H01J2237/06316 - CPC Classification Index

#1

20250022676

2025-01-16

ELECTRON BEAM DEVICE INCLUDING SCHOTTKY EMITTER AND METHOD OF OPERATING SCHOTTKY EMITTER

#2

20240212966

2024-06-27

Charged Particle Gun and Charged Particle Beam Apparatus

#3

20240079198

2024-03-07

Emitter, electron gun in which same is used, electronic device in which same is used, and method for manufacturing same

#4

20230317401

2023-10-05

Electron Source, Method of Manufacturing the Same, And Electron Beam Apparatus Using the Same

#5

20230253178

2023-08-10

Method and apparatus for Schottky TFE inspection

#6

20230101787

2023-03-30

Filament-less electron source

#7

20220415603

2022-12-29

Electron Source, Electron Beam Device, and Method for Manufacturing Electron Source

#8

20220367145

2022-11-17

Method and apparatus for Schottky TFE inspection

#9

20220230835

2022-07-21

Electron gun and charged particle beam device equipped with electron gun

#10

20220189725

2022-06-16

Electron emitter and method of fabricating same

#11

20210327674

2021-10-21

Electron source, method for manufacturing the same, and electron beam device using the same

#12

20210142975

2021-05-13

Electron emitter and method of fabricating same

#13

20200249181

2020-08-06

Inspection tool, lithographic apparatus, electron beam source and an inspection method

#14

20190172674

2019-06-06

Electron emitter and method of fabricating same

#15

20180323036

2018-11-08

Gun lens design in a charged particle microscope

#16

20160329184

2016-11-10

Array of carbon nanotube micro-tip structures

#17

20150357147

2015-12-10

Emitter structure, gas ion source and focused ion beam system

#18

20150255240

2015-09-10

Method for manufacturing electron source

#19

20150054398

2015-02-26

Electrode material with low work function and high chemical stability

#20

20140291542

2014-10-02

Emitter structure, gas ion source and focused ion beam system

#21

20140197336

2014-07-17

Electron gun and charged particle beam device having an aperture with flare-suppressing coating

#22

20130234025

2013-09-12

Electron gun emitting under high voltage, in particular for electron microscopy

#23

20130224429

2013-08-29

Carbon nanotube based micro-tip structure and method for making the same

#24

20130187058

2013-07-25

Determination of emission parameters from field emission sources

#25

20130122774

2013-05-16

Fabrication of super ion—electron source and nanoprobe by local electron bombardment

#26

20130049568

2013-02-28

Electron source having a tungsten single crystal electrode

#27

20130032716

2013-02-07

Electron beam apparatus and a device manufacturing method by using said electron beam apparatus

#28

20120169210

2012-07-05

ELECTRON-SOURCE ROD, ELECTRON SOURCE AND ELECTRONIC DEVICE

#29

20120131785

2012-05-31

Electron beam source and method of manufacturing the same

#30

20120104272

2012-05-03

CHARGED PARTICLE GUN AND CHARGED PARTICLE BEAM DEVICE

#31

20120098409

2012-04-26

Filament for electron source

#32

20120085925

2012-04-12

Charged particle radiation device

#33

20120062094

2012-03-15

Electron gun

#34

20110294071

2011-12-01

ELECTRON GUN, LITHOGRAPHY APPARATUS, METHOD OF MANUFACTURING ARTICLE, AND ELECTRON BEAM APPARATUS

#35

20110240855

2011-10-06

Electron beam device and electron beam application device using the same

#36

20110186735

2011-08-04

ELECTRON SOURCE, ELECTRON GUN, AND ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM LITHOGRAPHY DEVICE USING IT

#37

20110101238

2011-05-05

Cold field emitter

#38

20110084591

2011-04-14

THERMAL FIELD EMISSION CATHODE

#39

20110084219

2011-04-14

Method and apparatus of pretreatment of an electron gun chamber

#40

20110036810

2011-02-17

MANUFACTURING METHOD OF ELECTRON SOURCE

#41

20100237762

2010-09-23

Electron source and electron beam apparatus

#42

20100194262

2010-08-05

Electron source

#43

20100127170

2010-05-27

Electron beam control method, electron beam generating apparatus, apparatus using the same, and emitter

#44

20100090581

2010-04-15

Electron source

#45

20100078557

2010-04-01

Electron beam source and method of manufacturing the same

#46

20100026160

2010-02-04

ELECTRON SOURCE

#47

20100019649

2010-01-28

Electron source

#48

20100019648

2010-01-28

Electron gun minimizing sublimation of electron source and electron beam exposure apparatus using the same

#49

20090315444

2009-12-24

Thermal field emission cathode

#50

20090289186

2009-11-26

Small electron gun

#51

20090078561

2009-03-26

Apparatus and Methods for Growing Nanofibres and Nanotips

#52

20090065711

2009-03-12

Charged particle beam exposure system

#53

20090023355

2009-01-22

Electron source manufacturing method

#54

20090001266

2009-01-01

Arrangement and method for compensating emitter tip vibrations

#55

20080315089

2008-12-25

Electron gun, electron beam exposure apparatus, and exposure method

#56

20080211376

2008-09-04

Electron gun, electron beam exposure apparatus, and exposure method

#57

20080174225

2008-07-24

Cold field emitter

#58

20080169743

2008-07-17

Field emission electron gun and method of operating the same

#59

20080164802

2008-07-10

Diamond Electron Emission Cathode, Electron Emission Source, Electron Microscope, And Electron Beam Exposure Device

#60

20080067493

2008-03-20

Diamond electron emission cathode, electron emission source, electron microscope, and electron beam exposure device

#61

20080048544

2008-02-28

Diamond electron emission cathode, electron emission source, electron microscope, and electron beam exposure device

#62

20080042060

2008-02-21

Inspection system by charged particle beam and method of manufacturing devices using the system

#63

20070236143

2007-10-11

Small electron gun

#64

20070210249

2007-09-13

Electron Spectroscope With Emission Induced By A Monochromatic Electron Beam

#65

20070145267

2007-06-28

Portable scanning electron microscope

#66

20070145266

2007-06-28

Electron microscope apparatus using CRT-type optics

#67

20070096838

2007-05-03

Field emission electron gun

#68

20070085018

2007-04-19

Device and method for selecting an emission area of an emission pattern

#69

20070057617

2007-03-15

Electron beam source having an extraction electrode provided with a magnetic disk element

#70

20070057186

2007-03-15

Inspection system by charged particle beam and method of manufacturing devices using the system

#71

20070018562

2007-01-25

Field emitter arrangement and method of cleansing an emitting surface of a field emitter

#72

20060226753

2006-10-12

Stabilized emitter and method for stabilizing same

#73

20060145585

2006-07-06

Electron gun

#74

20060097200

2006-05-11

Electron beam apparatus and a device manufacturing method by using said electron beam apparatus

#75

20060076866

2006-04-13

Electron source

#76

20060060790

2006-03-23

System and method for evaluation using electron beam and manufacture of devices

#77

20050269528

2005-12-08

Charged particle beam exposure system

#78

20050052103

2005-03-10

Small electron gun

#79

20050001220

2005-01-06

Low power schottky emitter

#80

15593900

2018-04-03

Extractor electrode for electron source