ClassID:

121329

C30B29/36 - page 4 - CPC Classification

Classification description:

Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape; Inorganic compounds or compositions Carbides

Recent Application in this class:
#901
20140284621
2014-09-25

Semiconductor device and method of manufacturing the same

#902
20140284619
2014-09-25

SiC epitaxial wafer and semiconductor device

#903
20140284616
2014-09-25

Self-formation of high-density arrays of nanostructures

#904
20140284547
2014-09-25

Self-formation of high-density arrays of nanostructures

#905
20140245945
2014-09-04

SiC single crystal manufacturing method using alternating states of supersaturation

#906
20140234194
2014-08-21

Vanadium doped SiC single crystals and method thereof

#907
20140231826
2014-08-21

Methods of growing a silicon carbide epitaxial layer on a substrate to increase and control carrier lifetime

#908
20140230734
2014-08-21

Deposition apparatus

#909
20140230722
2014-08-21

Epitaxial wafer manufacturing device and manufacturing method

#910
20140225127
2014-08-14

Monocrystalline SiC substrate with a non-homogeneous lattice plane course

#911
20140220325
2014-08-07

Method to reduce dislocations in SiC crystal growth

#912
20140220299
2014-08-07

SINGLE-CRYSTAL SILICON-CARBIDE SUBSTRATE AND POLISHING SOLUTION

#913
20140220298
2014-08-07

Method for growing a SiC crystal by vapor deposition onto a seed crystal provided on a supporting shelf which permits thermal expansion

#914
20140220296
2014-08-07

Method for growing a SiC crystal by vapor deposition onto a seed crystal provided on a support shelf which permits thermal expansion

#915
20140216330
2014-08-07

Apparatus for fabricating silicon carbide single crystal ingot and method for fabricating ingot

#916
20140193965
2014-07-10

Reduction of basal plane dislocations in epitaxial SiC using an in-situ etch process

#917
20140190400
2014-07-10

Epitaxial wafer manufacturing device and manufacturing method

#918
20140190399
2014-07-10

Reduction of basal plane dislocations in epitaxial SiC using an in-situ etch process

#919
20140175461
2014-06-26

SIC epitaxial wafer and method for manufacturing same

#920
20140127466
2014-05-08

SiC single crystal and method of producing same

#921
20140123901
2014-05-08

Silicon carbide single crystal manufacturing apparatus

#922
20140120637
2014-05-01

Process for growing at least one nanowire using a transition metal nitride layer obtained in two steps

#923
20140117380
2014-05-01

Flat SiC semiconductor substrate

#924
20140117308
2014-05-01

Electronic device containing nanowire(s), equipped with a transition metal buffer layer, process for growing at least one nanowire, and process for manufacturing a device

#925
20140116325
2014-05-01

Production apparatus of SiC single crystal by solution growth method, method for producing SiC single crystal using the production apparatus, and crucible used in the production apparatus

#926
20140116324
2014-05-01

Production apparatus and production method of SiC single crystal

#927
20140113136
2014-04-24

UNSEEDED SILICON CARBIDE SINGLE CRYSTALS

#928
20140091325
2014-04-03

SiC single crystal, production method therefor, SiC wafer and semiconductor device

#929
20140051235
2014-02-20

Method for producing single crystal SiC substrate and single crystal SiC substrate produced by the same

#930
20140027787
2014-01-30

SiC single crystal, SiC wafer, and semiconductor device

#931
20140007807
2014-01-09

Method for producing SiC single crystals by control of an angle formed by the meniscus and the side face of the seed crystal and production device for the method

#932
20140004303
2014-01-02

SILICON CARBIDE CRYSTAL AND METHOD OF MANUFACTURING SILICON CARBIDE CRYSTAL

#933
20140001679
2014-01-02

Laser processing method

#934
20130320275
2013-12-05

Vanadium compensated, SI SiC single crystals of NU and PI type and the crystal growth process thereof

#935
20130313575
2013-11-28

Semi-insulating silicon carbide monocrystal and method of growing the same

#936
20130309496
2013-11-21

Method for synthesizing ultrahigh-purity silicon carbide

#937
20130305983
2013-11-21

Physical vapor transport growth system for simultaneously growing more than one SiC single crystal and method of growing

#938
20130305982
2013-11-21

Process for growing silicon carbide single crystal and device for the same

#939
20130305981
2013-11-21

Manufacturing apparatus of SiC single crystal, jig for use in the manufacturing apparatus, and method for manufacturing SiC single crystal

#940
20130285060
2013-10-31

Unit for liquid phase epitaxial growth of monocrystalline silicon carbide, and method for liquid phase epitaxial growth of monocrystalline silicon carbide

