ClassID:

177056

G03F7/2002 - page 2 - CPC Classification

Classification description:

Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor; Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image

Recent Application in this class:
#301
20180329299
2018-11-15

Fluorine free photopatternable phenol functional group containing polymer compositions

#302
20180314154
2018-11-01

RESIST UNDERLAYER FILM-FORMING COMPOSITION CONTAINING LONG CHAIN ALKYL GROUP-CONTAINING NOVOLAC

#303
20180314153
2018-11-01

Photosensitive resin composition and cured film prepared therefrom

#304
20180307140
2018-10-25

PHOTOSENSITIVE RESIN COMPOSITION FOR BIOCHIP AND METHOD FOR FORMING LIQUID REPELLENT FILM

#305
20180307137
2018-10-25

Organometallic solution based high resolution patterning compositions

#306
20180305654
2018-10-25

BUBBLE-JETTING CHIP, LOCAL ABLATION DEVICE AND LOCAL ABLATION METHOD, AND INJECTION DEVICE AND INJECTION METHOD

#307
20180275533
2018-09-27

Exposure apparatus and exposure method, and flat panel display manufacturing method

#308
20180275520
2018-09-27

Female mold and method for manufacturing the same

#309
20180275507
2018-09-27

Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method

#310
20180269072
2018-09-20

Substrate processing method and computer storage medium

#311
20180267407
2018-09-20

Photolithography for making electrochemical measurements

#312
20180266452
2018-09-20

System and method for optical transient liquid molding of microparticles and uses for the same

#313
20180261769
2018-09-13

Method of manufacturing organic light-emitting display apparatus using barrier layer having high fluorine content

#314
20180261451
2018-09-13

Methods of forming semiconductor device structures including linear structures substantially aligned with other structures

#315
20180259854
2018-09-13

BEARING TABLE AND FABRICATION METHOD THEREOF AND PROCESSING DEVICE AND OPERATION METHOD THEREOF

#316
20180253009
2018-09-06

Method for stripping resist film from metal plate and method for manufacturing etched metal plate

#317
20180253008
2018-09-06

Method to mitigate defect printability for ID pattern

#318
20180239247
2018-08-23

Photosensitive compositions, quantum dot polymer composite produced therefrom, and layered structures and electronic device including the same

#319
20180239246
2018-08-23

Photosensitive compositions, preparation methods thereof, and quantum dot polymer composite pattern produced therefrom

#320
20180239245
2018-08-23

Quantum dots, a composition or composite including the same, and en electronic device including the same

#321
20180237690
2018-08-23

Layered structures, production methods thereof, and liquid crystal display including the same

#322
20180235090
2018-08-16

Multilayer printed wiring board production method, adhesive layer-equipped metal foil, metal-clad laminate, and multilayer printed wiring board

#323
20180215874
2018-08-02

Resin, composition, cured film, method for manufacturing cured film and semiconductor device

#324
20180215870
2018-08-02

Polymer containing triazine ring and composition containing same

#325
20180210342
2018-07-26

Photosensitive dry film and uses of the same

#326
20180210337
2018-07-26

Production method for antenna substrate, production method for antenna substrate with wiring line and electrode, and production method for RFID element

#327
20180210335
2018-07-26

Photosensitive compositions and quantum dot polymer composite patterns including the same

#328
20180196347
2018-07-12

Laser unit management system

#329
20180196346
2018-07-12

Method of manufacturing circuit board

#330
20180196342
2018-07-12

Devices and methods for non-planar photolithography of nail polish

#331
20180190534
2018-07-05

Substrate holder, a lithographic apparatus and method of manufacturing devices

#332
20180188648
2018-07-05

Radiation-sensitive compositions and patterning and metallization processes

#333
20180188646
2018-07-05

Method for manufacturing transparent substrate and method for manufacturing surface enhanced Raman scattering substrate using the same

#334
20180187080
2018-07-05

Liquid crystal medium containing polymerisable compounds

#335
20180181001
2018-06-28

Resist underlayer film-forming composition comprising epoxy adduct having long-chain alkyl group

#336
20180181000
2018-06-28

Radiation sensitive composition

#337
20180180998
2018-06-28

Chemically amplified negative resist composition and resist pattern forming process

