84124 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing; Selective deposition Controlled formation of micro- or nanostructures using a template positioned on a substrate
MEMS MICROMIRROR FOR ALLEVIATING OPTICAL PATH BLOCKAGE, AND PREPARATION METHOD THEREFOR
#2Flexible electrode and preparation method thereof
#3System and methods for microfabrication
#4Method for producing a micromechanical device having a damper structure
#5Physical quantity sensor manufacturing method, physical quantity sensor, electronic device, and vehicle
#6Method of making a nanostructured cylindrical roll
#7Method of depositing electrodes and electrolyte on microelectromechanical system electrochemical sensors
#8Three-dimensional crystalline, homogeneous, and hybrid nanostructures fabricated by electric field directed assembly of nanoelements
#9Physical quantity sensor manufacturing method, physical quantity sensor, electronic device, and vehicle
#10Layer structure and method of manufacturing a layer structure
#11Method for producing a substrate structured by nanowires, produced substrate, and use of the substrate
#12Thermal and thermoacoustic nanodevices and methods of making and using same
#13Method of fabricating a diamond membrane
#14DEVICE AND METHOD FOR PRODUCING A DEVICE COMPRISING MICRO OR NANOSTRUCTURES
#15Nanoshape patterning techniques that allow high-speed and low-cost fabrication of nanoshape structures
#16Process for producing 3-dimensional structure assembled from nanoparticles
#17Method for the production of three-dimensional microstructures
#18METHOD OF MANUFACTURING INERTIAL SENSOR
#19Methods and apparatus for high-throughput formation of nano-scale arrays
#20Fibrous networks and a method and apparatus for continuous or batch fibrous network production
#21Apparatus and method for forming self-assembly arrays