ClassID:

103462

C09G1/02 - page 4 - CPC Classification

Classification description:

Polishing compositions containing abrasives or grinding agents

Recent Application in this class:
#901
20190010359
2019-01-10

Polishing slurry and polishing material

#902
20190010358
2019-01-10

Polishing composition for magnetic disk substrate

#903
20190010357
2019-01-10

POLISHING COMPOSITION

#904
20190010356
2019-01-10

Hard abrasive particle-free polishing of hard materials

#905
20180371293
2018-12-27

POLISHING COMPOSITION FOR MAGNETIC DISK SUBSTRATE

#906
20180371292
2018-12-27

BUFFERED CMP POLISHING SOLUTION

#907
20180370848
2018-12-27

METHOD FOR POLISHING A PHOSPHATE GLASS OR A FLUOROPHOSPHATE GLASS SUBSTRATE

#908
20180366333
2018-12-20

Biased pulse CMP groove pattern

#909
20180366332
2018-12-20

Controlled residence CMP polishing method

#910
20180366331
2018-12-20

Uniform CMP polishing method

#911
20180362807
2018-12-20

Organic film CMP slurry composition and polishing method using same

#912
20180362806
2018-12-20

CHEMICAL MECHANICAL POLISHING SLURRY COMPOSITION AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME

#913
20180362805
2018-12-20

Aqueous silica slurry compositions for use in shallow trench isolation and methods of using them

#914
20180361525
2018-12-20

Chemical mechanical polishing apparatus, slurry, and method of using the same

#915
20180355213
2018-12-13

Slurry compositions for polishing a metal layer and methods for fabricating semiconductor devices using the same

#916
20180355212
2018-12-13

Polishing composition, method for producing same, and polishing method

#917
20180340094
2018-11-29

Chemical mechanical polishing slurry for cobalt applications

#918
20180339399
2018-11-29

Abrasive slurry regeneration method

#919
20180330956
2018-11-15

Chemical mechanical polishing apparatus

#920
20180323079
2018-11-08

Methods for processing semiconductor wafers having a polycrystalline finish

#921
20180323058
2018-11-08

Method for post chemical mechanical polishing clean

#922
20180320024
2018-11-08

Abrasive, abrasive set, and method for polishing substrate

#923
20180318947
2018-11-08

METAL LAPPING COMPOUND FOR THE LAPPING OF GEARS

#924
20180312725
2018-11-01

Polishing composition

#925
20180305580
2018-10-25

Polishing composition

#926
20180298257
2018-10-18

Chemical-mechanical processing slurry and methods for processing a nickel substrate surface

#927
20180298234
2018-10-18

Chemical-mechanical processing slurry and methods

#928
20180297173
2018-10-18

Methods of Polishing

#929
20180297169
2018-10-18

Methods and compositions for processing dielectric substrate

#930
20180291245
2018-10-11

Cerium-based abrasive material and process for producing same

#931
20180291234
2018-10-11

System for chemical mechanical polishing of Ge-based materials and devices

#932
20180290262
2018-10-11

Polishing composition

#933
20180282581
2018-10-04

Slurry composition for chemical mechanical polishing

#934
20180282580
2018-10-04

Polishing compositions and methods of use thereof

#935
20180277384
2018-09-27

Slurry for polishing of integrated circuit packaging

#936
20180274129
2018-09-27

Silicon carbide substrate

#937
20180273803
2018-09-27

Polishing composition for magnetic disk substrate

#938
20180273802
2018-09-27

POLISHING COMPOSITION USING AMINO ACIDS

#939
20180258320
2018-09-13

Polishing composition

#940
20180258319
2018-09-13

Polishing liquid, polishing liquid set, and substrate polishing method

#941
20180257199
2018-09-13

Sintered vitrified superfinishing grindstone

#942
20180257194
2018-09-13

Polishing method

#943
20180254193
2018-09-06

Polishing slurry for cobalt-containing substrate

#944
20180251680
2018-09-06

SLURRY, POLISHING LIQUID SET, POLISHING LIQUID, METHOD FOR POLISHING SUBSTRATE, AND SUBSTRATE

#945
20180251664
2018-09-06

Slurry, polishing fluid set, polishing fluid, and substrate polishing method using same

