ClassID:

169930

G01N2223/07 - CPC Classification

Classification description:

Investigating materials by wave or particle radiation secondary emission

Sub-classes:
Recent Application in this class:
#1
20250391686
2025-12-25

APPARATUS FOR DETECTING CRACK IN SEMICONDUCTOR CHIP

#2
20250006456
2025-01-02

CROSS-TALK CANCELLATION IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION

#3
20240255448
2024-08-01

DETECTING DEFECTS IN ARRAY REGIONS ON SPECIMENS

#4
20240183805
2024-06-06

Quality control evaluation method of cyanate ester matrix resin material within CFRP composite concerning localized hydrolytic degradation

#5
20240110881
2024-04-04

Systems And Methods For Detecting Beam Displacement

#6
20240110880
2024-04-04

Dynamic Data Driven Detector Tuning for Improved Investigation of Samples in Charged Particle Systems

#7
20240068967
2024-02-29

NOISE DIAGNOSTICS FOR AN ELECTRON BEAM INSPECTION SYSTEM WITH SWATHING

#8
20230366841
2023-11-16

Charged particle beam apparatus

#9
20230245291
2023-08-03

AUTOMATIC PARTICLE BEAM FOCUSING

#10
20230238227
2023-07-27

CHARGED PARTICLE DETECTOR

#11
20230184704
2023-06-15

SCINTILLATOR AND CHARGED PARTICLE RADIATION APPARATUS

#12
20230162943
2023-05-25

CHARGED PARTICLE BEAM DEVICE

#13
20230161053
2023-05-25

Radiation analysis system, charged particle beam system, and radiation analysis method

#14
20230154723
2023-05-18

Systems and methods for real time stereo imaging using multiple electron beams

#15
20230139085
2023-05-04

PROCESSING REFERENCE DATA FOR WAFER INSPECTION

#16
20230137186
2023-05-04

SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION

#17
20230136198
2023-05-04

WIEN FILTER AND MULTIPLE ELECTRON BEAM INSPECTION APPARATUS

#18
20230133404
2023-05-04

METHOD OF INSPECTING A SAMPLE, AND MULTI-ELECTRON BEAM INSPECTION SYSTEM

#19
20230112447
2023-04-13

SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION

#20
20230096574
2023-03-30

CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD

#21
20230080062
2023-03-16

MULTI-ELECTRON BEAM INSPECTION APPARATUS AND ADJUSTMENT METHOD FOR THE SAME

#22
20230050424
2023-02-16

CHARGED PARTICLE DETECTOR, CHARGED PARTICLE RAY DEVICE, RADIATION DETECTOR, AND RADIATION DETECTION DEVICE

#23
20230030651
2023-02-02

Charged particle beam apparatus

#24
20220415603
2022-12-29

Electron Source, Electron Beam Device, and Method for Manufacturing Electron Source

#25
20220381713
2022-12-01

Charged particle detection for spectroscopic techniques

#26
20220373485
2022-11-24

Electron spectrometer

#27
20220365010
2022-11-17

MULTIPLE SECONDARY ELECTRON BEAM ALIGNMENT METHOD, MULTIPLE SECONDARY ELECTRON BEAM ALIGNMENT APPARATUS, AND ELECTRON BEAM INSPECTION APPARATUS

#28
20220317071
2022-10-06

Electron beam detection apparatus for semiconductor device and electron beam detection assembly

#29
20220301811
2022-09-22

Cross-talk cancellation in multiple charged-particle beam inspection

#30
20220301147
2022-09-22

Defect characterization method and apparatus

#31
20220301136
2022-09-22

Defect inspection method and defect inspection device

#32
20220236163
2022-07-28

Device And Method For Detecting A Concentration Of Predetermined Particles On The Basis Of Their Morphological Properties In Air

#33
20220196621
2022-06-23

Sensor

#34
20220189806
2022-06-16

Estimating heights of defects in a wafer by scaling a 3D model using an artificial neural network

#35
20220187228
2022-06-16

Charged particle beam device, computer, and signal processing method for charged particle beam device

#36
20220160902
2022-05-26

[18F]-Labeled Benzothiazole Derivative As PET Radiotracer

#37
20220139743
2022-05-05

Optical Sensor for Inspecting Pattern Collapse Defects

#38
20220122277
2022-04-21

Coordinate Linking System and Coordinate Linking Method

#39
20220114721
2022-04-14

Measuring a pattern

#40
20220102108
2022-03-31

Charged particle beam apparatus

#41
20220082727
2022-03-17

Method and system for determining energy-based brittleness

#42
20220065804
2022-03-03

Method of examining a sample using a charged particle beam apparatus

#43
20220042935
2022-02-10

Method and apparatus for monitoring beam profile and power

#44
20220042164
2022-02-10

Methods for growing crystals on QCM sensors

#45
20210407765
2021-12-30

Line-based endpoint detection

#46
20210405014
2021-12-30

Methods and devices correlating well-logs to cuttings lithologies for synthetic core generation

