169930 ⎘
Investigating materials by wave or particle radiation secondary emission
Sub-classes:APPARATUS FOR DETECTING CRACK IN SEMICONDUCTOR CHIP
#2CROSS-TALK CANCELLATION IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION
#3DETECTING DEFECTS IN ARRAY REGIONS ON SPECIMENS
#4Quality control evaluation method of cyanate ester matrix resin material within CFRP composite concerning localized hydrolytic degradation
#5Systems And Methods For Detecting Beam Displacement
#6Dynamic Data Driven Detector Tuning for Improved Investigation of Samples in Charged Particle Systems
#7NOISE DIAGNOSTICS FOR AN ELECTRON BEAM INSPECTION SYSTEM WITH SWATHING
#8Charged particle beam apparatus
#9AUTOMATIC PARTICLE BEAM FOCUSING
#10CHARGED PARTICLE DETECTOR
#11SCINTILLATOR AND CHARGED PARTICLE RADIATION APPARATUS
#12CHARGED PARTICLE BEAM DEVICE
#13Radiation analysis system, charged particle beam system, and radiation analysis method
#14Systems and methods for real time stereo imaging using multiple electron beams
#15PROCESSING REFERENCE DATA FOR WAFER INSPECTION
#16SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION
#17WIEN FILTER AND MULTIPLE ELECTRON BEAM INSPECTION APPARATUS
#18METHOD OF INSPECTING A SAMPLE, AND MULTI-ELECTRON BEAM INSPECTION SYSTEM
#19SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION
#20CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD
#21MULTI-ELECTRON BEAM INSPECTION APPARATUS AND ADJUSTMENT METHOD FOR THE SAME
#22CHARGED PARTICLE DETECTOR, CHARGED PARTICLE RAY DEVICE, RADIATION DETECTOR, AND RADIATION DETECTION DEVICE
#23Charged particle beam apparatus
#24Electron Source, Electron Beam Device, and Method for Manufacturing Electron Source
#25Charged particle detection for spectroscopic techniques
#26Electron spectrometer
#27MULTIPLE SECONDARY ELECTRON BEAM ALIGNMENT METHOD, MULTIPLE SECONDARY ELECTRON BEAM ALIGNMENT APPARATUS, AND ELECTRON BEAM INSPECTION APPARATUS
#28Electron beam detection apparatus for semiconductor device and electron beam detection assembly
#29Cross-talk cancellation in multiple charged-particle beam inspection
#30Defect characterization method and apparatus
#31Defect inspection method and defect inspection device
#32Device And Method For Detecting A Concentration Of Predetermined Particles On The Basis Of Their Morphological Properties In Air
#33Sensor
#34Estimating heights of defects in a wafer by scaling a 3D model using an artificial neural network
#35Charged particle beam device, computer, and signal processing method for charged particle beam device
#36[18F]-Labeled Benzothiazole Derivative As PET Radiotracer
#37Optical Sensor for Inspecting Pattern Collapse Defects
#38Coordinate Linking System and Coordinate Linking Method
#39Measuring a pattern
#40Charged particle beam apparatus
#41Method and system for determining energy-based brittleness
#42Method of examining a sample using a charged particle beam apparatus
#43Method and apparatus for monitoring beam profile and power
#44Methods for growing crystals on QCM sensors
#45Line-based endpoint detection
#46Methods and devices correlating well-logs to cuttings lithologies for synthetic core generation
#47Correlative multimodal chemical imaging via machine learning
#48Charged particle beam apparatus
#49Material properties from two-dimensional image
#50Material properties from two-dimensional image
#51Material properties from two-dimensional image
#52SCINTILLANT NANOPARTICLES FOR DETECTION OF RADIOISOTOPE ACTIVITY
#53Method for measuring damage of a substrate caused by an electron beam
#54METHOD FOR ANALYZING STRUCTURES COMPRISING A FIBER AND INORGANIC PARTICLES
#55Device for measuring secondary electron emission coefficient
#56Method for measuring secondary electron emission coefficient
#57FEATURE AMOUNT MEASUREMENT METHOD AND FEATURE AMOUNT MEASUREMENT DEVICE
#58Imaging device
#59Composite overlay metrology target
#60Coal consumption online measuring system
#61Charged particle beam apparatus
#62Serial arrangement having multiple plies of asymmetric filter media, production method, filtration unit, use of the arrangement, and characterization method
#63Mask inspection apparatuses and methods, and methods of fabricating masks including mask inspection methods
#64Radiation detector
#65Microfluidic device and method for the nanostructure sequencing of nucleotide strands
#66Wafer inspection apparatus and wafer inspection method
#67Defect detection device, defect detection method, and defect observation device
#68Surface analysis tools for process control of laser treatment of composites
#69Measuring method and measuring device for a liquid metal slide bearing
#70Spin polarimeter
#71Charged particle beam device
#72Charged particle beam apparatus
#73Charged particle beam apparatus
#74Method and apparatus for generating a correction line indicating relationship between deviation of an edge of a wafer pattern from an edge of a reference pattern and space width of the reference pattern, and a computer-readable recording medium
#75Spectroscopy and imaging system
#76Pattern edge detection method
#77Inspection tool and inspection method
#78Gas sensors and methods of sensing a gas-phase analyte
#79Operating a particle beam device
#80Method and devices for determining metrology sites
#81Image processing device, image processing method and charged particle microscope
#82Mask inspection apparatuses and methods, and methods of fabricating masks including mask inspection methods
#83Pressed Powder Sample Measurements Using X-ray Fluorescence
#84CD-SEM technique for wafers fabrication control
#85Method for rapid analysis of gold
#86Charged particle beam adjustment method and apparatus
#87Method and apparatus for inspecting semiconductor device
#88Inspection tool, inspection tool operating method, and non-transitory computer readable medium
#89Three-dimensional surface metrology of wafers
#90System and method for analysis of chip and burr formation in drilled fiber reinforced plastic composites using image processing
#91Classified characterization method for connectivity of organic matter (OM)-hosted pores in shale
#92Manufacturing of test structures using e-beam lithography for use in characterization and quality control of metrology tools used in semiconductor manufacturing
#93Holes tilt angle measurement using FIB diagonal cut