#941
20130284083
2013-10-31

Manufacturing apparatus of SiC single crystal and method for manufacturing SiC single crystal

#942
20130280466
2013-10-24

Large diameter, high quality SiC single crystals, method and apparatus

#943
20130269598
2013-10-17

Process for growing silicon carbide single crystal by physical vapor transport method and annealing silicon carbide single crystal in situ

#944
20130269597
2013-10-17

Seed material for liquid phase epitaxial growth of monocrystalline silicon carbide, and method for liquid phase epitaxial growth of monocrystalline silicon carbide

#945
20130269596
2013-10-17

Method for epitaxial growth of monocrystalline silicon carbide using a feed material including a surface layer containing a polycrystalline silicon carbide with a 3C crystal polymorph

#946
20130263774
2013-10-10

Seed material for liquid phase epitaxial growth of monocrystalline silicon carbide, and method for liquid phase epitaxial growth of monocrystalline silicon

#947
20130256700
2013-10-03

Silicon carbide substrate, semiconductor device, and methods for manufacturing them

#948
20130239880
2013-09-19

Base material for growing single crystal diamond and method for producing single crystal diamond substrate

#949
20130237041
2013-09-12

Defect capping method for reduced defect density epitaxial articles

#950
20130234164
2013-09-12

Silicon carbide substrate, semiconductor device and method for manufacturing silicon carbide substrate

#951
20130234162
2013-09-12

Smoothing method for semiconductor material and wafers produced by same

#952
20130220212
2013-08-29

Method for manufacturing N-type SiC single crystal by solution growth using a mixed gas atmosphere

#953
20130217213
2013-08-22

Production process of epitaxial silicon carbide single crystal substrate

#954
20130171403
2013-07-04

Production method for an SiC volume monocrystal with a non-homogeneous lattice plane course and a monocrystalline SiC substrate with a non-homogeneous lattice plane course

#955
20130171402
2013-07-04

Production method for an SiC volume monocrystal with a homogeneous lattice plane course and a monocrystalline SiC substrate with a homogeneous lattice plane course

#956
20130168697
2013-07-04

Method of manufacturing silicon carbide structure

#957
20130161646
2013-06-27

Dislocations in SiC semiconductor substrate

#958
20130157448
2013-06-20

Reaction chamber including a susceptor having draining openings for manufacturing a silicon carbide wafer

#959
20130153928
2013-06-20

Method for controlled growth of silicon carbide and structures produced by same

#960
20130153836
2013-06-20

METHOD OF PRODUCING SILICON CARBIDE SINGLE CRYSTAL, SILICON CARBIDE SINGLE CRYSTAL, AND SILICON CARBIDE SINGLE CRYSTAL SUBSTRATE

#961
20130143396
2013-06-06

Pretreatment method for reduction and/or elimination of basal plane dislocations close to epilayer/substrate interface in growth of SiC epitaxial films

#962
20130122692
2013-05-16

Semiconductor device manufacturing method and substrate manufacturing method of forming silicon carbide films on the substrate

#963
20130119406
2013-05-16

SILICON CARBIDE SUBSTRATE, SEMICONDUCTOR DEVICE, AND METHODS FOR MANUFACTURING THEM

#964
20130105858
2013-05-02

SiCAlNsubstrate, and epitaxial wafer

#965
20130099252
2013-04-25

METHOD OF MANUFACTURING SILICON CARBIDE SUBSTRATE AND SILICON CARBIDE SUBSTRATE

#966
20130095294
2013-04-18

SILICON CARBIDE INGOT AND SILICON CARBIDE SUBSTRATE, AND METHOD OF MANUFACTURING THE SAME

#967
20130095285
2013-04-18

SILICON CARBIDE SUBSTRATE, SILICON CARBIDE INGOT, AND METHOD OF MANUFACTURING THE SAME

#968
20130092956
2013-04-18

SILICON CARBIDE SUBSTRATE, SILICON CARBIDE SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING SILICON CARBIDE SUBSTRATE, AND METHOD FOR MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE

#969
20130071643
2013-03-21

Silicon carbide substrate and method of manufacturing the same

#970
20130068157
2013-03-21

METHOD OF MANUFACTURING SILICON CARBIDE CRYSTAL

#971
20130062628
2013-03-14

METHODS FOR THE EPITAXIAL GROWTH OF SILICON CARBIDE

#972
20130061801
2013-03-14

METHOD FOR MANUFACTURING SILICON CARBIDE CRYSTAL

#973
20130049014
2013-02-28

Epitaxial silicon carbide single crystal substrate and process for producing the same

#974
20130042802
2013-02-21

METHOD OF PRODUCTION OF SIC SINGLE CRYSTAL

#975
20130040103
2013-02-14

Method of manufacturing single crystal 3C-SiC substrate and single crystal 3C-SiC substrate obtained from the manufacturing method

