121366 ⎘
Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state Substrate holders or susceptors
Substrate treating apparatus
#2SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#3Apparatus for producing SiC epitaxial wafer and method for producing SiC epitaxial wafer
#4Rapid conductive cooling using a secondary process plane
#5Rapid conductive cooling using a secondary process plane
#6Rapid conductive cooling using a secondary process plane
#7Silocon wafer supporting method, heat treatment jig and heat-treated wafer
#8Method and jig for holding silicon wafer
#9Rapid conductive cooling using a secondary process plane
#10Rapid conductive cooling using a secondary process plane
#11SUSCEPTOR WITH SURFACE ROUGHNESS FOR HIGH TEMPERATURE SUBSTRATE PROCESSING
#12Self aligning non contact shadow ring process kit
#13Holder made from quartz glass for the processing of semiconductor wafers and method for production of the holder
#14Susceptor
#15High purification method of jig for semiconductor heat treatment
#16Detachable edge ring for thermal processing support towers
#17Silicon shelf towers
#18WAFER HEATER AND WAFER CHUCK INCLUDING THE SAME
#19Silicon wafer and process for the heat treatment of a silicon wafer
#20Susceptor system
#21Susceptor system
#22Coated semiconductor wafer, and process and apparatus for producing the semiconductor wafer
#23Susceptor
#24Susceptor with surface roughness for high temperature substrate processing
#25Support system for a treatment apparatus
#26Substrate holder for a vapour deposition system
#27High purity silicon carbide wafer boats
#28Wafer carrier for growing GaN wafers
#29Susceptor and deposition apparatus including the same
#30Electromagnetic rotation of platter