#946
20180251658
2018-09-06

Method for polishing cobalt-containing substrate

#947
20180244957
2018-08-30

Polishing composition and polishing method using same

#948
20180244956
2018-08-30

Self-stopping polishing composition and method for bulk oxide planarization

#949
20180244955
2018-08-30

Chemical Mechanical Planarization of Films Comprising Elemental Silicon

#950
20180244532
2018-08-30

Increased wetting of colloidal silica as a polishing slurry

#951
20180236633
2018-08-23

Slurry and Slurry Delivery Technique for Chemical Mechanical Polishing of Copper

#952
20180230334
2018-08-16

Slurry composition for CMP and polishing method using same

#953
20180230333
2018-08-16

Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt comprising substrates

#954
20180230021
2018-08-16

Alumina abrasive particles used for automotive finishing compositions

#955
20180223129
2018-08-09

POLISHING COMPOSITION AND POLISHING METHOD

#956
20180218918
2018-08-02

Chemical mechanical polishing method for tungsten using polyglycols and polyglycol derivatives

#957
20180216240
2018-08-02

Chemical mechanical polishing method for tungsten

#958
20180215953
2018-08-02

Polishing composition and method for polishing magnetic disk substrate

#959
20180215952
2018-08-02

POLISHING COMPOSITION

#960
20180203090
2018-07-19

Resistivity-based calibration of in-situ electromagnetic inductive monitoring

#961
20180203089
2018-07-19

Resistivity-based adjustment of measurements from in-situ monitoring

#962
20180200862
2018-07-19

3D magnetorheological polishing device and magnetorheological polishing fluid

#963
20180190506
2018-07-05

Composition and method for polishing silicon carbide

#964
20180187048
2018-07-05

REDUCTION IN LARGE PARTICLE COUNTS IN POLISHING SLURRIES

#965
20180187047
2018-07-05

Polishing compositions

#966
20180179417
2018-06-28

Polishing agent, storage solution for polishing agent and polishing method

#967
20180179076
2018-06-28

Silica particle dispersion and production method of the same

#968
20180166292
2018-06-14

Indium phosphide smoothing and chemical mechanical planarization processes

#969
20180155591
2018-06-07

Silica-based polishing particle and abrasive

#970
20180151388
2018-05-31

Chemical mechanical polishing device and chemical mechanical polishing method

#971
20180148607
2018-05-31

POLISHING COMPOSITIONS WITH IMPROVED LOW TEMPERATURE PROPERTIES

#972
20180134918
2018-05-17

SOFT POLYMER-BASED MATERIAL POLISHING MEDIA

#973
20180127627
2018-05-10

Silica-based polishing particle and abrasive

#974
20180127618
2018-05-10

Buffered slurry formulation for cobalt CMP

#975
20180118977
2018-05-03

Slurry composition and additives and method for polishing organic polymer-based ophthalmic substrates

#976
20180111248
2018-04-26

Treatment composition for chemical mechanical polishing, chemical mechanical polishing method, and cleaning method

#977
20180108684
2018-04-19

Display device and manufacturing method thereof

#978
20180108536
2018-04-19

Slurry, polishing liquid set, polishing liquid, method for polishing substrate, and substrate

#979
20180105721
2018-04-19

CMP compositions selective for oxide and nitride with improved dishing and pattern selectivity

#980
20180105428
2018-04-19

Silica-based composite fine-particle dispersion, method for producing same, and polishing slurry including silica-based composite fine-particle dispersion

#981
20180100086
2018-04-12

Elevated temperature CMP compositions and methods for use thereof

#982
20180094166
2018-04-05

CMP POLISHING COMPOSITION COMPRISING POSITIVE AND NEGATIVE SILICA PARTICLES

#983
20180086944
2018-03-29

Chemical mechanical planarization slurry and method for forming same

#984
20180086943
2018-03-29

TREATMENT COMPOSITION FOR CHEMICAL MECHANICAL POLISHING, CHEMICAL MECHANICAL POLISHING METHOD, AND CLEANING METHOD

#985
20180079989
2018-03-22

NANOSHEET COMPOSITIONS AND THEIR USE IN LUBRICANTS AND POLISHING SLURRIES

#986
20180079931
2018-03-22

Reduction in large particle counts in polishing slurries

#987
20180079930
2018-03-22

Polishing agent for synthetic quartz glass substrate and method for polishing synthetic quartz glass substrate

