206370 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Sources; Electron sources Cold-cathode sources
Sub-classes:High brightness electron gun, system using the same, and method of operating thereof
#2High brightness electron gun with moving condenser lens
#3Charged particle beam apparatus, and method of controlling the same
#4Charged particle radiation device
#5Charged particle beam apparatus, and method of controlling the same
#6Magnetically insulated cold-cathode electron gun
#7Charged particle beam emitting device and method for operating a charged particle beam emitting device
#8Diamond electron emitter and electron beam source using same