121362 ⎘
Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state Reaction chambers; Selection of materials therefor
Sub-classes:APPARATUS AND METHODS FOR THE MANUFACTURE OF SYNTHETIC DIAMONDS AND CUBIC BORON NITRIDE
#2Method for depositing low temperature phosphorous-doped silicon
#3Apparatus for the manufacture of synthetic diamonds using differential expansion
#4Method of decomposing quartz sample, method of analyzing metal contamination of quartz sample, and method of manufacturing quartz member
#5Controlled Doping Device For Single Crystal Semiconductor Material and Related Methods
#6Device for doping, deposition or oxidation of semiconductor material at low pressure
#7DEVICE FOR DOPING, DEPOSITION OR OXIDATION OF SEMICONDUCTOR MATERIAL AT LOW PRESSURE
#8Diffusion tube, dopant source for a diffusion process and diffusion method using the diffusion tube and the dopant source
#9Semiconductor processing
#10Processing apparatus
#11Device for producing electroconductive passages in a semiconductor wafer by means of thermomigration
#12Method of and auxiliary cleaner for use in cleaning a diffusion furnace of semiconductor manufacturing equipment
#13Reactor chamber
#14Diffusion system
#15Staggered ribs on process chamber to reduce thermal effects