#338
20180173094
2018-06-21

PROCESS FOR CONTROLLING THE SURFACE ENERGY AT THE INTERFACE BETWEEN A BLOCK COPOLYMER AND ANOTHER COMPOUND

#339
20180164682
2018-06-14

Photoresist composition and a method for forming a fine pattern using the same

#340
20180162976
2018-06-14

Coloring composition, cured film, color filter, method for manufacturing color filter, solid-state imaging device, image display device, and polymer

#341
20180155568
2018-06-07

Method for producing conductive film, conductive film, and touch panel

#342
20180154677
2018-06-07

Security devices and methods of manufacture thereof

#343
20180149979
2018-05-31

Flexographic printing precursor and magnetic development of the same

#344
20180149975
2018-05-31

Negative type photosensitive resin composition, negative type planographic printing plate precursor, and method of preparing planographic printing plate

#345
20180149971
2018-05-31

Extreme ultraviolet photoresist and method

#346
20180143533
2018-05-24

Colored photosensitive resin composition and light shielding spacer prepared therefrom

#347
20180138034
2018-05-17

Formation method of semiconductor device structure using patterning stacks

#348
20180123044
2018-05-03

Method of manufacturing substrate of organic light-emitting display device

#349
20180120699
2018-05-03

Colored photosensitive resin composition and light shielding spacer prepared therefrom

#350
20180113384
2018-04-26

Fabrication of free standing membranes and use thereof for synthesis of nanoparticle patterns

#351
20180108842
2018-04-19

Crosslinkable quantum dot and preparing method thereof, array substrate and preparing method thereof

#352
20180107116
2018-04-19

Laminate and pattern forming method

#353
20180105739
2018-04-19

Quantum dot-polymer composite film, method of manufacturing the same, and device including the same

#354
20180102282
2018-04-12

Means to decouple the diffusion and solubility switch mechanisms of photoresists

#355
20180101100
2018-04-12

TREATMENT LIQUID AND PATTERN FORMING METHOD

#356
20180101092
2018-04-12

Manufacturing method of a mask plate and a color filter substrate

#357
20180096840
2018-04-05

Method of manufacturing a semiconductor device

#358
20180095369
2018-04-05

Lithographic apparatus and lithographic projection method

#359
20180095362
2018-04-05

METHOD OF MANUFACTURING DISPLAY DEVICE USING BOTTOM SURFACE EXPOSURE

#360
20180088466
2018-03-29

Coating and developing method and coating and developing apparatus

#361
20180088465
2018-03-29

Photosensitive resin composition, black pixel defining layer using the same and display device

#362
20180085752
2018-03-29

Imprinted substrates

#363
20180074405
2018-03-15

TRANSFER-TYPE PHOTOSENSITIVE REFRACTIVE INDEX ADJUSTMENT FILM, METHOD FOR FORMING REFRACTIVE INDEX ADJUSTMENT PATTERN, AND ELECTRONIC COMPONENT

#364
20180057690
2018-03-01

Coloring composition, film, color filter, pattern forming method, method for manufacturing color filter, solid image pickup element, and infrared sensor

#365
20180052387
2018-02-22

Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device

#366
20180046080
2018-02-15

Photosensitive composition and color converting film

#367
20180044449
2018-02-15

Polymers derived from norbornadiene and maleic anhydride and use thereof

#368
20180017866
2018-01-18

Photosensitive resin composition, photosensitive resin layer using the same and display device

#369
20180007795
2018-01-04

Method for producing wired circuit board

#370
20180004088
2018-01-04

Silicone skeleton-containing polymer, photo-curable resin composition, photo-curable dry film, laminate, and patterning process

#371
20170362715
2017-12-21

Manufacturing method of metal component and manufacturing method of electronic apparatus

#372
20170351181
2017-12-07

Production method of wired circuit board

#373
20170351095
2017-12-07

Fabrication of air gap regions in multicomponent lens systems

#374
20170345670
2017-11-30

Methods for improved critical dimension uniformity in a semiconductor device fabrication process

#375
20170336710
2017-11-23

Method for fine line manufacturing

#376
20170330703
2017-11-16

Method for manufacturing lighting button key

#377
20170329227
2017-11-16

Sulfonium compound, making method, resist composition, and pattern forming process

