H01J2237/082 - CPC Classification Index

#1

20260074138

2026-03-12

ION SOURCE AND OPERATING METHOD THEREOF

#2

20250174424

2025-05-29

ION GENERATOR AND ION IMPLANTER

#3

20240079199

2024-03-07

Ion generator and ion implanter

#4

20240006146

2024-01-04

ION MICROSCOPE

#5

20230280293

2023-09-07

SYSTEM AND METHOD FOR ALIGNING ELECTRON BEAMS IN MULTI-BEAM INSPECTION APPARATUS

#6

20220301808

2022-09-22

Ion generator and ion implanter

#7

20220285123

2022-09-08

Ion gun and ion milling machine

#8

20220115236

2022-04-14

METHOD AND APPARATUS TO ELIMINATE CONTAMINANT PARTICLES FROM AN ACCELERATED NEUTRAL ATOM BEAM AND THEREBY PROTECT A BEAM TARGET

#9

20220005666

2022-01-06

Time-dependent defect inspection apparatus

#10

20210257180

2021-08-19

Dynamic electron impact ion source

#11

20200303153

2020-09-24

Ion generator and ion implanter

#12

20200211822

2020-07-02

Ionization chamber chip for a nano-aperture ion source, method of fabrication thereof, and a proton beam writing system

#13

20200124546

2020-04-23

System and method for aligning electron beams in multi-beam inspection apparatus

#14

20200083048

2020-03-12

Method and apparatus to eliminate contaminant particles from an accelerated neutral atom beam and thereby protect a beam target

#15

20200075287

2020-03-05

Time-dependent defect inspection apparatus

#16

20200066476

2020-02-27

Ion source device

#17

20200020502

2020-01-16

Dynamic electron impact ion source

#18

20190237291

2019-08-01

Ion milling device, ion source, and ion milling method

#19

20190189387

2019-06-20

Dynamic temperature control of an ion source

#20

20190096631

2019-03-28

Electron beam image acquisition apparatus, and electron beam image acquisition method

#21

20190051486

2019-02-14

Positive and negative ion source based on radio-frequency inductively coupled discharge

#22

20180374683

2018-12-27

Filament, ionization chamber, and ion-implantation apparatus

#23

20180247784

2018-08-30

Compact ion beam sources formed as modular ionizer

#24

20180218875

2018-08-02

Innovative source assembly for ion beam production

#25

20180211807

2018-07-26

Collision ionization source

#26

20180138008

2018-05-17

Ion source

#27

20180040450

2018-02-08

Method and device for the production of highly charged ions

#28

20170338075

2017-11-23

Ion implantation processes and apparatus

#29

20170221671

2017-08-03

Ion milling device, ion source and ion milling method

#30

20170053776

2017-02-23

Apparatus and method for generating high current negative hydrogen ion beam

#31

20160104599

2016-04-14

Multi species ion source

#32

20150187450

2015-07-02

Cold stripper for high energy ion implanter with tandem accelerator

#33

20150179393

2015-06-25

Reduced trace metals contamination ion source for an ion implantation system

#34

20140319346

2014-10-30

Inspection system by charged particle beam and method of manufacturing devices using the system

#35

20140184074

2014-07-03

Ion source using field emitter array cathode and electromagnetic confinement

#36

20140151572

2014-06-05

Gas mixture method and apparatus for generating ion beam

#37

20140110598

2014-04-24

Ion source device and method for providing ion source

#38

20140062286

2014-03-06

Ion generation method and ion source

#39

20140001372

2014-01-02

Multi species ion source

#40

20130270454

2013-10-17

System and method of ion beam source for semiconductor ion implantation

#41

20130240753

2013-09-19

Ion Source and Ion Implanter Including the Same

#42

20130137250

2013-05-30

Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation

#43

20120104273

2012-05-03

Ion source and a method of generating an ion beam using an ion source

#44

20120076475

2012-03-29

Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions

#45

20120058252

2012-03-08

Ion source cleaning in semiconductor processing systems

#46

20120032079

2012-02-09

Inspection system by charged particle beam and method of manufacturing devices using the system

#47

20120013249

2012-01-19

Ion source

#48

20110259366

2011-10-27

ION SOURCE CLEANING IN SEMICONDUCTOR PROCESSING SYSTEMS

#49

20110226969

2011-09-22

Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions

#50

20110156570

2011-06-30

Cathode ion source

#51

20110104830

2011-05-05

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

#52

20110101237

2011-05-05

Carbon ion generating device and tumor treatment apparatus using the same

#53

20110065268

2011-03-17

Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation

#54

20110018423

2011-01-27

INDIRECT HEATED CATHODE OF ION IMPLANTER

#55

20100327190

2010-12-30

Ion implantation apparatus and a method

#56

20100327181

2010-12-30

Ion implantation apparatus

#57

20100320395

2010-12-23

External cathode ion source

#58

20100207529

2010-08-19

Closed drift ion source

#59

20100148089

2010-06-17

Ion implantation ion source, system and method

#60

20100148088

2010-06-17

Techniques for providing a multimode ion source

#61

20100140495

2010-06-10

Cathode having electron production and focusing grooves, ion source and related method