#988
20180072917
2018-03-15

Polishing agent, polishing method, and liquid additive for polishing

#989
20180072916
2018-03-15

DIAMOND-BASED SLURRIES WITH IMPROVED SAPPHIRE REMOVAL RATE AND SURFACE ROUGHNESS

#990
20180066161
2018-03-08

Polishing composition for silicon wafer and polishing method

#991
20180057712
2018-03-01

Polishing composition for magnetic disc substrate

#992
20180057711
2018-03-01

Polishing composition

#993
20180057710
2018-03-01

POLISHING COMPOSITION AND POLISHING METHOD

#994
20180043497
2018-02-15

Polishing agent, stock solution for polishing agent, and polishing method

#995
20180030313
2018-02-01

METHOD FOR POLISHING SILICON WAFER AND SURFACE TREATMENT COMPOSITION

#996
20180022960
2018-01-25

POLISHING COMPOSITION, POLISHING METHOD, AND METHOD FOR MANUFACTURING HARD BRITTLE MATERIAL SUBSTRATE

#997
20180022959
2018-01-25

POLISHING COMPOSITION

#998
20180016469
2018-01-18

Alternative oxidizing agents for cobalt CMP

#999
20180016468
2018-01-18

Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt and / or cobalt alloy comprising substrates

#1000
20180016467
2018-01-18

Composition for chemical mechanical polishing and method for reducing chemical mechanical polishing surface defects

#1001
20180002571
2018-01-04

Additives for barrier chemical mechanical planarization

#1002
20170372918
2017-12-28

Composition and Method Used for Chemical Mechanical Planarization of Metals

#1003
20170369743
2017-12-28

Chemical mechanical polishing (CMP) composition for high effective polishing of substrates comprising germanium

#1004
20170369742
2017-12-28

Polishing composition comprising an amine-containing surfactant

#1005
20170369741
2017-12-28

Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt and / or cobalt alloy comprising substrates

#1006
20170362466
2017-12-21

Chemical mechanical polishing (CMP) of cobalt-containing substrate

#1007
20170362465
2017-12-21

Modified colloidal silica and method for producing the same, and polishing agent using the same

#1008
20170362464
2017-12-21

Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt and / or cobalt alloy comprising substrates

#1009
20170362463
2017-12-21

Method for preparing an aluminum oxide polishing solution

#1010
20170355882
2017-12-14

POLISHING COMPOSITION, POLISHING METHOD, AND METHOD FOR MANUFACTURING CERAMIC COMPONENT

#1011
20170355881
2017-12-14

Polishing composition, polishing method, and method for manufacturing ceramic component

#1012
20170355880
2017-12-14

Abrasive composition

#1013
20170349788
2017-12-07

POLYDISPERSE LARGE-PARTICLE-SIZE SILICA SOL AND METHOD OF PREPARING THE SAME

#1014
20170348820
2017-12-07

Chemical-mechanical processing slurry and methods for processing a nickel substrate surface

#1015
20170342304
2017-11-30

POLISHING COMPOSITION

#1016
20170338123
2017-11-23

Chemical mechanical polishing slurry, method for chemical mechanical polishing and manufacturing method of semiconductor structure

#1017
20170335489
2017-11-23

Silicon carbide substrate, method for producing same, and method for manufacturing silicon carbide semiconductor device

#1018
20170335139
2017-11-23

CMP slurry composition for polishing copper and polishing method using the same

#1019
20170330763
2017-11-16

Semiconductor treatment composition and treatment method

#1020
20170321098
2017-11-09

Polishing composition

#1021
20170321086
2017-11-09

Polishing composition for magnetic disc substrate

#1022
20170320187
2017-11-09

Polishing method and polishing composition

#1023
20170298253
2017-10-19

Polishing composition and polishing method

#1024
20170298252
2017-10-19

NANOPARTICLE BASED CERIUM OXIDE SLURRIES

#1025
20170292039
2017-10-12

POLISHING COMPOSITION, METHOD FOR MANUFACTURING SAME, AND POLISHING METHOD

#1026
20170292038
2017-10-12

Polishing composition for silicon oxide film

#1027
20170283673
2017-10-05

Composite particles, method of refining and use thereof

#1028
20170278718
2017-09-28

CMP polishing agent, manufacturing method thereof, and method for polishing substrate