#378
20170307979
2017-10-26

Extreme UV light generation device and target recovery apparatus

#379
20170285471
2017-10-05

Fluorine-containing composition, substrate for pattern formation, photodegradable coupling agent, pattern formation method and transistor production method

#380
20170271039
2017-09-21

High-aspect ratio structure production method, ultrasonic probe production method using same, and high-aspect ratio structure

#381
20170269479
2017-09-21

Substrate having film type pattern and the manufacturing method for making the same

#382
20170269400
2017-09-21

Polymeric Dispersed Liquid Crystal Light Shutter Device and System and Method for Forming the Same

#383
20170263444
2017-09-14

Reflective mask blank, method for manufacturing same, reflective mask, method for manufacturing same, and method for manufacturing semiconductor device

#384
20170261850
2017-09-14

Pre-patterned lithography templates, processes based on radiation patterning using the templates and processes to form the templates

#385
20170260132
2017-09-14

Oxime sulfonate derivatives

#386
20170259505
2017-09-14

SELECTIVE COMPOSITE MANUFACTURING FOR COMPONENTS HAVING MULTIPLE MATERIAL PROPERTIES

#387
20170255097
2017-09-07

Positive photosensitive resin composition, photo-curable dry film and method for producing the same, patterning process, and laminate

#388
20170250079
2017-08-31

Resist underlayer film-forming composition including a compound having an amino group protected with a tert-butoxycarbonyl group

#389
20170242339
2017-08-24

Positive resist composition and pattern forming process

#390
20170237006
2017-08-17

Method of manufacturing substrate of organic light-emitting display device

#391
20170235226
2017-08-17

Encoded illustrations

#392
20170232430
2017-08-17

Method of forming a self-cleaning film system

#393
20170205917
2017-07-20

Method for producing touch input sensor and photosensitve conductive film

#394
20170205710
2017-07-20

Oxime ester photoinitiators

#395
20170200667
2017-07-13

Photopatternable Silicones For Wafer Level Z-Axis Thermal Interposer

#396
20170199454
2017-07-13

Photosensitive resin composition, film prepared by using the photosensitive resin composition, and organic light-emitting display device including the film

#397
20170198096
2017-07-13

Composition of anti-reflective hardmask

#398
20170192357
2017-07-06

Methods and techniques to use with photosensitized chemically amplified resist chemicals and processes

#399
20170192354
2017-07-06

Photopatternable compositions, patterned high k thin film dielectrics and related devices

#400
20170190810
2017-07-06

Polymers derived from norbornadiene and maleic anhydride and use thereof

#401
20170188465
2017-06-29

Method for producing wired circuit board

#402
20170184971
2017-06-29

STRUCTURED ILLUMINATION OF CROSSLINKABLE POLYCARBONATE

#403
20170184967
2017-06-29

Resist composition, pattern forming process, polymer, and monomer

#404
20170177760
2017-06-22

Optical metrology of lithographic processes using asymmetric sub-resolution features to enhance measurement

#405
20170176697
2017-06-22

Process for manufacturing vertical optical coupling structures

#406
20170168391
2017-06-15

Photosensitive resin composition, method for producing cured film, cured film, liquid crystal display device, organic electroluminescent display device, and touch panel

#407
20170166700
2017-06-15

Highly heat resistant polysilsesquioxane-based photosensitive resin composition

#408
20170153544
2017-06-01

Photosensitive composition, method for producing cured film, cured film, touch panel, and display device

#409
20170146905
2017-05-25

Composition for forming touch panel electrode protective film, transfer film, laminate, protective film for touch panel electrode and method for forming same, capacitive input device, and image display device

#410
20170146904
2017-05-25

Coloring composition, cured film, color filter, method of manufacturing color filter, solid image pickup element, and image display apparatus

