H01J2237/06358 - CPC Classification Index

ClassID:

206374 ⎘

H01J2237/06358 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Sources; Electron sources; Cold-cathode sources Secondary emission

Recent Application in this class:

20250364767

2025-11-27

LASER SYSTEM AND METHOD FOR GENERATING SECONDARY RADIATION THROUGH INTERACTION OF A PRIMARY LASER BEAM WITH A TARGET MATERIAL

20220344127

2022-10-27

Electrode for plasma processing apparatus and plasma processing apparatus

20090127473

2009-05-21

Electron beam irradiation device