#976
20130032822
2013-02-07

Substrate, semiconductor device, and method of manufacturing the same

#977
20130029158
2013-01-31

Process for producing epitaxial silicon carbide single crystal substrate and epitaxial silicon carbide single crystal substrate obtained by the same

#978
20130025531
2013-01-31

METHODS FOR MODIFYING CRYSTALLOGRAPHIC SYMMETRY ON THE SURFACE OF A SILICON WAFER

#979
20130009170
2013-01-10

Epitaxial SiC single crystal substrate and method of manufacture of epitaxial SiC single crystal substrate

#980
20130000547
2013-01-03

METHOD FOR FIXING SILICON CARBIDE SEED CRYSTAL AND METHOD FOR PRODUCING SINGLE CRYSTAL SILICON CARBIDE

#981
20120325196
2012-12-27

METHOD FOR MANUFACTURING SILICON CARBIDE SUBSTRATE

#982
20120325150
2012-12-27

APPARATUS FOR PRODUCING SILICON CARBIDE SINGLE CRYSTAL

#983
20120321892
2012-12-20

Titanium-Group Nano-Whiskers and Method of Production

#984
20120319125
2012-12-20

SILICON CARBIDE SUBSTRATE AND METHOD OF MANUFACTURING THE SAME

#985
20120318198
2012-12-20

Shield member and apparatus for growing single crystal equipped with the same

#986
20120315427
2012-12-13

Single crystal silicon carbide substrate and method of manufacturing the same

#987
20120308758
2012-12-06

Silicon carbide crystal ingot, silicon carbide crystal wafer, and method for fabricating silicon carbide crystal ingot

#988
20120304916
2012-12-06

METHOD OF PRODUCING SILICON CARBIDE SINGLE CRYSTAL

#989
20120304839
2012-12-06

Method of manufacturing silicon carbide substrate

#990
20120301723
2012-11-29

Tantalum carbide-coated carbon material and manufacturing method for same

#991
20120298092
2012-11-29

METHOD FOR PRODUCING GEMSTONES FROM SILICON CARBIDE

#992
20120295112
2012-11-22

SILICON CARBIDE POWDER AND METHOD FOR PRODUCING SILICON CARBIDE POWDER

#993
20120294790
2012-11-22

SILICON CARBIDE SUBSTRATE, SILICON CARBIDE INGOT, AND METHODS FOR MANUFACTURING SILICON CARBIDE SUBSTRATE AND SILICON CARBIDE INGOT

#994
20120285370
2012-11-15

SUBLIMATION GROWTH OF SIC SINGLE CRYSTALS

#995
20120280254
2012-11-08

SIC EPITAXIAL WAFER AND METHOD FOR MANUFACTURING SAME

#996
20120275984
2012-11-01

Method for manufacturing silicon carbide single crystal, and silicon carbide substrate

#997
20120248463
2012-10-04

Epitaxial growth on low degree off-axis silicon carbide substrates and semiconductor devices made thereby

#998
20120244684
2012-09-27

FILM-FORMING APPARATUS AND METHOD

#999
20120244307
2012-09-27

SILICON CARBIDE SUBSTRATE

#1000
20120241766
2012-09-27

Epitaxial wafer and semiconductor element

#1001
20120241741
2012-09-27

SILICON CARBIDE SUBSTRATE

#1002
20120237428
2012-09-20

SiC single crystal and production method thereof

#1003
20120235163
2012-09-20

Semiconductor substrate and method for producing semiconductor substrate

#1004
20120234231
2012-09-20

PROCESS FOR PRODUCING SILICON CARBIDE SINGLE CRYSTALS

#1005
20120225004
2012-09-06

Halosilane assisted PVT growth of SiC

#1006
20120220108
2012-08-30

Substrate processing apparatus

#1007
20120211769
2012-08-23

SiC single crystal wafer and process for production thereof

#1008
20120196038
2012-08-02

Jig for semiconductor production and method for producing same

#1009
20120192790
2012-08-02

Apparatus with two-chamber structure for growing silicon carbide crystals

#1010
20120183466
2012-07-19

Silicon carbide crystal and method of manufacturing silicon carbide crystal

#1011
20120171848
2012-07-05

Method and System for Manufacturing Silicon and Silicon Carbide

#1012
20120168774
2012-07-05

SILICON CARBIDE SUBSTRATE AND METHOD FOR MANUFACTURING SAME

#1013
20120167825
2012-07-05

HALOGEN ASSISTED PHYSICAL VAPOR TRANSPORT METHOD FOR SILICON CARBIDE GROWTH

#1014
20120161157
2012-06-28

SILICON CARBIDE SUBSTRATE

#1015
20120161155
2012-06-28

Silicon carbide substrate, semiconductor device, method of manufacturing silicon carbide substrate and method of manufacturing semiconductor device