#411
20170146902
2017-05-25

MONOLITHIC EUV TRANSPARENT MEMBRANE AND SUPPORT MESH AND METHOD OF MANUFACTURING SAME

#412
20170144363
2017-05-25

Imprint apparatus, imprint method, and method for manufacturing article

#413
20170139325
2017-05-18

PHOTOSENSITIVE REFRACTIVE INDEX-ADJUSTING TRANSFER FILM

#414
20170135229
2017-05-11

Method of patterning a metal on a transparent conductor

#415
20170131634
2017-05-11

Chemically amplified resist material and resist pattern-forming method

#416
20170131631
2017-05-11

Electrooptical apparatus, production method for the electrooptical apparatus, and electronic appliance

#417
20170128890
2017-05-11

METHOD FOR PERFORATING CARBON NANOMATERIAL AND METHOD FOR PRODUCING FILTER MOLDED ARTICLE

#418
20170115564
2017-04-27

Photosensitive composition, method for producing cured film, cured film, touch panel, touch panel display device, liquid crystal display device, and organic EL display device

#419
20170115561
2017-04-27

Photosensitive compositions and quantum dot polymer composite patterns including the same

#420
20170107331
2017-04-20

Methods For Preparing Articles And Associated Articles Prepared Thereby

#421
20170097566
2017-04-06

Fluorine free photopatternable phenol functional group containing polymer compositions

#422
20170088726
2017-03-30

Photosensitive ink compositions and transparent conductors and method of using the same

#423
20170087765
2017-03-30

COLOR AND/OR OPACITY CHANGING LIQUID RADIATION CURABLE RESINS, AND METHODS FOR USING THE SAME IN ADDITIVE FABRICATION

#424
20170082923
2017-03-23

PHOTOSENSITIVE COMPOSITION FOR PERMANENT FILMS, RESIST MATERIAL AND COATING FILM

#425
20170082922
2017-03-23

Method of manufacturing display device using bottom surface exposure

#426
20170073453
2017-03-16

Aromatic resins for underlayers

#427
20170071540
2017-03-16

Structure and methodology for a shadow mask having hollow high aspect ratio projections

#428
20170066703
2017-03-09

Compound containing modified phenolic hydroxy group, method for producing compound containing modified phenolic hydroxy group, photosensitive composition, resist material, and resist coating film

#429
20170052449
2017-02-23

Chemically amplified resist material, pattern-forming method, compound, and production method of compound

#430
20170052448
2017-02-23

Resist-pattern-forming method and chemically amplified resist material

#431
20170052447
2017-02-23

Method for manufacturing patterned object, patterned object, and light irradiation apparatus

#432
20170052446
2017-02-23

Photosensitive resin composition and application thereof

#433
20170045819
2017-02-16

Resist underlayer film-forming composition for lithography containing polymer having acrylamide structure and acrylic acid ester structure

#434
20170045818
2017-02-16

Resist underlayer film-forming composition for lithography containing polymer having blocked isocyanate structure

#435
20170045817
2017-02-16

Photosensitive element, laminate, permanent mask resist, method for producing same, and method for producing semiconductor package

#436
20170044287
2017-02-16

COMPOSITION AND ORGANIC FILM TRANSISTOR USING THE SAME

#437
20170038680
2017-02-09

FLUORINATED PHOTORESIST WITH INTEGRATED SENSITIZER

#438
20170023860
2017-01-26

Photosensitive polysiloxane composition and uses thereof

#439
20170023712
2017-01-26

Color filter pattern and manufacturing method thereof

#440
20170017160
2017-01-19

Curved shaped mask, curved device having color resists pattern and method for manufacturing the same

#441
20170010527
2017-01-12

Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method

#442
20170008982
2017-01-12

Monomer, polymer, positive resist composition, and patterning process

#443
20160363857
2016-12-15

Method of making an extreme ultraviolet pellicle

#444
20160357103
2016-12-08

Photosensitization chemical-amplification type resist material, method for forming pattern using same, semiconductor device, mask for lithography, and template for nanoimprinting

#445
20160349619
2016-12-01

PATTERN FORMING METHOD, RESIST COMPOSITION FOR MULTIPLE DEVELOPMENT USED IN THE PATTERN FORMING METHOD, DEVELOPER FOR NEGATIVE DEVELOPMENT USED IN THE PATTERN FORMING METHOD, AND RINSING SOLUTION FOR NEGATIVE DEVELOPMENT USED IN THE PATTERN FORMING METHOD

