8
20190275545
2019-09-12

Actuator, liquid discharge head, liquid discharge device, and liquid discharge apparatus

 #9
20190248644
2019-08-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #10
20190233277
2019-08-01

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #11
20190169017
2019-06-06

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #12
20190152767
2019-05-23

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #13
20180346318
2018-12-06

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #14
20180319652
2018-11-08

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #15
20180257931
2018-09-13

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #16
20180244514
2018-08-30

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #17
20180222748
2018-08-09

Method for frequency trimming a microelectromechanical resonator

 #18
20180072568
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #19
20180072567
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #20
20180072566
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #21
20180057357
2018-03-01

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #22
20180050903
2018-02-22

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #23
20180009658
2018-01-11

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #24
20170349430
2017-12-07

Semiconductor pressure sensor

 #25
20170154800
2017-06-01

Wafer handler and methods of manufacture

 #26
20170121175
2017-05-04

Manufacturing method of MEMS chip

 #27
20170121170
2017-05-04

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #28
20170089785
2017-03-30

Pressure sensor including deformable pressure vessel(s)

 #29
20170088412
2017-03-30

Microelectronic component arrangement and production method for a microelectronic component arrangement

 #30
20170022048
2017-01-26

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #31
20160368765
2016-12-22

Use of metal native oxide to control stress gradient and bending moment of a released MEMS structure

 #32
20160355392
2016-12-08

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #33
20160353210
2016-12-01

Micromechanical structure comprising carbon material and method for fabricating the same

 #34
20160325987
2016-11-10

Low-stress low-hydrogen LPCVD silicon nitride

 #35
20160325986
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #36
20160325983
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #37
20160325982
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #38
20160289060
2016-10-06

Device and method of manufacturing the same

 #39
20160244321
2016-08-25

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #40
20160099124
2016-04-07

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #41
20160096721
2016-04-07

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #42
20160083245
2016-03-24

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #43
20160060107
2016-03-03

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #44
20160060099
2016-03-03

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #45
20160055282
2016-02-25

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #46
20150041932
2015-02-12

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #47
20140284729
2014-09-25

Electrical component and method of manufacturing the same

 #48
20140166463
2014-06-19

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #49
20140061823
2014-03-06

Membrane structure for electrochemical sensor

 #50
20130302933
2013-11-14

Method for fabricating MEMS device with protection rings

 #51
20130234265
2013-09-12

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #52
20130221454
2013-08-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #53
20130062710
2013-03-14

Micro electrical mechanical system with bending deflection of backplate structure

 #54
20130057558
2013-03-07

MECHANICAL LAYER AND METHODS OF MAKING THE SAME

 #55
20120307334
2012-12-06

Display device and method of manufacturing the display device

 #56
20120293236
2012-11-22

Nonvolatile nano-electromechanical system device

 #57
20120287138
2012-11-15

ELECTROMECHANICAL DEVICE CONFIGURED TO MINIMIZE STRESS-RELATED DEFORMATION AND METHODS FOR FABRICATING SAME

 #58
20120286903
2012-11-15

Micromechanical device including N-type doping for providing temperature compensation and method of designing thereof

 #59
20120225259
2012-09-06

Flat back plate

 #60
20120224981
2012-09-06

Method for producing at least one deformable membrane micropump and deformable membrane micropump

 #61
20120133006
2012-05-31

OXIDE MEMS BEAM

 #62
20120122259
2012-05-17

Method of manufacturing MEMS devices providing air gap control

 #63
20120086998
2012-04-12

DIFFUSION BARRIER LAYER FOR MEMS DEVICES

 #64
20120056308
2012-03-08

Method of forming an electromechanical transducer device

 #65
20110318861
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #66
20110316101
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #67
20110316099
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #68
20110316098
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #69
20110316097
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #70
20110315528
2011-12-29

Methods of manufacture for micro-electro-mechanical system (MEMS)

 #71
20110315527
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #72
20110315526
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #73
20110314669
2011-12-29

Method of manufacturing a micro-electro-mechanical system (MEMS)

 #74
20110115035
2011-05-19

General strength and sensitivity enhancement method for micromachined device

 #75
20110109952
2011-05-12

Nonvolatile nano-electromechanical system device

 #76
20110058243
2011-03-10

METHODS FOR FORMING LAYERS WITHIN A MEMS DEVICE USING LIFTOFF PROCESSES

 #77
20110057288
2011-03-10

MEMS device with protection rings

 #78
20110038093
2011-02-17

TURNABLE CAPACITOR AND SWITCH USING MEMS WITH PHASE CHANGE MATERIAL

 #79
20100265563
2010-10-21

Electromechanical device configured to minimize stress-related deformation and methods for fabricating same

 #80
20100202039
2010-08-12

MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same

 #81
20100200938
2010-08-12

Methods for forming layers within a MEMS device using liftoff processes

 #82
20100046058
2010-02-25

Diffusion barrier layer for MEMS devices

 #83
20100032857
2010-02-11

Ceramic components, coated structures and methods for making same

 #84
20090273823
2009-11-05

Method of manufacturing MEMS devices providing air gap control

 #85
20090213451
2009-08-27

Method of manufacturing MEMS devices providing air gap control

 #86
20090042372
2009-02-12

Polysilicon deposition and anneal process enabling thick polysilicon films for MEMS applications

 #87
20090029048
2009-01-29

METHOD OF THERMAL STRESS COMPENSATION

 #88
20090026559
2009-01-29

Boron doped shell for MEMS device

 #89
20080218840
2008-09-11

Methods for etching layers within a MEMS device to achieve a tapered edge

 #90
20080148864
2008-06-26

Micromechanical device comprising a mobile beam

 #91
20080003737
2008-01-03

Method of manufacturing MEMS devices providing air gap control

 #92
20070196946
2007-08-23

Method of forming thin film structure with tensile and compressed polysilicon layers

 #93
20070160748
2007-07-12

Media-exposed interconnects for transducers

 #94
20070096300
2007-05-03

Diffusion barrier layer for MEMS devices

 #95
20070090474
2007-04-26

MEMS device and method of fabrication

 #96
20070042524
2007-02-22

MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same

 #97
20070041703
2007-02-22

Methods for forming layers within a MEMS device using liftoff processes to achieve a tapered edge

 #98
20070041076
2007-02-22

MEMS device having support structures configured to minimize stress-related deformation and methods for fabricating same

 #99
20060204776
2006-09-14

STRUCTURE AND METHOD OF THERMAL STRESS COMPENSATION

 #100
20060182404
2006-08-17

High reflector tunable stress coating, such as for a MEMS mirror

 #101
20060182403
2006-08-17

High reflector tunable stress coating, such as for a MEMS mirror

 #102
20060175203
2006-08-10

Electroplating pcb components

 #103
20060166403
2006-07-27

Fabrication of advanced silicon-based MEMS devices

 #104
20060110895
2006-05-25

Method of fabricating silicon-based MEMS devices

 #105
20060057758
2006-03-16

Semiconductor physical quantity sensor and method for manufacturing the same

 #106
20050233492
2005-10-20

Method of fabricating silicon-based MEMS devices

 #107
20050227054
2005-10-13

Method to control residual stress in a film structure and a system thereof

 #108
20050098840
2005-05-12

Micromechanical structural element having a diaphragm and method for producing such a structural element

 #109
20050079648
2005-04-14

Method to change the profiles of released membranes

 #110
20050069687
2005-03-31

Apparatus and method for making a tensile diaphragm with a compressive region

 #111
20050050971
2005-03-10

Methods and structure for improving wafer bow control