#1016
20120160153
2012-06-28

Apparatus and method for production of SiC single crystal

#1017
20120156886
2012-06-21

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SUBSTRATE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

#1018
20120156122
2012-06-21

METHOD OF PRODUCING SILICON CARBIDE CRYSTAL, AND SILICON CARBIDE CRYSTAL

#1019
20120152166
2012-06-21

Apparatus for manufacturing silicon carbide single crystal

#1020
20120152165
2012-06-21

Apparatus for manufacturing a silicon carbide single crystal comprising a mounting portion and a purge gas introduction system

#1021
20120146056
2012-06-14

Silicon carbide epitaxial wafer and manufacturing method therefor

#1022
20120145070
2012-06-14

Process for producing graphene/SiC composite material and graphene/SiC composite material obtained thereby

#1023
20120142173
2012-06-07

Manufacturing method of silicon carbide single crystal

#1024
20120132139
2012-05-31

APPARATUS OF MANUFACTURING SILICON CARBIDE SINGLE CRYSTAL

#1025
20120132132
2012-05-31

Manufacturing method of silicon carbide single crystal

#1026
20120132130
2012-05-31

Method of producing SiC single crystal

#1027
20120118221
2012-05-17

Method of production of sic single crystal

#1028
20120114545
2012-05-10

Method to manufacture large uniform ingots of silicon carbide by sublimation/condensation processes

#1029
20120112209
2012-05-10

SILICON CARBIDE SUBSTRATE FABRICATION METHOD, SEMICONDUCTOR DEVICE FABRICATION METHOD, SILICON CARBIDE SUBSTRATE, AND SEMICONDUCTOR DEVICE

#1030
20120112198
2012-05-10

EPITAXIAL GROWTH OF SILICON CARBIDE ON SAPPHIRE

#1031
20120107218
2012-05-03

PRODUCTION METHOD OF SILICON CARBIDE CRYSTAL, SILICON CARBIDE CRYSTAL, AND PRODUCTION DEVICE OF SILICON CARBIDE CRYSTAL

#1032
20120103262
2012-05-03

APPARATUS OF MANUFACTURING SILICON CARBIDE SINGLE CRYSTAL

#1033
20120103251
2012-05-03

Seed crystal axis for solution growth of single crystal

#1034
20120103249
2012-05-03

SiC single crystal sublimation growth method and apparatus

#1035
20120091472
2012-04-19

SILICON CARBIDE SUBSTRATE

#1036
20120091471
2012-04-19

Lightly doped silicon carbide wafer and use thereof in high power devices

#1037
20120074404
2012-03-29

SUPPORTING SUBSTRATE, BONDED SUBSTRATE, METHOD FOR MANUFACTURING SUPPORTING SUBSTRATE, AND METHOD FOR MANUFACTURING BONDED SUBSTRATE

#1038
20120073495
2012-03-29

Manufacturing method of silicon carbide single crystal

#1039
20120070605
2012-03-22

SILICON CARBIDE INGOT, SILICON CARBIDE SUBSTRATE, MANUFACTURING METHOD THEREOF, CRUCIBLE, AND SEMICONDUCTOR SUBSTRATE

#1040
20120068195
2012-03-22

METHOD FOR MANUFACTURING SILICON CARBIDE SUBSTRATE AND SILICON CARBIDE SUBSTRATE

#1041
20120067869
2012-03-22

Substrate processing apparatus and method of manufacturing semiconductor device

#1042
20120067540
2012-03-22

Directional solidification system and method

#1043
20120067274
2012-03-22

FILM FORMING APPARATUS, WAFER HOLDER, AND FILM FORMING METHOD

#1044
20120061687
2012-03-15

SILICON CARBIDE SUBSTRATE AND SEMICONDUCTOR DEVICE

#1045
20120061686
2012-03-15

SILICON CARBIDE SUBSTRATE, SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING SILICON CARBIDE SUBSTRATE

#1046
20120060751
2012-03-15

Method of manufacturing homogeneous silicon carbide single crystal with low potential of generating defects

#1047
20120060749
2012-03-15

APPARATUS OF MANUFACTURING SILICON CARBIDE SINGLE CRYSTAL AND METHOD OF MANUFACTURING SILICON CARBIDE SINGLE CRYSTAL

#1048
20120056202
2012-03-08

SEMICONDUCTOR DEVICE

#1049
20120056201
2012-03-08

INSULATED GATE BIPOLAR TRANSISTOR

#1050
20120052660
2012-03-01

DIRECTED REAGENTS TO IMPROVE MATERIAL UNIFORMITY

#1051
20120048496
2012-03-01

Eddy current thickness measurement apparatus

#1052
20120042822
2012-02-23

METHOD FOR FABRICATING SiC SUBSTRATE

#1053
20120040172
2012-02-16

Tantalum carbide-coated carbon material and production method thereof

#1054
20120037067
2012-02-16

CUBIC SILICON CARBIDE FILM MANUFACTURING METHOD, AND CUBIC SILICON CARBIDE FILM-ATTACHED SUBSTRATE MANUFACTURING METHOD

#1055
20120032191
2012-02-09

METHOD FOR MANUFACTURING SILICON CARBIDE SUBSTRATE AND SILICON CARBIDE SUBSTRATE

#1056
20120031330
2012-02-09

Semiconductor substrate manufacturing apparatus

#1057
20120027646
2012-02-02

Reaction chamber of an epitaxial reactor and reactor that uses said chamber

#1058
20120025153
2012-02-02

Silicon carbide single crystal and manufacturing method of the same

#1059
20120021173
2012-01-26

Base material with single-crystal silicon carbide film, method of producing single-crystal silicon carbide film, and method of producing base material with single-crystal silicon carbide film

#1060
20120017826
2012-01-26

METHOD FOR MANUFACTURING SILICON CARBIDE SUBSTRATE

#1061
20120009761
2012-01-12

Method for manufacturing silicon carbide substrate

#1062
20120007050
2012-01-12

Semiconductor device having a group-III nitride superlattice layer on a silicon substrate

#1063
20120006255
2012-01-12

Method of manufacturing single crystal

#1064
20110315073
2011-12-29

Method of producing SiC single crystal

#1065
20110312162
2011-12-22

Chemical vapour deposition system and process

#1066
20110312161
2011-12-22

Method for manufacturing silicon carbide semiconductor device

#1067
20110308449
2011-12-22

Crucible vessel and crucible cover having grooves for producing single-crystal silicon carbide, production apparatus and method

#1068
20110306181
2011-12-15

METHOD OF MANUFACTURING SILICON CARBIDE SUBSTRATE

#1069
20110303884
2011-12-15

SiC Crystals Having Spatially Uniform Doping Impurities

#1070
20110300354
2011-12-08

COMBINED SUBSTRATE AND METHOD FOR MANUFACTURING SAME

#1071
20110300323
2011-12-08

Production method for a bulk SiC single crystal with a large facet and monocrystalline SiC substrate with homogeneous resistance distribution

#1072
20110297893
2011-12-08

Production method of n-type SiC single crystal, n-type SiC single crystal obtained thereby and application of same

#1073
20110291104
2011-12-01

Smoothing method for semiconductor material and wafers produced by same

#1074
20110290174
2011-12-01

Method of producing high quality silicon carbide crystal in a seeded growth system

#1075
20110284872
2011-11-24

METHOD FOR MANUFACTURING SILICON CARBIDE SUBSTRATE, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SILICON CARBIDE SUBSTRATE, AND SEMICONDUCTOR DEVICE

#1076
20110283933
2011-11-24

Method for the growth of SiC, by chemical vapor deposition, using precursors in modified cold-wall reactor

#1077
20110278596
2011-11-17

Epitaxial silicon carbide monocrystalline substrate and method of production of same

#1078
20110278595
2011-11-17

METHOD FOR MANUFACTURING SILICON CARBIDE SUBSTRATE, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SILICON CARBIDE SUBSTRATE, AND SEMICONDUCTOR DEVICE

#1079
20110278594
2011-11-17

METHOD FOR MANUFACTURING SILICON CARBIDE SUBSTRATE, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SILICON CARBIDE SUBSTRATE, AND SEMICONDUCTOR DEVICE

#1080
20110278593
2011-11-17

METHOD FOR MANUFACTURING SILICON CARBIDE SUBSTRATE, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SILICON CARBIDE SUBSTRATE, AND SEMICONDUCTOR DEVICE

#1081
20110275224
2011-11-10

METHOD FOR MANUFACTURING SILICON CARBIDE SUBSTRATE

#1082
20110266556
2011-11-03

Method for controlled growth of silicon carbide and structures produced by same

#1083
20110265710
2011-11-03

FILM FORMING APPARATUS AND METHOD

#1084
20110262681
2011-10-27

SILICON CARBIDE SUBSTRATE AND METHOD FOR MANUFACTURING SILICON CARBIDE SUBSTRATE

#1085
20110262680
2011-10-27

SILICON CARBIDE SUBSTRATE AND METHOD FOR MANUFACTURING SILICON CARBIDE SUBSTRATE

#1086
20110254017
2011-10-20

MANUFACTURING METHOD FOR CRYSTAL, CRYSTAL, AND SEMICONDUCTOR DEVICE

#1087
20110243826
2011-10-06

Method and System for Manufacturing Silicon and Silicon Carbide

#1088
20110239930
2011-10-06

METHOD FOR MANUFACTURING SILICON CARBIDE SINGLE CRYSTAL

#1089
20110237078
2011-09-29

SiC substrate and method of manufacturing the same

#1090
20110233562
2011-09-29

Substrate composed of silicon carbide with thin film, semiconductor device, and method of manufacturing a semiconductor device

