84125 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing; Selective deposition Selective deposition techniques not provided for in -
Forming Antirelaxation Coatings on Interior Surfaces of Vapor Cells
#2METHOD FOR MANUFACTURING A VIBRATORY MECHANICAL INERTIAL SENSOR, SENSOR OBTAINED BY SUCH A METHOD AND INERTIAL UNIT INCLUDING SUCH A SENSOR
#3COMPACT ENHANCED SENSITIVITY TEMPERATURE SENSOR USING AN ENCAPSULATED CLAMPED-CLAMPED MEMS BEAM RESONATOR
#4Three-dimensional features formed in molded panel
#5Micro-electromechanical device having a soft magnetic material electrolessly deposited on a palladium layer coated metal beam
#6LASER ASSISTED METAL ADHESION TO INDIUM TIN OXIDE ON GLASS, QUARTZ, SAPPHIRE AND SINGLE CRYSTAL SILICON WAFER SUBSTRATES FOR HEATED PLATFORMS FOR CELL CULTURING
#7MEMS device having a tiltable suspended structure controlled by electromagnetic actuation
#8Anti-wetting coating for Si-based MEMS fluidic device, and method of application of same
#9Localized surface modification for microfluidic applications
#10Method of manufacturing an electronic device
#11Methods of making microfluidic devices
#12Three-dimensional features formed in molded panel
#13Hermetically sealed MEMS device and its fabrication
#14Method for manufacturing a device having a three-dimensional magnetic structure
#15Micromechanical component and method for producing same
#16Hermetically sealed MEMS device and its fabrication
#17Open cavity package using chip-embedding technology
#18Micromechanical component with a reduced contact surface and its fabrication method
#19Method for manufacturing microcantilever
#20MEMS STRUCTURE WITH MULTILAYER MEMBRANE
#21Through-wafer interconnects for MEMS double-sided fabrication process (TWIDS)
#22Method for producing a micromechanical component, and corresponding micromechanical component
#23Device having element electrode connected to penetrating wire, and method for manufacturing the same
#24Forming magnetic microelectromechanical inductive components
#25Forming magnetic microelectromechanical inductive components
#26Micro-electromechanical device having a soft magnetic material electrolessly deposited on a metal layer
#27Transfer substrate for forming metal wiring and method for forming metal wiring using said transfer substrate
#28Systems and methods for depositing materials on either side of a freestanding film using selective thermally-assisted chemical vapor deposition (STA-CVD), and structures formed using same
#29HIGH AREA STACKED LAYERED METALLIC STRUCTURES AND RELATED METHODS
#30FREE FORM PRINTING OF SILICON MICRO- AND NANOSTRUCTURES
#31VAPOR DEPOSITION APPARATUS FOR MINUTE-STRUCTURE AND METHOD THEREFOR
#32Fibrous networks and a method and apparatus for continuous or batch fibrous network production
#33Method of fabrication of fibers, textiles and composite materials
#34Plasma micronozzle adapter
#35Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays