Patents-Review.com
ClassID:

206385 ⎘

H01J2237/0807 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Sources; Ion sources; Field ionization sources Gas field ion sources [GFIS]

Recent Application in this class:
#1
20250266240
2025-08-21

EDITING OF DEEP, MULTI-LAYERED STRUCTURES

 #2
20240203682
2024-06-20

ION BEAM DEVICE AND EMITTER TIP MILLING METHOD

 #3
20230307204
2023-09-28

A GAS ION GUN

 #4
20220148850
2022-05-12

Automated operational control of micro-tooling devices

 #5
20210090841
2021-03-25

Hydrogen generator for an ion implanter

 #6
20210066056
2021-03-04

Method, device and system for the treatment of biological cryogenic samples by plasma focused ion beams

 #7
20200312603
2020-10-01

Method of manufacturing emitter, emitter, and focused ion beam apparatus

 #8
20200294776
2020-09-17

Ion beam device and cleaning method for gas field ion source

 #9
20190378690
2019-12-12

ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD

 #10
20190295802
2019-09-26

Ion beam device

 #11
20190228943
2019-07-25

Hydrogen generator for an ion implanter

 #12
20190164719
2019-05-30

Ion source and electron source having single-atom termination structure, tip having single-atom termination structure, gas field ion source, focused ion beam apparatus, electron source, electron microscope, mask repair apparatus, and method of manufacturing tip having single-atom termination structure

 #13
20190051491
2019-02-14

Field ionization source, ion beam apparatus, and beam irradiation method

 #14
20180308658
2018-10-25

Ion beam apparatus

 #15
20180233319
2018-08-16

Focused ion beam apparatus

 #16
20180012726
2018-01-11

Ion beam system

 #17
20170352517
2017-12-07

Ion beam device

 #18
20170323764
2017-11-09

Ion beam device

 #19
20170229284
2017-08-10

Ion beam device and sample observation method

 #20
20160322123
2016-11-03

Repair Apparatus

 #21
20160225575
2016-08-04

Ion beam device and emitter tip adjustment method

 #22
20160225574
2016-08-04

Focused ion beam apparatus

 #23
20160111243
2016-04-21

Charged particle beam system and method of operating a charged particle beam system

 #24
20160104598
2016-04-14

Charged particle beam system and method of operating a charged particle beam system

 #25
20150213997
2015-07-30

Ion sources, systems and methods

 #26
20150162160
2015-06-11

Focused ion beam apparatus with precious metal emitter surface

 #27
20150083930
2015-03-26

Charged particle microscope

 #28
20150053866
2015-02-26

Repair apparatus

 #29
20150048247
2015-02-19

Scanning ion microscope and secondary particle control method

 #30
20150041650
2015-02-12

Gas field ionization ion source and ion beam apparatus

 #31
20150008342
2015-01-08

Charged particle beam system and method of operating a charged particle beam system

 #32
20150008341
2015-01-08

Charged particle beam system and method of operating a charged particle beam system

 #33
20150008334
2015-01-08

Charged particle beam system and method of operating a charged particle beam system

 #34
20150008333
2015-01-08

Charged particle beam system and method of operating a charged particle beam system

 #35
20150008332
2015-01-08

Charged particle beam system and method of operating a charged particle beam system

 #36
20140326897
2014-11-06

Gas field ionization ion source and ion beam device

 #37
20140319370
2014-10-30

Ion beam device

 #38
20140306121
2014-10-16

Ion sources, systems and methods

 #39
20140299768
2014-10-09

Ion source and ion beam device using same

 #40
20140292189
2014-10-02

Focused ion beam apparatus and control method thereof

 #41
20140284474
2014-09-25

Focused ion beam system

 #42
20140224987
2014-08-14

Methods of fabricating microelectronic substrate inspection equipment

 #43
20140197329
2014-07-17

Ion beam device having gas introduction port disposed on structure maintained at ground potential

 #44
20140191128
2014-07-10

Emitter, gas field ion source, and ion beam device

 #45
20140175301
2014-06-26

Ion source, nanofabrication apparatus comprising such source, and a method for emitting ions

 #46
20140077684
2014-03-20

Particle sources and methods for manufacturing the same

 #47
20130256532
2013-10-03

Ion sources, systems and methods

 #48
20130175445
2013-07-11

Microelectronic substrate inspection equipment using helium ion microscopy

 #49
20130122774
2013-05-16

Fabrication of super ion—electron source and nanoprobe by local electron bombardment

 #50
20130119252
2013-05-16

Gas field ion source and method for using same, ion beam device, and emitter tip and method for manufacturing same

 #51
20130112138
2013-05-09

Particle sources and methods for manufacturing the same

 #52
20130099133
2013-04-25

Nitrogen ions from a gas field ion source held at a pressure of 1.0 x 10^(-6) pa to 1.0 x 10^(-2) pa

 #53
20130020496
2013-01-24

PARTICLE SOURCES AND APPARATUSES USING THE SAME

 #54
20120319003
2012-12-20

Ion beam device

 #55
20120241640
2012-09-27

Ion sources, systems and methods

 #56
20120217391
2012-08-30

CHARGED PARTICLE MICROSCOPE

 #57
20120199758
2012-08-09

Gas field ionization ion source and ion beam device

 #58
20120145896
2012-06-14

Gas delivery system with voltage gradient for an ion microscope

 #59
20120141693
2012-06-07

Ion sources, systems and methods

 #60
20120132802
2012-05-31

GAS FIELD IONIZATION ION SOURCE APPARATUS AND SCANNING CHARGED PARTICLE MICROSCOPE EQUIPPED WITH SAME

 #61
20120119086
2012-05-17

Gas field ion source, charged particle microscope, and apparatus

 #62
20120097863
2012-04-26

Ion microscope

 #63
20120097849
2012-04-26

Ion beam stabilization

 #64
20120085906
2012-04-12

Cross-section systems and methods

 #65
20120074318
2012-03-29

Charged particle source with light monitoring for tip temperature determination

 #66
20110315890
2011-12-29

GAS ION SOURCE WITH HIGH MECHANICAL STABILITY

 #67
20110266465
2011-11-03

Ion beam device

 #68
20110240853
2011-10-06

Ion sources, systems and methods

 #69
20110233401
2011-09-29

Focused ion beam apparatus

 #70
20110210264
2011-09-01

Distributed ion source acceleration column

 #71
20110204252
2011-08-25

Focused ion beam apparatus

 #72
20110180722
2011-07-28

ALIGNING CHARGED PARTICLE BEAMS

 #73
20110147609
2011-06-23

Ion beam device

 #74
20110139979
2011-06-16

Isotope ion microscope methods and systems

 #75
20110127428
2011-06-02

ELECTRON DETECTION SYSTEMS AND METHODS

 #76
20110121176
2011-05-26

Sample inspection methods, systems and components

 #77
20110049364
2011-03-03

Reducing particle implantation

 #78
20110001058
2011-01-06

Gas field ion source with coated tip

 #79
20100294930
2010-11-25

Scanning charged particle beams

 #80
20100288924
2010-11-18

Composite focused ion beam device, process observation method using the same, and processing method

 #81
20100219339
2010-09-02

Focused ion beam apparatus

 #82
20100187436
2010-07-29

High resolution gas field ion column

 #83
20100178601
2010-07-15

Photomask defect correcting method and device

 #84
20100176296
2010-07-15

Composite focused ion beam device, and processing observation method and processing method using the same

 #85
20100136255
2010-06-03

ICE LAYERS IN CHARGED PARTICLE SYSTEMS AND METHODS

 #86
20100108902
2010-05-06

Dual mode gas field ion source

 #87
20100090579
2010-04-15

Device for the field emission of particles and production method

 #88
20100051805
2010-03-04

Ion beam stabilization

 #89
20100038536
2010-02-18

Nanotip repair and characterization using field ion microscopy

 #90
20100012839
2010-01-21

Increasing current in charged particle sources and systems

 #91
20100006447
2010-01-14

METHOD OF PREPARING AN ULTRA SHARP TIP, APPARATUS FOR PREPARING AN ULTRA SHARP TIP, AND USE OF AN APPARATUS

 #92
20090289191
2009-11-26

Ultra high precision measurement tool with control loop

 #93
20090289185
2009-11-26

Ultra high precision measurement tool

 #94
20090260112
2009-10-15

Stable emission gas ion source and method for operation thereof

 #95
20090230299
2009-09-17

Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample

 #96
20090200484
2009-08-13

Dual mode gas field ion source

 #97
20090179161
2009-07-16

Ion sources, systems and methods

 #98
20090173888
2009-07-09

Gas field ion source, charged particle microscope, and apparatus

 #99
20090152462
2009-06-18

Gas field ionization ion source, scanning charged particle microscope, optical axis adjustment method and specimen observation method

 #100
20090146074
2009-06-11

High resolution gas field ion column with reduced sample load

 #101
20090121160
2009-05-14

Charged particle source with automated tip formation

 #102
20090114840
2009-05-07

Ion sources, systems and methods

 #103
20090110951
2009-04-30

Atomically sharp iridium tip

 #104
20090057566
2009-03-05

Gas ion source with high mechanical stability

 #105
20090020708
2009-01-22

Modular gas ion source

 #106
20090001266
2009-01-01

Arrangement and method for compensating emitter tip vibrations

 #107
20080217555
2008-09-11

Systems and methods for a gas field ionization source

 #108
20080142702
2008-06-19

Gas field ION source for multiple applications

 #109
20080111069
2008-05-15

Determining dopant information

 #110
20080067408
2008-03-20

Charged particle beam device with a gas field ion source and a gas supply system

 #111
20070262263
2007-11-15

Particle-optical apparatus equipped with a gas ion source

 #112
20070228287
2007-10-04

Systems and methods for a gas field ionization source

 #113
20070227883
2007-10-04

SYSTEMS AND METHODS FOR A HELIUM ION PUMP

 #114
20070221843
2007-09-27

Ion sources, systems and methods

 #115
20070215802
2007-09-20

Systems and methods for a gas field ion microscope

 #116
20070210251
2007-09-13

Ion sources, systems and methods

 #117
20070210250
2007-09-13

Ion sources, systems and methods

 #118
20070205375
2007-09-06

Ion sources, systems and methods

 #119
20070194251
2007-08-23

Ion sources, systems and methods

 #120
20070194226
2007-08-23

Ion sources, systems and methods

 #121
20070187621
2007-08-16

Ion sources, systems and methods

 #122
20070158582
2007-07-12

Ion sources, systems and methods

 #123
20070158581
2007-07-12

Ion sources, systems and methods

 #124
20070158580
2007-07-12

Ion sources, systems and methods

 #125
20070158558
2007-07-12

Ion sources, systems and methods

 #126
20070158557
2007-07-12

Ion sources, systems and methods

 #127
20070158556
2007-07-12

Ion sources, systems and methods

 #128
20070158555
2007-07-12

Ion sources, systems and methods

 #129
20070138388
2007-06-21

Ion sources, systems and methods

 #130
20070051900
2007-03-08

Atomic level ion source and method of manufacture and operation

 #131
20060284092
2006-12-21

Scanning transmission ion microscope

 #132
20060284091
2006-12-21

Transmission ion microscope

 #133
20060075626
2006-04-13

Single-atom tip and preparation method thereof

 #134
20050205800
2005-09-22

Flood gun for charge neutralization