#446
20160334708
2016-11-17

Mask, glass substrate and manufacturing method thereof

#447
20160327859
2016-11-10

Coloring composition, and cured film, color filter, pattern forming method, method for manufacturing color filter, solid-state imaging device, image display device, and dye multimer, each using the coloring composition

#448
20160327858
2016-11-10

Coloring composition, cured film, color filter, method for manufacturing color filter, solid-state imaging device, and image display device

#449
20160322307
2016-11-03

Method of forming mark pattern, recording medium and method of generating mark data

#450
20160313644
2016-10-27

PATTERN FORMATION METHOD

#451
20160311214
2016-10-27

Method of making relief image printing plates

#452
20160310637
2016-10-27

3-dimensional parylene scaffold cage

#453
20160306450
2016-10-20

Method for manufacturing touch panel, touch panel and touch display device

#454
20160303283
2016-10-20

THIN FILM WITH MICROCHANNELS

#455
20160299433
2016-10-13

Illumination system and method of forming fin structure using the same

#456
20160293728
2016-10-06

Method of manufacturing semiconductor devices

#457
20160291439
2016-10-06

Registered reflective element for a brightness enhanced TIR display

#458
20160291318
2016-10-06

Electrooptical apparatus, production method for the electrooptical apparatus, and electronic appliance

#459
20160266493
2016-09-15

Apparatuses and methods utilizing etch stop layers

#460
20160265119
2016-09-15

Apparatuses and methods utilizing etch stop layers

#461
20160252813
2016-09-01

Lithographic printing plate precursors and coating

#462
20160244671
2016-08-25

Method of preparing a birefringent polymer film

#463
20160238939
2016-08-18

Method for monitoring focus in EUV lithography

#464
20160223912
2016-08-04

Color filter and manufacturing method thereof

#465
20160216606
2016-07-28

Organometallic solution based high resolution patterning compositions

#466
20160179008
2016-06-23

DNA double-write/double binding identity

#467
20160176228
2016-06-23

Method of producing a decorated element for a timepiece or piece of jewellery, and element made by the method

#468
20160170201
2016-06-16

Optical component

#469
20160161839
2016-06-09

Extreme ultraviolet lithography process and mask with reduced shadow effect and enhanced intensity

#470
20160154315
2016-06-02

ORGANIC P-N JUNCTION BASED INFRARED DETECTION DEVICE AND MANUFACTURING METHOD THEREOF AND INFRARED IMAGE DETECTOR USING SAME

#471
20160154308
2016-06-02

Process of manufacturing flexographic printing forms

#472
20160154307
2016-06-02

Photolithography for making electrochemical measurements

#473
20160147157
2016-05-26

Pattern formation method, pattern, and etching method, electronic device manufacturing method, and electronic device using same

#474
20160147148
2016-05-26

Forming conductive metal patterns using thiosulfate copolymers

#475
20160109799
2016-04-21

Composition for resist patterning and method of manufacturing optical structures using imprint lithography

#476
20160109798
2016-04-21

Method of making an extreme ultraviolet pellicle

#477
20160109370
2016-04-21

Sensor for detecting saccharide and manufacturing method thereof and detection method of glycated hemoglobin using the same

#478
20160103395
2016-04-14

Pattern forming method, resist composition for multiple development used in the pattern forming method, developer for negative development used in the pattern forming method, and rinsing solution for negative development used in the pattern forming method

#479
20160097974
2016-04-07

Chemically amplified negative resist composition, photo-curable dry film, making method, patterning process, and electric/electronic part-protecting film

#480
20160097973
2016-04-07

Silicone skeleton-containing polymer compound and method for producing same, chemically amplified negative resist composition, photo-curable dry film and method for producing same, patterning process, layered product, and substrate

#481
20160091793
2016-03-31

Forming conductive metal patterns using water-soluble polymers

#482
20160091791
2016-03-31

Photocurable resin composition and production method of image display device

#483
20160048071
2016-02-18

Extreme ultraviolet lithography process and mask

#484
20160041468
2016-02-11

Exposure apparatus and a method for exposing a photosensitive element and a method for preparing a printing form from the photosensitive element

