121258 ⎘
Liquid-phase epitaxial-layer growth; Reaction chambers; Boats for supporting the melt; Substrate holders Injection or centrifugal force system
Film formation apparatus and method of manufacturing semiconductor device
#2Method for manufacturing group 13 nitride crystal and group 13 nitride crystal
#3APPARATUS AND METHOD FOR THE PRODUCTION OF INGOTS
#4Apparatus and method for the production of ingots