#1091
20110229719
2011-09-22

MANUFACTURING METHOD FOR CRYSTAL, MANUFACTURING APPARATUS FOR CRYSTAL, AND STACKED FILM

#1092
20110226182
2011-09-22

CRUCIBLE, CRYSTAL PRODUCTION DEVICE, AND HOLDER

#1093
20110221039
2011-09-15

DEFECT CAPPING FOR REDUCED DEFECT DENSITY EPITAXIAL ARTICLES

#1094
20110214606
2011-09-08

APPARATUS AND METHOD FOR PRODUCING SILICON CARBIDE SINGLE CRYSTAL

#1095
20110210342
2011-09-01

Silicon carbide substrate and method of manufacturing silicon carbide substrate

#1096
20110206929
2011-08-25

Single-crystal silicon carbide and single-crystal silicon carbide wafer

#1097
20110203513
2011-08-25

METHOD OF MANUFACTURING SILICON CARBIDE SUBSTRATE

#1098
20110200833
2011-08-18

Method of manufacturing a silicon carbide single crystal

#1099
20110198614
2011-08-18

Method and apparatus for manufacturing a SiC single crystal film

#1100
20110183113
2011-07-28

SILICON CARBIDE SINGLE CRYSTAL SUBSTRATE

#1101
20110180765
2011-07-28

Monocrystalline silicon carbide ingot, monocrystalline silicon carbide wafer and method of manufacturing the same

#1102
20110165764
2011-07-07

Method for manufacturing semiconductor substrate

#1103
20110156058
2011-06-30

SILICON CARBIDE MONOCRYSTAL SUBSTRATE AND MANUFACTURING METHOD THEREFOR

#1104
20110155051
2011-06-30

MANUFACTURING APPARATUS AND MANUFACTURING METHOD OF SILICON CARBIDE SINGLE CRYSTAL

#1105
20110155048
2011-06-30

MANUFACTURING APPARATUS AND MANUFACTURING METHOD OF SILICON CARBIDE SINGLE CRYSTAL

#1106
20110143093
2011-06-16

Process for producing graphene/SiC composite material and graphene/SiC composite material obtained thereby

#1107
20110117372
2011-05-19

GRAPHENE OR GRAPHITE THIN FILM, MANUFACTURING METHOD THEREOF, THIN FILM STRUCTURE AND ELECTRONIC DEVICE

#1108
20110114013
2011-05-19

FILM DEPOSITION APPARATUS AND METHOD

#1109
20110111171
2011-05-12

SEED CRYSTAL FOR SILICON CARBIDE SINGLE CRYSTAL GROWTH, METHOD FOR PRODUCING THE SEED CRYSTAL, SILICON CARBIDE SINGLE CRYSTAL, AND METHOD FOR PRODUCING THE SINGLE CRYSTAL

#1110
20110107961
2011-05-12

SINGLE CRYSTAL MANUFACTURING DEVICE AND MANUFACTURING METHOD

#1111
20110089433
2011-04-21

Method for manufacturing nitrogen compound semiconductor substrate and nitrogen compound semiconductor substrate, and method for manufacturing single crystal SiC substrate and single crystal SiC substrate

#1112
20110089431
2011-04-21

COMPOUND SINGLE CRYSTAL AND METHOD FOR PRODUCING THE SAME

#1113
20110088612
2011-04-21

METHOD FOR PRODUCING SILICON CARBIDE SINGLE CRYSTAL

#1114
20110086213
2011-04-14

METHOD OF PRODUCING A SILICON CARBIDE BULK SINGLE CRYSTAL WITH THERMAL TREATMENT, AND LOW-IMPEDANCE MONOCRYSTALLINE SILICON CARBIDE SUBSTRATE

#1115
20110084285
2011-04-14

BASE MATERIAL FOR GROWING SINGLE CRYSTAL DIAMOND AND METHOD FOR PRODUCING SINGLE CRYSTAL DIAMOND SUBSTRATE

#1116
20110079793
2011-04-07

Semiconductor substrate with cobalt silicide buffer layer and its manufacturing method

#1117
20110073874
2011-03-31

Method of reducing memory effects in semiconductor epitaxy

#1118
20110059003
2011-03-10

Methods of growing a silicon carbide epitaxial layer on a substrate to increase and control carrier lifetime