#1029
20170275498
2017-09-28

POLISHING COMPOSITION

#1030
20170271172
2017-09-21

CMP slurry composition for polishing copper line and polishing method using same

#1031
20170267895
2017-09-21

POLISHING SLURRY FOR CMP AND POLISHING METHOD

#1032
20170260436
2017-09-14

Abrasives, polishing composition, and polishing method

#1033
20170260421
2017-09-14

Cobalt polishing accelerators

#1034
20170259229
2017-09-14

Advanced fluid processing methods and systems

#1035
20170256439
2017-09-07

Semiconductor substrate polishing methods and slurries and methods for manufacturing silicon on insulator structures

#1036
20170253767
2017-09-07

Silicon wafer polishing composition

#1037
20170253766
2017-09-07

SLURRY COMPOSITION, USE THEREOF, AND POLISHING METHOD

#1038
20170247574
2017-08-31

Polishing composition

#1039
20170243752
2017-08-24

POLISHING COMPOSITION AND METHOD FOR PRODUCING POLISHING COMPOSITION

#1040
20170236718
2017-08-17

Method of polishing group III-V materials

#1041
20170226381
2017-08-10

Chemical-mechanical polishing composition comprising organic/inorganic composite particles

#1042
20170226380
2017-08-10

POLISHING SOLUTIONS AND METHODS OF USING SAME

#1043
20170218229
2017-08-03

Germanium smoothing and chemical mechanical planarization processes

#1044
20170216993
2017-08-03

COMPOSITION FOR POLISHING TITANIUM ALLOY MATERIAL

#1045
20170216992
2017-08-03

METHOD FOR POLISHING GERMANIUM WAFER

#1046
20170216990
2017-08-03

Method and device for dispensing solid compound pastes for surface processing, and related surface processing method and system

#1047
20170213742
2017-07-27

Final polishing method of silicon wafer and silicon wafer

#1048
20170210958
2017-07-27

CMP POLISHING LIQUID, AND POLISHING METHOD

#1049
20170210946
2017-07-27

Polishing composition comprising cationic polymer additive

#1050
20170207100
2017-07-20

Method of fabricating integrated circuit device by using slurry composition

#1051
20170204293
2017-07-20

Slurry composition and method of use

#1052
20170200617
2017-07-13

Polishing liquid for CMP, polishing liquid set for CMP, and polishing method

#1053
20170194160
2017-07-06

METHOD OF POLISHING A LOW-K SUBSTRATE

#1054
20170190936
2017-07-06

Tungsten processing slurry with catalyst

#1055
20170183540
2017-06-29

CMP processing composition comprising alkylamine and cyclodextrin

#1056
20170183539
2017-06-29

Abrasive particle-dispersion layer composite and polishing slurry composition including the same

#1057
20170183538
2017-06-29

Additive composition and positive polishing slurry composition including the same

#1058
20170183537
2017-06-29

POLISHING SLURRY COMPOSITION

#1059
20170178926
2017-06-22

Polishing composition and polishing method

#1060
20170174940
2017-06-22

Polishing composition

#1061
20170174939
2017-06-22

Polishing composition

#1062
20170166780
2017-06-15

Abrasive particle-dispersion layer composite and polishing slurry composition including the same

#1063
20170166779
2017-06-15

CMP slurry composition for metal wiring and polishing method using the same

#1064
20170166778
2017-06-15

CHEMICAL MECHANICAL POLISHING (CMP) COMPOSITION COMPRISING A POLY(AMINOACID)

#1065
20170158914
2017-06-08

CMP slurry solution for hardened fluid material

#1066
20170158912
2017-06-08

Method of controlling selectivity using composition for polishing silicon nitride