#485
20160041417
2016-02-11

Mask plate and processes for manufacturing ultraviolet mask plate and array substrate

#486
20160039122
2016-02-11

Device and method of manufacturing a structure made of a curable material by means of molding

#487
20160033866
2016-02-04

Method to mitigate defect printability for ID pattern

#488
20160033865
2016-02-04

Silicone structure-bearing polymer, negative resist composition, photo-curable dry film, patterning process, and electric/electronic part-protecting film

#489
20160026080
2016-01-28

Composition sensitive to radiation in electromagnetic spectrum ranges for printing purposes, printing plate comprising said composition, use of said composition and image development process

#490
20160016919
2016-01-21

Photo-sensitive resin composition, cured film, method for forming a pixel, solid state image sensor, color filter and ultraviolet absorber

#491
20160011514
2016-01-14

Method of manufacturing substrate and substrate and mask film

#492
20150380299
2015-12-31

METHODS FOR PROVIDING SPACED LITHOGRAPHY FEATURES ON A SUBSTRATE BY SELF-ASSEMBLY OF BLOCK COPOLYMERS

#493
20150355541
2015-12-10

ACTINIC-RAY- OR RADIATION-SENSITIVE RESIN COMPOSITION, ACTINIC-RAY- OR RADIATION-SENSITIVE FILM AND PATTERN FORMING METHOD

#494
20150338740
2015-11-26

Method for providing conductive silver film elements

#495
20150331323
2015-11-19

Composition for forming overlay film, and resist pattern formation method employing the same

#496
20150321447
2015-11-12

Substrates and methods of forming a pattern on a substrate

#497
20150316848
2015-11-05

Conductive element precursor and conductive pattern formation

#498
20150316797
2015-11-05

Mask and method of fabricating spacers

#499
20150309405
2015-10-29

Method of making an extreme ultraviolet pellicle

#500
20150309403
2015-10-29

ANTIREFLECTIVE COATING COMPOSITIONS AND PROCESSES THEREOF

#501
20150309244
2015-10-29

Light guide plate, manufacturing method of the same and display device comprising the same

#502
20150301454
2015-10-22

Semiconductor device manufacturing method and resist pattern forming method

#503
20150293451
2015-10-15

Forming conductive metal patterns using thiosulfate copolymers

#504
20150293443
2015-10-15

PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE ELEMENT, METHOD FOR FORMING RESIST PATTERN, AND METHOD FOR MANUFACTURING PRINTED WIRING BOARD

#505
20150293438
2015-10-15

Phase shift mask and method of forming patterns using the same

#506
20150286133
2015-10-08

Pellicle for lithography

#507
20150268556
2015-09-24

Chemically-amplified negative resist composition and resist patterning process using the same

#508
20150268555
2015-09-24

POSITIVE RESIST COMPOSITION AND PATTERNING PROCESS

#509
20150253666
2015-09-10

Positive resist composition and patterning process

#510
20150253665
2015-09-10

Positive resist composition and patterning process

#511
20150253664
2015-09-10

Chemically-amplified positive resist composition and resist patterning process using the same

#512
20150248060
2015-09-03

METHOD OF MAKING THERMAL INSULATION FILM AND THERMAL INSULATION FILM PRODUCT

#513
20150248059
2015-09-03

Method of using an EUV mask during EUV photolithography processes

#514
20150241783
2015-08-27

Methods and techniques to use with photosensitized chemically amplified resist chemicals and processes

#515
20150241782
2015-08-27

Chemical amplification methods and techniques for developable bottom anti-reflective coatings and dyed implant resists

#516
20150241781
2015-08-27

Mitigation of EUV shot noise replicating into acid shot noise in photo-sensitized chemically-amplified resist (PS-CAR)

#517
20150241779
2015-08-27

REAGENT FOR ENHANCING GENERATION OF CHEMICAL SPECIES

#518
20150241776
2015-08-27

Method for lithography patterning

#519
20150234278
2015-08-20

Patterning process

#520
20150234274
2015-08-20

Resist top-coat composition and patterning process

#521
20150227042
2015-08-13

Photosensitive element

#522
20150219988
2015-08-06

Method of repairing a mask

#523
20150219685
2015-08-06

Multiple probe actuation

#524
20150212416
2015-07-30

Positive resist composition and patterning process

#525
20150212415
2015-07-30

Positive resist composition and patterning process

#526
20150198888
2015-07-16

METHOD FOR MANUFACTURING SUBSTRATE FOR PACKAGE

#527
20150198879
2015-07-16

Fluorine-containing sulfonic acid salt, fluorine-containing sulfonic acid salt resin, resist composition, and pattern forming method using same

