121252 ⎘
Liquid-phase epitaxial-layer growth Reaction chambers; Boats for supporting the melt; Substrate holders
Sub-classes:Method of forming oxide film, method of manufacturing semiconductor device, and apparatus configured to form oxide film
#2Method of forming oxide film, method of manufacturing semiconductor device, and film forming apparatus configured to form oxide film
#3SiC crucible, SiC sintered body, and method of producing SiC single crystal
#4METHOD OF PRODUCING SiC SINGLE CRYSTAL
#5Devices and methods for electrochemical liquid phase epitaxy
#6METHOD FOR PRODUCING GROUP 13 NITRIDE SINGLE CRYSTAL AND APPARATUS FOR PRODUCING GROUP 13 NITRIDE SINGLE CRYSTAL
#7Self-aligned tunable metamaterials
#8Method for growing a bulk single crystal nitride material
#9SELF-ALIGNED TUNABLE METAMATERIALS
#10Low temperature continuous circulation reactor for the aqueous synthesis of ZnO films, nanostructures, and bulk single crystals
#11Group III nitride semiconductor single crystal, method for producing the same, self-standing substrate, and semiconductor device
#12Manufacturing apparatus of SiC single crystal, jig for use in the manufacturing apparatus, and method for manufacturing SiC single crystal
#13Manufacturing method and manufacturing apparatus of a group III nitride crystal, utilizing a melt containing a group III metal, an alkali metal, and nitrogen
#14Method of forming epitaxial based integrated circuit
#15Method of forming epitaxial semiconductor structure
#16Method of forming epitaxial film
#17Method of transferring epitaxial film
#18Method of integrating epitaxial film onto assembly substrate
#19REACTION VESSEL FOR GROWING SINGLE CRYSTAL AND METHOD FOR GROWING SINGLE CRYSTAL
#20Apparatus for making epitaxial film
#21Group III nitride crystal, method for growing the group III nitride crystal, and apparatus for growing the same
#22Method of integrating epitaxial film onto assembly substrate
#23Epitaxy-Level Packaging (ELP) System
#24Apparatus for making epitaxial film
#25Apparatus for producing nitride single crystal
#26Nitride single crystal manufacturing apparatus
#27Manufacturing method and manufacturing apparatus of a group III nitride crystal
#28Epitaxial growth of structures with nano-dimensional features from liquid phase by pulse cooling of substrate
#29Method of manufacturing Group III nitride crystals, method of manufacturing semiconductor substrate, Group III nitride crystals, semiconductor substrate, and electronic device