#1067
20170158911
2017-06-08

Halite salts as silicon carbide etchants for enhancing CMP material removal rate for SiC wafer

#1068
20170154787
2017-06-01

CMP polishing liquid and polishing method

#1069
20170152421
2017-06-01

Metal doped cerium oxide compositions

#1070
20170145259
2017-05-25

Polishing slurry for silicon, method of polishing polysilicon and method of manufacturing a thin film transistor substrate

#1071
20170141308
2017-05-18

Slurry for polishing phase-change materials and method for producing a phase-change device using same

#1072
20170136600
2017-05-18

Polishing composition and polishing method using the same

#1073
20170133238
2017-05-11

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SLURRY FOR CHEMICAL MECHANICAL POLISHING

#1074
20170133237
2017-05-11

POLISHING LIQUID AND METHOD FOR POLISHING SUBSTRATE USING THE POLISHING LIQUID

#1075
20170133236
2017-05-11

Composite abrasive particles for chemical mechanical planarization composition and method of use thereof

#1076
20170130097
2017-05-11

Abrasive material

#1077
20170121561
2017-05-04

Tungsten-processing slurry with cationic surfactant

#1078
20170121560
2017-05-04

Tungsten-processing slurry with cationic surfactant and cyclodextrin

#1079
20170110334
2017-04-20

Germanium smoothing and chemical mechanical planarization processes

#1080
20170110333
2017-04-20

Group III arsenide material smoothing and chemical mechanical planarization processes

#1081
20170110332
2017-04-20

Indium phosphide smoothing and chemical mechanical planarization processes

#1082
20170107405
2017-04-20

Slurry compounds and methods of fabricating semiconductor devices using the same

#1083
20170107404
2017-04-20

Slurry composition for chemical mechanical polishing, method of preparing the same, and polishing method using the same

#1084
20170107115
2017-04-20

Processing of alumina

#1085
20170100815
2017-04-13

Method for polishing GaN single crystal material

#1086
20170098560
2017-04-06

Slurry composition for chemical mechanical polishing of GE-based materials and devices

#1087
20170096584
2017-04-06

Polishing composition, polishing method, and method for producing polishing composition

#1088
20170088748
2017-03-30

Stop-on silicon containing layer additive

#1089
20170081554
2017-03-23

Composition for polishing silicon wafers

#1090
20170081553
2017-03-23

POLISHING COMPOSITION

#1091
20170081552
2017-03-23

Polishing composition, polishing method, and method for producing substrate

#1092
20170072530
2017-03-16

Method of chemical mechanical polishing of alumina

#1093
20170066944
2017-03-09

METHODS AND COMPOSITIONS FOR PROCESSING DIELECTRIC SUBSTRATE

#1094
20170066102
2017-03-09

Selective nitride slurries with improved stability and improved polishing characteristics

#1095
20170053826
2017-02-23

Semiconductor substrate polishing methods and slurries and methods for manufacturing silicon on insulator structures

#1096
20170051181
2017-02-23

Polishing composition and method utilizing abrasive particles treated with an aminosilane

#1097
20170051180
2017-02-23

Method for preparing slurry composition and slurry composition prepared thereby

#1098
20170044403
2017-02-16

Polishing composition containing ceria abrasive

#1099
20170044402
2017-02-16

Chemical-mechanical polishing compositions comprising N,N,N′,N′-tetrakis-(2-hydroxypropyl)-ethylenediamine or methanesulfonic acid

#1100
20170037290
2017-02-09

CMP polishing agent, method for manufacturing thereof, and method for polishing substrate

#1101
20170037278
2017-02-09

Slurry composition and method for polishing substrate

#1102
20170029664
2017-02-02

Polishing compositions and methods of manufacturing semiconductor devices using the same

#1103
20170022392
2017-01-26

POLISHING COMPOSITION FOR HARD MATERIALS

#1104
20170022391
2017-01-26

Polishing slurry composition

#1105
20170015868
2017-01-19

Polishing composition and method for polishing magnetic disk substrate

#1106
20170015867
2017-01-19

Polishing composition and method for polishing magnetic disk substrate

#1107
20170014969
2017-01-19

Methods and compositions for processing dielectric substrate

#1108
20170009353
2017-01-12

Slurry composition for polishing tungsten

#1109
20170009102
2017-01-12

Polishing agent and method for polishing substrate using the polishing agent

#1110
20170009101
2017-01-12

Polishing composition

#1111
20170002233
2017-01-05

Abrasive particles, polishing slurry and method of fabricating abrasive particles