#528
20150198877
2015-07-16

Chemically amplified negative resist composition and patterning process

#529
20150198876
2015-07-16

Onium salt, chemically amplified positive resist composition, and patterning process

#530
20150192854
2015-07-09

COMPOSITION FOR MANUFACTURING INTEGRATED CIRCUIT DEVICES, OPTICAL DEVICES, MICROMACHINES AND MECHANICAL PRECISION DEVICES

#531
20150192851
2015-07-09

Negative resist composition, method of forming resist pattern, and complex

#532
20150185618
2015-07-02

OPTIMIZATION OF UV CURING

#533
20150185616
2015-07-02

RESISTS FOR LITHOGRAPHY

#534
20150185612
2015-07-02

Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, manufacturing method of electronic device using the same, and electronic device

#535
20150185610
2015-07-02

Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device using the same, and electronic device

#536
20150168836
2015-06-18

Fluorine-containing compound, substrate for pattern formation, photodegradable coupling agent, pattern formation method, and compound

#537
20150168834
2015-06-18

Pattern forming method, electron beam-sensitive or extreme ultraviolet ray-sensitive resin composition, resist film, and method for manufacturing electronic device, and electronic device using the same

#538
20150168829
2015-06-18

Sulfonium salt, resist composition and resist pattern forming process

#539
20150153648
2015-06-04

Optical wavelength dispersion device and method of manufacturing the same

#540
20150147699
2015-05-28

Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device

#541
20150147697
2015-05-28

Resist composition and pattern forming process

#542
20150147687
2015-05-28

Extreme ultraviolet lithography process and mask with reduced shadow effect and enhanced intensity

#543
20150147686
2015-05-28

Extreme ultraviolet lithography process and mask

#544
20150140494
2015-05-21

ELECTROLESS PLATING METHOD USING BLEACHING

#545
20150140493
2015-05-21

Compounds for enhancing generation of chemical species

#546
20150140490
2015-05-21

OVERLAY FILM FORMING COMPOSITION AND RESIST PATTERN FORMATION METHOD USING SAME

#547
20150140484
2015-05-21

Actinic ray-sensitive or radiation-sensitive resin composition, resist film, using the same, pattern forming method, manufacturing method of electronic device, and electronic device

#548
20150140483
2015-05-21

Electroless plating method

#549
20150140477
2015-05-21

EUV mask for use during EUV photolithography processes

#550
20150132687
2015-05-14

Actinic ray-sensitive or radiation-sensitive resin composition, resist film using the same, pattern forming method, manufacturing method of electronic device, and electronic device

#551
20150132477
2015-05-14

Cliché and printing apparatus comprising same

#552
20150126843
2015-05-07

Multielectrode array and method of fabrication

#553
20150125785
2015-05-07

Halftone phase shift photomask blank, halftone phase shift photomask and pattern exposure method

#554
20150118626
2015-04-30

TUBE NOZZLE ELECTROSPINNING

#555
20150104734
2015-04-16

Extreme ultraviolet lithography process and mask

#556
20150099228
2015-04-09

Resist composition and patterning process

#557
20150098984
2015-04-09

NANOLITHOGRAPHY USING LIGHT SCATTERING FROM PARTICLES AND ITS APPLICATIONS IN CONTROLLED MATERIAL RELEASE

#558
20150093707
2015-04-02

Mask forming imageable material and use

#559
20150086928
2015-03-26

Method of manufacturing a flexographic printing plate with support structures

#560
20150086911
2015-03-26

Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, mask blanks including actinic ray-sensitive or radiation-sensitive film, pattern forming method and photomask

