Patents-Review.com
ClassID:

84112 ⎘

B81C2201/017 - CPC Classification

Classification description:

Manufacture or treatment of microstructural devices or systems in or on a substrate; Controlling physical properties of the material; Controlling internal stress of deposited layers Methods for controlling internal stress of deposited layers not provided for in  - 

Recent Application in this class:
#1
20260097953
2026-04-09

Forming a Bonded Interface Using Plasma-Activated Surfaces

 #2
20240109770
2024-04-04

Spring Supported and Sealed MEMS Diaphragm Assembly

 #3
20240067519
2024-02-29

METHODS AND APPARATUS FOR MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICES

 #4
20230422623
2023-12-28

MEMS PROCESS POWER

 #5
20230105699
2023-04-06

PIEZOELECTRIC MEMS MICROPHONE WITH SPRING REGION

 #6
20230094699
2023-03-30

Method and apparatus for controlling stress variation in a material layer formed via pulsed DC physical vapor deposition

 #7
20220199893
2022-06-23

MEMS process power

 #8
20220185656
2022-06-16

Manufacturing method of semiconductor structure

 #9
20210198097
2021-07-01

DEVICE AND METHOD OF FABRICATING SUCH A DEVICE

 #10
20210024352
2021-01-28

MEMS device manufacturing method, MEMS device, and shutter apparatus using the same

 #11
20200361763
2020-11-19

Manufacturing method of semiconductor structure

 #12
20200048072
2020-02-13

Micromechanical sensor that includes a stress decoupling structure

 #13
20200024127
2020-01-23

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #14
20200017356
2020-01-16

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #15
20200017355
2020-01-16

Planar cavity mems and related structures, methods of manufacture and design structures

 #16
20190330057
2019-10-31

MEMS device and method of manufacturing a MEMS device

 #17
20190315619
2019-10-17

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #18
20190248644
2019-08-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #19
20190233277
2019-08-01

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #20
20190169017
2019-06-06

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #21
20190152767
2019-05-23

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #22
20180346318
2018-12-06

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #23
20180319652
2018-11-08

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #24
20180308670
2018-10-25

Method and apparatus for controlling stress variation in a material layer formed via pulsed DC physical vapor deposition

 #25
20180257931
2018-09-13

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #26
20180244514
2018-08-30

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #27
20180201504
2018-07-19

MEMS device and method of manufacturing a MEMS device

 #28
20180159021
2018-06-07

MEMS process power

 #29
20180072568
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #30
20180072567
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #31
20180072566
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #32
20180057357
2018-03-01

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #33
20180050903
2018-02-22

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #34
20180009658
2018-01-11

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #35
20170311083
2017-10-26

MEMS microphone and method of manufacturing the same

 #36
20170158489
2017-06-08

ADDITIONAL SURFACE FOR STABILIZING THE INTERNAL CAVITY PRESSURE OVER THE LIFETIME

 #37
20170152137
2017-06-01

Method for encapsulating a microelectronic device with a release hole of variable dimension

 #38
20170121170
2017-05-04

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #39
20170081172
2017-03-23

Multi-faced component-based electromechanical device

 #40
20170022048
2017-01-26

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #41
20160355392
2016-12-08

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #42
20160329207
2016-11-10

Method for processing photoresist materials and structures

 #43
20160325986
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #44
20160325983
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #45
20160325982
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #46
20160318759
2016-11-03

MEMS device and method of manufacturing a MEMS device

 #47
20160308507
2016-10-20

Mechanical resonator with a spring-mass system comprising a phase-change material

 #48
20160308470
2016-10-20

Mechanical resonator with a spring-mass system comprising a phase-change material

 #49
20160244579
2016-08-25

Microdevices and methods of manufacture

 #50
20160244321
2016-08-25

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #51
20160101974
2016-04-14

Low-stress doped ultrananocrystalline diamond

 #52
20160099124
2016-04-07

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #53
20160096721
2016-04-07

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #54
20160083245
2016-03-24

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #55
20160060107
2016-03-03

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #56
20160060099
2016-03-03

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #57
20160055282
2016-02-25

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #58
20150372454
2015-12-24

Device comprising a strained germanium membrane

 #59
20150321901
2015-11-12

Semiconductor devices and methods of forming thereof

 #60
20150298964
2015-10-22

Inhibiting propagation of surface cracks in a MEMS device

 #61
20150041932
2015-02-12

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #62
20140287547
2014-09-25

Inhibiting propagation of surface cracks in a MEMS Device

 #63
20140264651
2014-09-18

Semiconductor devices and methods of forming thereof

 #64
20140166463
2014-06-19

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #65
20140103460
2014-04-17

MEMS device and method of manufacturing a MEMS device

 #66
20140091674
2014-04-03

Stress relieved microfabricated cantilever

 #67
20140078640
2014-03-20

Thin film device and method for manufacturing thin film device

 #68
20140044937
2014-02-13

Microdevices and methods of manufacture

 #69
20130234265
2013-09-12

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #70
20130221454
2013-08-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #71
20130057558
2013-03-07

MECHANICAL LAYER AND METHODS OF MAKING THE SAME

 #72
20130032904
2013-02-07

Coated Capacitive Sensor

 #73
20120264249
2012-10-18

Method for etched cavity devices

 #74
20120122300
2012-05-17

Film stress management for MEMS through selective relaxation

 #75
20120100719
2012-04-26

Method for making a planar membrane

 #76
20120038010
2012-02-16

Film stress management for MEMS through selective relaxation

 #77
20110318861
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #78
20110316101
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #79
20110316099
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #80
20110316098
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #81
20110316097
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #82
20110315528
2011-12-29

Methods of manufacture for micro-electro-mechanical system (MEMS)

 #83
20110315527
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #84
20110315526
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #85
20110314669
2011-12-29

Method of manufacturing a micro-electro-mechanical system (MEMS)

 #86
20110205615
2011-08-25

MEMS devices with multi-component sacrificial layers

 #87
20110163398
2011-07-07

Method for manufacturing separated micromechanical components situated on a silicon substrate and components manufactured therefrom

 #88
20110081740
2011-04-07

Low stress photo-sensitive resin with sponge-like structure and devices manufactured employing same

 #89
20100193781
2010-08-05

Micromechanical structure and a method of fabricating a micromechanical structure

 #90
20100165442
2010-07-01

MEMS devices with multi-component sacrificial layers

 #91
20100025206
2010-02-04

MEMS device with controlled electrode off-state position

 #92
20090059345
2009-03-05

MEMS DEVICES WITH PROTECTIVE COATINGS

 #93
20090029533
2009-01-29

Method of controlling film stress in MEMS devices

 #94
20080094686
2008-04-24

Sacrificial spacer process and resultant structure for MEMS support structure

 #95
20070206267
2007-09-06

Methods for producing MEMS with protective coatings using multi-component sacrificial layers

 #96
20060289764
2006-12-28

Infrared radiation detector

 #97
20060231521
2006-10-19

Technique for manufacturing micro-electro mechanical structures

 #98
20050012040
2005-01-20

Method of fabrication of an infrared radiation detector and infrared detector device