Patents-Review.com
ClassID:

206368 ⎘

H01J2237/06308 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Sources; Electron sources Thermionic sources

Sub-classes:
Recent Application in this class:
#1
20250391635
2025-12-25

ELECTRON BEAM ADJUSTMENT METHOD, ELECTRON BEAM APPARATUS, AND STORAGE MEDIUM

 #2
20250273423
2025-08-28

ELECTRON GUN AND ELECTRON BEAM WRITING APPARATUS

 #3
20250054720
2025-02-13

Electron gun and system and method using electron gun

 #4
20240395494
2024-11-28

Laminate, electron source and electronic device containing laminate, and production method and cleaning method for laminate

 #5
20240087836
2024-03-14

Electron-beam irradiation apparatus and maintenance method for electron-beam irradiation apparatus

 #6
20240029989
2024-01-25

Electron source, method for manufacturing same, and device provided with electron source

 #7
20230317395
2023-10-05

ELECTRON SOURCE AND METHOD FOR MANUFACTURING SAME, AND EMITTER AND DEVICE PROVIDED WITH SAME

 #8
20230298846
2023-09-21

EMITTER AND DEVICE PROVIDED WITH SAME

 #9
20230082224
2023-03-16

Device to control uniformity of extracted ion beam

 #10
20220199350
2022-06-23

ELECTRON BEAM APPLICATION DEVICE, AND ELECTRON BEAM EMISSION METHOD FOR ELECTRON BEAM APPLICATION DEVICE

 #11
20220189725
2022-06-16

Electron emitter and method of fabricating same

 #12
20220068589
2022-03-03

CHARGED PARTICLE SOURCE

 #13
20210142975
2021-05-13

Electron emitter and method of fabricating same

 #14
20210074506
2021-03-11

Control method for electron microscope and electron microscope

 #15
20200365369
2020-11-19

Apparatuses and methods for plasma processing

 #16
20200126753
2020-04-23

Charged particle source

 #17
20200118784
2020-04-16

Deflection array apparatus for multi-electron beam system

 #18
20190172674
2019-06-06

Electron emitter and method of fabricating same

 #19
20190057833
2019-02-21

Charged particle source

 #20
20180366294
2018-12-20

ELECTRON BEAM APPARATUS, AND X-RAY GENERATION APPARATUS AND SCANNING ELECTRON MICROSCOPE EACH INCLUDING THE SAME

 #21
20180269024
2018-09-20

Low work function electron beam filament assembly

 #22
20170199131
2017-07-13

Inverse Photoelectron Spectroscopy Device

 #23
20170154750
2017-06-01

Electron gun, control method and control program thereof, and three-dimensional shaping apparatus

 #24
20150270088
2015-09-24

Electron gun, method of controlling same, and electron beam additive manufacturing machine

 #25
20150144800
2015-05-28

Device for producing an electron beam

 #26
20150044615
2015-02-12

DRAWING DATA GENERATING METHOD, PROCESSING APPARATUS, STORAGE MEDIUM, DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

 #27
20140265827
2014-09-18

Current regulation method of multiple beams

 #28
20140139100
2014-05-22

Thermionic cathode with even electric field distribution on electron emitting surface

 #29
20140097736
2014-04-10

High-brightness, long life thermionic cathode and methods of its fabrication

 #30
20140065918
2014-03-06

Method of producing rapid heating of a cathode installed in a thermionic emission assembly

 #31
20130214147
2013-08-22

Apparatus and method for inhibiting ionization source filament failure

 #32
20120256097
2012-10-11

Indirectly heated cathode cartridge design

 #33
20110294071
2011-12-01

ELECTRON GUN, LITHOGRAPHY APPARATUS, METHOD OF MANUFACTURING ARTICLE, AND ELECTRON BEAM APPARATUS

 #34
20100320942
2010-12-23

Electron gun used in particle beam device

 #35
20100301736
2010-12-02

Electron emitting source and manufacturing method of electron emitting source

 #36
20100038556
2010-02-18

Hot cathode and ion source including the same

 #37
20090289204
2009-11-26

Electron beam emitter with slotted gun

 #38
20090243490
2009-10-01

Unbalanced ion source

 #39
20090212681
2009-08-27

Electron beam generating apparatus

 #40
20080164802
2008-07-10

Diamond Electron Emission Cathode, Electron Emission Source, Electron Microscope, And Electron Beam Exposure Device

 #41
20080067493
2008-03-20

Diamond electron emission cathode, electron emission source, electron microscope, and electron beam exposure device

 #42
20080048544
2008-02-28

Diamond electron emission cathode, electron emission source, electron microscope, and electron beam exposure device

 #43
20070210691
2007-09-13

Electron beam gun

 #44
20070096620
2007-05-03

Electron gun

 #45
20060076866
2006-04-13

Electron source

 #46
20050247876
2005-11-10

Sample dimension measuring method and scanning electron microscope

 #47
20050211921
2005-09-29

Electron beam exposure system

 #48
20050205800
2005-09-22

Flood gun for charge neutralization

 #49
20050194550
2005-09-08

Gas flow restricting cathode system for ion implanter and related method

 #50
20050174030
2005-08-11

High brightness thermionic cathode

 #51
16203524
2020-03-17

Low temperature, high-brightness, cathode

 #52
16203407
2020-02-04

High-brightness lanthanum hexaboride cathode and method for manufacturing of cathode

 #53
15885286
2019-04-23

Ion beam source for semiconductor ion implantation