#62

20090314958

2009-12-24

Methods for implanting B22Hx and its ionized lower mass byproducts

#63

20090309041

2009-12-17

Techniques for providing a multimode ion source

#64

20090289197

2009-11-26

Gas delivery system for an ion source

#65

20090283695

2009-11-19

Multi mode ion source

#66

20090243490

2009-10-01

Unbalanced ion source

#67

20090242793

2009-10-01

Flexible ion source

#68

20090212232

2009-08-27

Ion source and ion implantation apparatus

#69

20090211896

2009-08-27

Cathode and counter-cathode arrangement in an ion source

#70

20090183679

2009-07-23

ION SOURCE GAS REACTOR

#71

20090166554

2009-07-02

Techniques for providing a multimode ion source

#72

20090114841

2009-05-07

Double plasma ion source

#73

20090090872

2009-04-09

Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions

#74

20090078890

2009-03-26

Ion source, ion implantation apparatus, and ion implantation method

#75

20090050822

2009-02-26

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

#76

20090039262

2009-02-12

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

#77

20090032708

2009-02-05

Inspection system by charged particle beam and method of manufacturing devices using the system

#78

20090014667

2009-01-15

External cathode ion source

#79

20090001281

2009-01-01

Cathode having electron production and focusing grooves, ion source and related method

#80

20080308729

2008-12-18

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

#81

20080305598

2008-12-11

ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING BY THE IMPLANTATION OF IONS DERIVED FROM CARBORANE MOLECULAR SPECIES

#82

20080302963

2008-12-11

Sheet beam-type testing apparatus

#83

20080248636

2008-10-09

Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation

#84

20080230713

2008-09-25

Ion source arc chamber seal

#85

20080179545

2008-07-31

Technique for improving the performance and extending the lifetime of an ion source with gas dilution

#86

20080173815

2008-07-24

Electron beam apparatus and device production method using the electron beam apparatus

#87

20080135753

2008-06-12

Ion implanter

#88

20080121804

2008-05-29

Method for inspecting substrate, substrate inspecting system and electron

#89

20080087219

2008-04-17

Dual mode ion source for ion implantation

#90

20080078957

2008-04-03

Methods for beam current modulation by ion source parameter modulation

#91

20080078955

2008-04-03

Methods for rapidly switching off an ion beam

#92

20080073559

2008-03-27

Controlling the flow of vapors sublimated from solids

#93

20080067412

2008-03-20

Ion source

#94

20080042580

2008-02-21

Dual mode ion source for ion implantation

#95

20080042060

2008-02-21

Inspection system by charged particle beam and method of manufacturing devices using the system

#96

20070278417

2007-12-06

ION IMPLANTATION ION SOURCE, SYSTEM AND METHOD

#97

20070272859

2007-11-29

Electron beam apparatus and device production method using the electron beam apparatus

#98

20070262263

2007-11-15

Particle-optical apparatus equipped with a gas ion source

#99

20070262262

2007-11-15

Ion implantation ion source, system and method

#100

20070235644

2007-10-11

Inspection system by charged particle beam and method of manufacturing devices using the system

#101

20070194235

2007-08-23

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

#102

20070181830

2007-08-09

Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions

#103

20070176115

2007-08-02

Ion implantation system and control method

#104

20070176114

2007-08-02

Ion implantation system and control method

#105

20070170372

2007-07-26

Dual mode ion source for ion implantation

#106

20070108394

2007-05-17

Dual mode ion source for ion implantation

#107

20070107841

2007-05-17

Ion implantation ion source, system and method

#108

20070089833

2007-04-26

Method of operating ion source and ion implanting apparatus

#109

20070075266

2007-04-05

Ion source element, ion implanter having the same and method of modifying the same

#110

20070057186

2007-03-15

Inspection system by charged particle beam and method of manufacturing devices using the system

#111

20070045570

2007-03-01

Technique for improving ion implanter productivity

#112

20070045536

2007-03-01

Method for inspecting substrate, substrate inspecting system and electron beam apparatus

#113

20070018101

2007-01-25

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

#114

20060238133

2006-10-26

Ion implantation system and control method

#115

20060169915

2006-08-03

Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms

#116

20060138343

2006-06-29

Sheet beam-type testing apparatus

#117

20060097645

2006-05-11

Dual mode ion source for ion implantation

#118

20060060797

2006-03-23

Ion implanters having an arc chamber that affects ion current density

#119

20060030134

2006-02-09

Ion sources and ion implanters and methods including the same

#120

20050269520

2005-12-08

Ion implantation ion source, system and method

#121

20050253084

2005-11-17

Ion generation apparatus used in ion implanter

#122

20050205800

2005-09-22

Flood gun for charge neutralization

#123

20050194550

2005-09-08

Gas flow restricting cathode system for ion implanter and related method

#124

20050181584

2005-08-18

Ion implantation

#125

20050173651

2005-08-11

Cathode and counter-cathode arrangement in an ion source

#126

20050133738

2005-06-23

Ion source and ion implanter having the same

#127

20050121611

2005-06-09

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

#128

20050092921

2005-05-05

Sheet beam-type inspection apparatus

#129

20050051096

2005-03-10

Ion implantation ion source, system and method

#130

15885286

2019-04-23

Ion beam source for semiconductor ion implantation