84121 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing Selective deposition
Sub-classes:ACTUATOR LAYER DEPOSITION AND TRANSFER
#2CONSTRUCTION METHOD FOR 3D MICRO/NANOSTRUCTURE
#3CONSTRUCTION METHOD FOR 3D MICRO/NANOSTRUCTURE
#4Method for Fabricating a Microfluidic Device
#5Selective step coverage for micro-fabricated structures
#6PIEZOELECTRIC MICROPHONE WITH INTEGRATED CMOS
#7High aspect ratio adhesive structure and a method of forming the same
#8LARGE SCALE NANOELEMENT ASSEMBLY METHOD FOR MAKING NANOSCALE CIRCUIT INTERCONNECTS AND DIODES
#9Fabrication of microstructures integrated with nanopillars along with their applications as electrodes in sensors
#10Method of Manufacturing Nano-Loops Using Branched Nanostructures
#11System and method for positioning and synthesizing of nanostructures
#12Shape controlled growth of nanostructured films and objects