84114 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Controlling physical properties of the material; Doping materials Thermo-migration of impurities from a solid, e.g. from a doped deposited layer
PROTECTIVE COATING FOR COPPER SURFACE IN SENSOR
#2Method for producing a nanocrystalline, gas-sensitive layer structure
#3Method of making ohmic contact on low doped bulk silicon for optical alignment
#4Method of making ohmic contact on low doped bulk silicon for optical alignment
#5Method of making ohmic contact on low doped bulk silicon for optical alignment
#6Micro-electro-mechanical device and manufacturing process thereof
#7Differential pressure detection element, flow rate measurement device, and method of manufacturing differential pressure detection element
#8Capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
#9Micro-electro-mechanical device and manufacturing process thereof
#10Micro-electro-mechanical device having two buried cavities and manufacturing process thereof
#11Method of manufacturing resonant transducer
#12Methods for Nanostructure Doping
#13Method for producing a MEMS device