#47
20210384021
2021-12-09

Correlative multimodal chemical imaging via machine learning

#48
20210383519
2021-12-09

Charged particle beam apparatus

#49
20210349070
2021-11-11

Material properties from two-dimensional image

#50
20210349042
2021-11-11

Material properties from two-dimensional image

#51
20210349041
2021-11-11

Material properties from two-dimensional image

#52
20210341401
2021-11-04

SCINTILLANT NANOPARTICLES FOR DETECTION OF RADIOISOTOPE ACTIVITY

#53
20210333226
2021-10-28

Method for measuring damage of a substrate caused by an electron beam

#54
20210324583
2021-10-21

METHOD FOR ANALYZING STRUCTURES COMPRISING A FIBER AND INORGANIC PARTICLES

#55
20210293731
2021-09-23

Device for measuring secondary electron emission coefficient

#56
20210293730
2021-09-23

Method for measuring secondary electron emission coefficient

#57
20210264587
2021-08-26

FEATURE AMOUNT MEASUREMENT METHOD AND FEATURE AMOUNT MEASUREMENT DEVICE

#58
20210247335
2021-08-12

Imaging device

#59
20210240089
2021-08-05

Composite overlay metrology target

#60
20210231591
2021-07-29

Coal consumption online measuring system

#61
20210183614
2021-06-17

Charged particle beam apparatus

#62
20210178335
2021-06-17

Serial arrangement having multiple plies of asymmetric filter media, production method, filtration unit, use of the arrangement, and characterization method

#63
20210172892
2021-06-10

Mask inspection apparatuses and methods, and methods of fabricating masks including mask inspection methods

#64
20210161488
2021-06-03

Radiation detector

#65
20210138465
2021-05-13

Microfluidic device and method for the nanostructure sequencing of nucleotide strands

#66
20210118710
2021-04-22

Wafer inspection apparatus and wafer inspection method

#67
20210109035
2021-04-15

Defect detection device, defect detection method, and defect observation device

#68
20210096051
2021-04-01

Surface analysis tools for process control of laser treatment of composites

#69
20210082654
2021-03-18

Measuring method and measuring device for a liquid metal slide bearing

#70
20210074509
2021-03-11

Spin polarimeter

#71
20210066029
2021-03-04

Charged particle beam device

#72
20210043415
2021-02-11

Charged particle beam apparatus

#73
20210043412
2021-02-11

Charged particle beam apparatus

#74
20210042901
2021-02-11

Method and apparatus for generating a correction line indicating relationship between deviation of an edge of a wafer pattern from an edge of a reference pattern and space width of the reference pattern, and a computer-readable recording medium

#75
20210033551
2021-02-04

Spectroscopy and imaging system

#76
20210027473
2021-01-28

Pattern edge detection method

#77
20210003521
2021-01-07

Inspection tool and inspection method

#78
20200400629
2020-12-24

Gas sensors and methods of sensing a gas-phase analyte

#79
20200388463
2020-12-10

Operating a particle beam device

#80
20200285976
2020-09-10

Method and devices for determining metrology sites

#81
20200219243
2020-07-09

Image processing device, image processing method and charged particle microscope

#82
20200150062
2020-05-14

Mask inspection apparatuses and methods, and methods of fabricating masks including mask inspection methods

#83
20180348150
2018-12-06

Pressed Powder Sample Measurements Using X-ray Fluorescence

#84
20170194125
2017-07-06

CD-SEM technique for wafers fabrication control

#85
20160320321
2016-11-03

Method for rapid analysis of gold

#86
20060043293
2006-03-02

Charged particle beam adjustment method and apparatus

#87
20060043292
2006-03-02

Method and apparatus for inspecting semiconductor device

#88
17970452
2026-02-10

Inspection tool, inspection tool operating method, and non-transitory computer readable medium

#89
17698393
2023-05-30

Three-dimensional surface metrology of wafers

#90
17677347
2022-06-28

System and method for analysis of chip and burr formation in drilled fiber reinforced plastic composites using image processing

#91
17581927
2022-06-14

Classified characterization method for connectivity of organic matter (OM)-hosted pores in shale

#92
17552700
2026-05-05

Manufacturing of test structures using e-beam lithography for use in characterization and quality control of metrology tools used in semiconductor manufacturing

#93
17079297
2022-03-22

Holes tilt angle measurement using FIB diagonal cut