#1112
20160376468
2016-12-29

Method for preparing recycled abrasive slurry

#1113
20160358790
2016-12-08

Barrier chemical mechanical planarization slurries using ceria-coated silica abrasives

#1114
20160347971
2016-12-01

Chemical mechanical polishing slurry

#1115
20160329215
2016-11-10

Chemical mechanical polishing method using slurry composition containing N-oxide compound

#1116
20160325398
2016-11-10

Polishing abrasive particle, production method therefore, polishing method, polishing device, and slurry

#1117
20160319160
2016-11-03

Metal oxide-polymer composite particles for chemical mechanical planarization

#1118
20160319159
2016-11-03

Abrasive, abrasive set, and method for polishing substrate

#1119
20160314989
2016-10-27

Low dishing copper chemical mechanical planarization

#1120
20160312069
2016-10-27

Liquid suspension of cerium oxide particles

#1121
20160304748
2016-10-20

In Situ Formation of Stable Aqueous, Semi-Aqueous or Non-Aqueous Slurry Suspensions of Gelatinous Particles for Separating and Suspending Inert and Abrasive Particles in a Carrier Medium

#1122
20160297998
2016-10-13

CHEMICAL MACHNICAL POLISHING SLURRY

#1123
20160293436
2016-10-06

Polishing composition

#1124
20160289500
2016-10-06

Compositions comprising silane modified metal oxides

#1125
20160288290
2016-10-06

CMP composition and method for polishing rigid disks

#1126
20160288289
2016-10-06

POLISHING COMPOSITION

#1127
20160281264
2016-09-29

Method of preparing a monocrystalline diamond abrasive grain

#1128
20160280963
2016-09-29

RASPBERRY-TYPE METAL OXIDE NANOSTRUCTURES COATED WITH CEO2 NANOPARTICLES FOR CHEMICAL MECHANICAL PLANARIZATION (CMP)

#1129
20160280962
2016-09-29

Metal compound chemically anchored colloidal particles and methods of production and use thereof

#1130
20160280961
2016-09-29

Slurry, polishing solution set, polishing solution, and substrate polishing method

#1131
20160272847
2016-09-22

Polishing slurry and substrate polishing method using the same

#1132
20160272846
2016-09-22

Polishing composition, method for producing polishing composition and polishing composition preparation kit

#1133
20160257856
2016-09-08

Polishing composition containing ceria abrasive

#1134
20160257855
2016-09-08

Polishing composition containing ceria particles and method of use

#1135
20160257854
2016-09-08

POLISHING COMPOSITION AND POLISHING PROCESSING METHOD USING SAME

#1136
20160257853
2016-09-08

Polishing composition containing cationic polymer additive

#1137
20160251547
2016-09-01

Polishing slurry and method of polishing substrate using the same

#1138
20160247693
2016-08-25

Metal film polishing slurry composition, and method for reducing scratches generated when polishing metal film by using same

#1139
20160244639
2016-08-25

Composition and method for polishing memory hard disks exhibiting reduced edge roll-off

#1140
20160237316
2016-08-18

Polishing agent, polishing method and method for manufacturing semiconductor integrated circuit device

#1141
20160237315
2016-08-18

Dishing reducing in tungsten chemical mechanical polishing

#1142
20160229023
2016-08-11

Multi-layered polishing pads

#1143
20160222254
2016-08-04

CMP composition for silicon nitride removal

#1144
20160222253
2016-08-04

Polishing agent, polishing method, and liquid additive for polishing

#1145
20160222252
2016-08-04

Slurry, polishing-liquid set, polishing liquid, method for polishing substrate, and substrate

#1146
20160221146
2016-08-04

Composite ceramic abrasive polishing solution

#1147
20160217818
2016-07-28

Method for manufacturing glass substrate and method for manufacturing magnetic disk