#561
20150080802
2015-03-19

Method to fabricate polymeric microneedles

#562
20150079523
2015-03-19

POLYMER SHEET PATTERNING AND ITS ASSEMBLY USING SLIT CHANNEL LITHOGRAPHY

#563
20150079522
2015-03-19

Pattern forming method, resist composition for multiple development used in the pattern forming method, developer for negative development used in the pattern forming method, and rinsing solution for negative development used in the pattern forming method

#564
20150072293
2015-03-12

Continuous liquid interphase printing

#565
20150072271
2015-03-12

Extreme ultraviolet lithography process and mask

#566
20150064626
2015-03-05

Positive resist composition and patterning process

#567
20150064624
2015-03-05

Oxime ester photoinitiators

#568
20150064620
2015-03-05

Photoacid generator, photoresist, coated substrate, and method of forming an electronic device

#569
20150062545
2015-03-05

Pattern forming method, pattern forming apparatus, and computer readable storage medium

#570
20150056555
2015-02-26

Photoresist and method of formation and use

#571
20150056554
2015-02-26

Oxime Ester Photoinitiators

#572
20150056545
2015-02-26

Polymer compound, chemically amplified negative resist composition, photo-curable dry film and production method thereof, layered product, patterning process, and substrate

#573
20150056542
2015-02-26

Organometallic solution based high resolution patterning compositions

#574
20150044686
2015-02-12

Systems and Methods for Containing Biological Samples

#575
20150041659
2015-02-12

System and method for return beam metrology with optical switch

#576
20150031209
2015-01-29

Method for forming features with sub-lithographic pitch using directed self-assembly of polymer blend

#577
20150030982
2015-01-29

Fluorinated photopolymer with fluorinated sensitizer

#578
20150017576
2015-01-15

PATTERN FORMING METHOD, METHOD FOR SELECTING HEATING TEMPERATURE IN PATTERN FORMING METHOD, EXTREME ULTRAVIOLET-SENSITIVE RESIN COMPOSITION, RESIST FILM, MANUFACTURING METHOD OF ELECTRONIC DEVICE USING THE SAME, AND ELECTRONIC DEVICE

#579
20150017574
2015-01-15

Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method

#580
20150017573
2015-01-15

Reflective original, exposure method, and device manufacturing method

#581
20150010869
2015-01-08

Methods of providing patterned chemical epitaxy templates for self-assemblable block copolymers for use in device lithography

#582
20150004533
2015-01-01

Actinic ray-sensitive or radiation-sensitive resin composition, and, actinic ray-sensitive or radiation-sensitive film and pattern forming method, each using the same

#583
20140370443
2014-12-18

Plate surface protecting liquid composition for lithographic printing plate using same

#584
20140367358
2014-12-18

Composition for forming pattern and in-plane printing method using the same

#585
20140363771
2014-12-11

DISPLAY PANEL AND MANUFACTURING METHOD THEREOF AND IMAGE DISPLAY SYSTEM

#586
20140361458
2014-12-11

Method of manufacturing liquid ejection head

#587
20140349224
2014-11-27

Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device using the same and electronic device

#588
20140342274
2014-11-20

Chemically amplified negative resist composition and patterning process

#589
20140333916
2014-11-13

Method and apparatus for the formation of conductive films on a substrate

#590
20140329182
2014-11-06

Method for producing layered materials using long-lived photo-induced active centers

#591
20140318398
2014-10-30

Photopolymeric Craft Stamp Indexing Images and Method of Making

#592
20140315132
2014-10-23

Exposure apparatus and a method for exposing a photosensitive element and a method for preparing a printing form from the photosensitive element

#593
20140313497
2014-10-23

Exposure apparatus and a method for controlling radiation from a lamp for exposing a photosensitive element

#594
20140308617
2014-10-16

Method for improving print performance in flexographic printing plates

#595
20140306441
2014-10-16

Security devices and methods of manufacture thereof

#596
20140306375
2014-10-16

Resin mold

#597
20140285891
2014-09-25

Method for producing a refractive or diffractive optical device

#598
20140248429
2014-09-04

Fabrication of free standing membranes and use thereof for synthesis of nanoparticle patterns

#599
20140242502
2014-08-28

Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film, mask blank and method of forming pattern

#600
20140239192
2014-08-28

Illumination and displacement device for a projection exposure apparatus