121371 ⎘
Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor Doping by irradiation with electromagnetic waves or by particle radiation
Sub-classes:VOID DEFECT FORMING METHOD, DEVICE, AND DIAMOND MANUFACTURING METHOD
#2Method of fluorescent nanodiamonds production
#3Method for reducing the thickness of solid-state layers provided with components
#4Nitrogen containing single crystal diamond materials optimized for magnetometry applications
#5Method for producing wafers with modification lines of defined orientation
#6THERMAL PROCESSING TECHNIQUES FOR METALLIC MATERIALS
#7Apparatus and method for neutron transmutation doping of semiconductor wafers
#8Apparatus and method for neutron transmutation doping of semiconductor wafers
#9METHODS FOR ATOM INCORPORATION INTO MATERIALS USING A PLASMA AFTERGLOW
#10Diamond material
#11Ion implantation at high temperature surface equilibrium conditions
#12Method for producing piezoelectric composite substrate and method for producing piezoelectric element
#13Diamond material
#14Diamond material
#15Diamond material
#16Diamond material
#17SILICON WAFER AND METHOD FOR PRODUCING THE SAME
#18Silicon wafer and method for producing the same
#19P-TYPE ZINC OXIDE THIN FILM AND METHOD FOR FORMING THE SAME
#20Compound semiconductor substrate and control for electrical property thereof
#21Method for preparing substrate having monocrystalline film
#22Single crystal silicon wafer for insulated gate bipolar transistors and process for producing the same
#23Single crystal silicon wafer for insulated gate bipolar transistors
#24Methods of forming power semiconductor devices using boule-grown silicon carbide drift layers and power semiconductor devices formed thereby
#25Methods of doping semiconductor materials and metastable doped semiconductor materials produced thereby