#1119
20110056434
2011-03-10

HEAT TREATMENT APPARATUS

#1120
20110045281
2011-02-24

Reduction of basal plane dislocations in epitaxial SiC

#1121
20110042788
2011-02-24

Process for producing SiCAlNbase material, process for producing epitaxial wafer, SiCAlNbase material, and epitaxial wafer

#1122
20110042686
2011-02-24

SUBSTRATES AND METHODS OF FABRICATING DOPED EPITAXIAL SILICON CARBIDE STRUCTURES WITH SEQUENTIAL EMPHASIS

#1123
20110042685
2011-02-24

SUBSTRATES AND METHODS OF FABRICATING EPITAXIAL SILICON CARBIDE STRUCTURES WITH SEQUENTIAL EMPHASIS

#1124
20110042642
2011-02-24

Method for producing nanostructures on metal oxide substrate, method for depositing thin film on same, and thin film device

#1125
20110039071
2011-02-17

Method of manufacturing a SiCAlNsubstrate, method of manufacturing an epitaxial wafer, SiCAlNsubstrate, and epitaxial wafer

#1126
20110031534
2011-02-10

Process for producing SiCAlNbase material, process for producing epitaxial wafer, SiCAlNbase material, and epitaxial wafer

#1127
20110024769
2011-02-03

Semiconductor device and method for fabricating the same

#1128
20110024766
2011-02-03

One hundred millimeter single crystal silicon carbide wafer

#1129
20110006309
2011-01-13

Epitaxial SiC single crystal substrate and method of manufacture of epitaxial SiC single crystal substrate

#1130
20110000425
2011-01-06

Substrate processing apparatus with an insulator disposed in the reaction chamber

#1131
20100330781
2010-12-30

Substrate processing apparatus , method of manufacturing semiconductor device, and method of manufacturing substrate

#1132
20100320477
2010-12-23

Process for producing silicon carbide crystals having increased minority carrier lifetimes

#1133
20100308344
2010-12-09

Method for growing p-type SiC semiconductor single crystal and p-type SiC semiconductor single crystal

#1134
20100307417
2010-12-09

Manufacturing device for silicon carbide single crystal

#1135
20100297832
2010-11-25

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE MANUFACTURING METHOD

#1136
20100295059
2010-11-25

SiC single-crystal substrate and method of producing SiC single-crystal substrate

#1137
20100291769
2010-11-18

Alternative methods for fabrication of substrates and heterostructures made of silicon compounds and alloys

#1138
20100289033
2010-11-18

Single-crystal silicon carbide ingot, and substrate and epitaxial wafer obtained therefrom

#1139
20100288188
2010-11-18

Method for growing silicon carbide single crystal

#1140
20100288187
2010-11-18

Method for growing silicon carbide single crystal

#1141
20100282166
2010-11-11

HEAT TREATMENT APPARATUS AND METHOD OF HEAT TREATMENT

#1142
20100275848
2010-11-04

Heat treatment apparatus

#1143
20100252837
2010-10-07

Method for producing single crystal SiC substrate and single crystal SiC substrate produced by the same

#1144
20100239885
2010-09-23

High temperature-resistant article, method for producing the same, and high temperature-resistant adhesive

#1145
20100236472
2010-09-23

Method for growing silicon carbide single crystal

#1146
20100200866
2010-08-12

SiC single crystal substrate, SiC single crystal epitaxial wafer, and SiC semiconductor device

#1147
20100199910
2010-08-12

Method of manufacturing silicon carbide single crystal

#1148
20100180814
2010-07-22

Fabrication of SiC substrates with low warp and bow

#1149
20100175614
2010-07-15

THERMALLY INSULATED CONFIGURATION AND METHOD FOR PRODUCING A BULK SIC CRYSTAL

#1150
20100173475
2010-07-08

Method for improving the quality of a SiC crystal

#1151
20100159708
2010-06-24

Method for forming required pattern on semiconductor substrate by thermal reflow technique

#1152
20100159182
2010-06-24

Production Method for a Codoped Bulk SiC Crystal and High-Impedance SiC Substrate

#1153
20100147835
2010-06-17

Doped Gallium Nitride Annealing

#1154
20100147212
2010-06-17

Monocrystalline silicon carbide ingot, monocrystalline silicon carbide wafer and method of manufacturing the same

#1155
20100139552
2010-06-10

Axial gradient transport growth process and apparatus utilizing resistive heating

