ClassID:

121365

C30B31/12 - CPC Classification

Classification description:

Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state Heating of the reaction chamber

Recent Application in this class:
#1
20250059675
2025-02-20

NITRIDE SEMICONDUCTOR SUBSTRATE AND METHOD FOR PRODUCING SAME

#2
20200102666
2020-04-02

Methods of preparation of organometallic halide structures

#3
20200029396
2020-01-23

THERMAL PROCESSING TECHNIQUES FOR METALLIC MATERIALS

#4
20180066383
2018-03-08

Methods of preparation of organometallic halide structures

#5
20170268128
2017-09-21

System based on low-pressure chemical vapor deposition for fabricating perovskite film from organic halide compound and metal halide compound

#6
20160208407
2016-07-21

Single crystal production apparatus

#7
20120252229
2012-10-04

System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy

#8
20120085281
2012-04-12

APPARATUS WITH MULTIPLE HEATING SYSTEMS FOR IN-LINE THERMAL TREATMENT OF SUBSTRATES

#9
20110236844
2011-09-29

Pulsed processing semiconductor heating methods using combinations of heating sources

#10
20110222840
2011-09-15

Heating Configuration For Use in Thermal Processing Chambers

#11
20090098742
2009-04-16

System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy

#12
20080069550
2008-03-20

Pulsed processing semiconductor heating methods and associated system using combinations of heating sources

#13
20080050688
2008-02-28

System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy

#14
20080008460
2008-01-10

System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy

#15
20070297775
2007-12-27

Heating configuration for use in thermal processing chambers

#16
20070084848
2007-04-19

HEAT TREATING APPARATUS AND METHOD

#17
20060291834
2006-12-28

Method and apparatus for thermally treating substrates

#18
20060249079
2006-11-09

WAFER HEATER AND WAFER CHUCK INCLUDING THE SAME

#19
20060243385
2006-11-02

Device for producing electroconductive passages in a semiconductor wafer by means of thermomigration

#20
20050274709
2005-12-15

Heat treating apparatus and method

#21
20050236395
2005-10-27

Pulsed processing semiconductor heating methods using combinations of heating sources

#22
20050213949
2005-09-29

Heating configuration for use in thermal processing chambers

#23
20050062388
2005-03-24

Heat-treating methods and systems