#1148
20160215189
2016-07-28

Polishing composition and method for producing same

#1149
20160215170
2016-07-28

POLISHING COMPOSITION

#1150
20160208141
2016-07-21

Polishing composition

#1151
20160200944
2016-07-14

Composite abrasive particles for chemical mechanical planarization composition and method of use thereof

#1152
20160200943
2016-07-14

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2016-06-30

Method for producing polished object and polishing composition kit

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2016-06-30

Polishing composition

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Chemical mechanical polishing (CMP) composition for shallow trench isolation (STI) applications and methods of making thereof

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2016-06-16

CMP compositions exhibiting reduced dishing in STI wafer polishing

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2016-06-09

CMP COMPOSITION COMPRISING ABRASIVE PARTICLES CONTAINING CERIA

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2016-06-02

Removal of defects by in-situ etching during chemical-mechanical polishing processing

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20160151876
2016-06-02

Kit for polishing sapphire surfaces

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20160141182
2016-05-19

SLURRY COMPOSITIONS AND METHODS OF FABRICATING SEMICONDUCTOR DEVICES USING THE SAME

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Polishing liquid for CMP, and polishing method

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20160122591
2016-05-05

SILICON WAFER POLISHING COMPOSITION

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Chemical Mechanical Polishing Slurry for Reducing Corrosion and Method of Use Therefor

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20160115353
2016-04-28

Cobalt polishing accelerators

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20160108286
2016-04-21

Slurry for chemical mechanical polishing of cobalt

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20160108285
2016-04-21

Cobalt dishing control agents

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20160107289
2016-04-21

Corrosion inhibitors and related compositions and methods

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2016-04-21

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Nickel phosphorous CMP compositions and methods

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2016-04-07

Use of a chemical-mechanical polishing (CMP) composition for polishing a substrate or layer containing at least one III-V material

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2016-03-31

Chemical mechanical planarization slurry composition comprising composite particles, process for removing material using said composition, CMP polishing pad and process for preparing said composition

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Composition for tungsten CMP

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20160079084
2016-03-17

Composition and method used for chemical mechanical planarization of metals

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20160079080
2016-03-17

Polishing compositions and methods for selectively polishing silicon nitride over silicon oxide films

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20160071737
2016-03-10

Slurry composition for chemical mechanical polishing of Ge-based materials and devices

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20160068712
2016-03-10

Chemical-mechanical polishing compositions comprising polyethylene imine

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20160068711
2016-03-10

Organic Film CMP Slurry Composition and Polishing Method Using Same

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20160068710
2016-03-10

Polishing compositions and methods for polishing cobalt films

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20160060488
2016-03-03

Polishing of hard substrates with soft-core composite particles

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20160060487
2016-03-03

COMPOSITION AND METHOD FOR POLISHING A SAPPHIRE SURFACE

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20160053549
2016-02-25

Methods of forming earth-boring tools

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20160053136
2016-02-25

Reduction in large particle counts in polishing slurries

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20160042993
2016-02-11

Etching liquid, etching method, and method of manufacturing solder bump

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20160040041
2016-02-11

Abrasive, abrasive set, and method for abrading substrate

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20160040040
2016-02-11

Slurry for Selective Chemical Mechanical Polishing of Copper

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20160032461
2016-02-04

Chemical mechanical polishing of alumina

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20160027663
2016-01-28

Method for chemical mechanical polishing substrates containing ruthenium and copper

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20160027657
2016-01-28

Chemical mechanical polishing (CMP) of cobalt-containing substrate

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20160024350
2016-01-28

Methods of manufacturing abrasive particle and polishing slurry

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20160017181
2016-01-21

CMP slurry composition for polishing copper, and polishing method using same

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20160013066
2016-01-14

CHEMICAL MECHANICAL POLISHING (CMP) COMPOSITION

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20160009955
2016-01-14

CHEMICAL-MECHANICAL POLISHING COMPOSITIONS COMPRISING N,N,N',N'-TETRAKIS-(2-HYDROXYPROPYL)-ETHYLENEDIAMINE OR METHANESULFONIC ACID

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2016-01-07

Polishing composition

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2016-01-07

Nano-diamond dispersion solution and method for preparing same