#1156
20100133550
2010-06-03

Stable power devices on low-angle off-cut silicon carbide crystals

#1157
20100127278
2010-05-27

Semiconductor device and method for fabricating the same

#1158
20100119849
2010-05-13

SiC epitaxial substrate and method for producing the same

#1159
20100109018
2010-05-06

METHOD OF FABRICATING SEMI-INSULATING GALLIUM NITRIDE USING AN ALUMINUM GALLIUM NITRIDE BLOCKING LAYER

#1160
20100092666
2010-04-15

Film deposition apparatus and film deposition method

#1161
20100092366
2010-04-15

WATER-BASED POLISHING SLURRY FOR POLISHING SILICON CARBIDE SINGLE CRYSTAL SUBSTRATE, AND POLISHING METHOD FOR THE SAME

#1162
20100089311
2010-04-15

Seed crystal consisting of silicon carbide single crystal and method for producing ingot using the same

#1163
20100083897
2010-04-08

Seed crystal consisting of silicon carbide single crysatal and method for producing ingot using the same

#1164
20100083896
2010-04-08

METHOD FOR PRODUCING SIC SINGLE CRYSTAL

#1165
20100080956
2010-04-01

Low resistivity single crystal silicon carbide wafer

#1166
20100069223
2010-03-18

METHOD FOR THE PREPARATION OF CERAMIC MATERIALS

#1167
20100068871
2010-03-18

Microwave heating for semiconductor nanostructure fabrication

#1168
20100065223
2010-03-18

Seed crystal fixing device

#1169
20100062266
2010-03-11

Method for growing epitaxy

#1170
20100061914
2010-03-11

Guided diameter SiC sublimation growth with multi-layer growth guide

#1171
20100031885
2010-02-11

Reactor For Growing Crystals

#1172
20100031877
2010-02-11

SiC single crystals with reduced dislocation density grown by step-wise periodic perturbation technique

#1173
20100028240
2010-02-04

PROCESS FOR PRODUCING SILICON CARBIDE SINGLE CRYSTAL

#1174
20100025696
2010-02-04

Process for Producing a Silicon Carbide Substrate for Microelectric Applications

#1175
20100024719
2010-02-04

Tracking carbon to silicon ratio during silicon carbide growth

#1176
20100018455
2010-01-28

System for forming SiC crystals having spatially uniform doping impurities

#1177
20100006859
2010-01-14

Method of Manufacturing Substrates Having Improved Carrier Lifetimes

#1178
20090324859
2009-12-31

Dense, shaped articles constructed of a refractory material and methods of preparing such articles

#1179
20090305484
2009-12-10

METHOD AND REACTOR FOR GROWING CRYSTALS

#1180
20090302326
2009-12-10

Silicon carbide single crystal wafer and producing method thereof

#1181
20090294777
2009-12-03

Method for forming a group III nitride material on a silicon substrate

#1182
20090256162
2009-10-15

Method for producing semi-insulating resistivity in high purity silicon carbide crystals

#1183
20090255458
2009-10-15

Silicon carbide single crystal, silicon carbide single crystal wafer, and method of production of same

#1184
20090242899
2009-10-01

Epitaxial growth on low degree off-axis SiC substrates and semiconductor devices made thereby

#1185
20090230406
2009-09-17

Homoepitaxial growth of SiC on low off-axis SiC wafers

#1186
20090229743
2009-09-17

Method of fabricating an epitaxially grown layer

#1187
20090229519
2009-09-17

APPARATUS FOR MANUFACTURING SEMICONDUCTOR THIN FILM

#1188
20090223447
2009-09-10

Apparatus for producing silicon carbide single crystal

#1189
20090221131
2009-09-03

Method for preparing substrate having monocrystalline film

#1190
20090220801
2009-09-03

METHOD AND APPARATUS FOR GROWTH OF HIGH PURITY 6H-SIC SINGLE CRYSTAL

#1191
20090215268
2009-08-27

Polishing process for producing damage free surfaces on semi-insulating silicon carbide wafers

#1192
20090205565
2009-08-20

Apparatus for manufacturing single-crystal silicon carbide

#1193
20090205561
2009-08-20

METHOD FOR PRODUCING SILICON CARBIDE (SiC) CRYSTAL AND SILICON CARBIDE (SiC) CRYSTAL OBTAINED BY THE SAME

#1194
20090194017
2009-08-06

Method for producing p-type SiC semiconductor single crystal

#1195
20090184327
2009-07-23

Method for producing silicon carbide single crystal

#1196
20090178610
2009-07-16

Method of manufacturing a silicon carbide single crystal

#1197
20090174038
2009-07-09

Production of single-crystal semiconductor material using a nanostructure template

#1198
20090169459
2009-07-02

Intra-cavity gettering of nitrogen in SiC crystal growth

#1199
20090151623
2009-06-18

FORMATION AND APPLICATIONS OF HIGH-QUALITY EPITAXIAL FILMS

#1200
20090133819
2009-05-28

Deformation moderation method