ION SOURCE HEAD AND ION SOURCE HEAD CURVED LINER, DEFLECTOR, OR REPELLER

SPLIT RING RESONATOR ION BEAM SOURCE

Beam Plasma Source

LASER SYSTEM AND METHOD FOR GENERATING SECONDARY RADIATION THROUGH INTERACTION OF A PRIMARY LASER BEAM WITH A TARGET MATERIAL

ION EXTRACTION OPTICS FOR ION PROCESSING SYSTEM

DUAL CATHODE TEMPERATURE-CONTROLLED MULTI-CATHODE ION SOURCE

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CLEANING ELECTRODE ASSEMBLY

ION IMPLANTATION SYSTEM AND RELATED METHODS

ION SOURCE HEAD AND ION SOURCE HEAD CURVED LINER, DEFLECTOR, OR REPELLER

Ion milling device

Composite ion source based upon heterogeneous metal-metal fluoride system

Device to control uniformity of extracted ion beam

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING STACKED WIRING STRUCTURE, AND ION BEAM IRRADIATION APPARATUS

Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly

Single beam plasma source

HYDROGEN CO-GAS WHEN USING A CHLORINE-BASED ION SOURCE MATERIAL

Ion beam lithography method based on ion beam lithography system

Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly

GeH/Ar plasma chemistry for ion implant productivity enhancement

Ion source with tubular cathode

GeH/Ar plasma chemistry for ion implant productivity enhancement

Uniaxial counter-propagating monolaser atom trap

Device and method for generating organic molecular cluster ion beam

Method for ion mass separation and ion energy control in process plasmas

Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly

High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture

Negative ribbon ion beams from pulsed plasmas

Light bath for particle suppression

Boron-containing dopant compositions, systems and methods of use thereof for improving ion beam current and performance during boron ion implantation

Resonant enhancement of photoionization of gaseous atoms

Boron-containing dopant compositions, systems and methods of use thereof for improving ion beam current and performance during boron ion implantation

Charged particle beam system and method of operating a charged particle beam system

Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly

Rotatable targeting magnet apparatus and method of use thereof in conjunction with a charged particle cancer therapy system

Fast magnet method and apparatus used in conjunction with a charged particle cancer therapy system

Ion source method and apparatus used in conjunction with a charged particle cancer therapy system

Cancer surface searing apparatus and method of use thereof

Plasma source for a focused ion beam system

Ion source of an ion implanter

Method for Uninterrupted Production of a Polyatomic Boron Molecular Ion Beam with Self-Cleaning

Ion implantation based emitter profile engineering via process modifications

Ion source, nanofabrication apparatus comprising such source, and a method for emitting ions

Inductively Coupled Plasma ION Source Chamber with Dopant Material Shield

Excited gas injection for ion implant control

Ion source, heavy particle beam irradiation apparatus, ion source driving method, and heavy particle beam irradiation method

Microplasma ion source for focused ion beam applications

Magnetically enhanced, inductively coupled plasma source for a focused ion beam system

Method of Anion Production from Atoms and Molecules

Plasma source for charged particle beam system

Charged particle source from a photoionized cold atom beam

Method of ionization

ION ACCELERATION METHOD, ION ACCELERATION APPARATUS, ION BEAM IRRADIATION APPARATUS, AND ION BEAM IRRADIATION APPARATUS FOR MEDICAL USE

Charged particle beam system having multiple user-selectable operating modes

Compact RF antenna for an inductively coupled plasma ion source

Plasma igniter for an inductively coupled plasma ion source

Small form factor plasma source for high density wide ribbon ion beam generation

Ion source with independent power supplies

Plasma igniter for an inductively coupled plasma ion source

Method and system for increasing beam current above a maximum energy for a charge state

Charged particle beam system having multiple user-selectable operating modes

Magnetically enhanced, inductively coupled plasma source for a focused ion beam system

Conjugated ICP and ECR plasma sources for wide ribbon ion beam generation and control

Ion implantation ion source, system and method

Excited gas injection for ion implant control

Device for the field emission of particles and production method

Electrospray deposition: devices and methods thereof

Spin polarized ion beam generation apparatus and scattering spectroscopy apparatus using the spin polarized ion beam and specimen processing apparatus

Electron spectroscopy

CAPILLARITRON ION BEAM SPUTTERING SYSTEM AND THIN FILM PRODUCTION METHOD

Method and apparatus for generating ion beam

Systems and methods for the production of highly tetrahedral amorphous carbon coatings

Focused ion beam field source

SINGLE WAFER IMPLANTER FOR SILICON-ON-INSULATOR WAFER FABRICATION

Elevated temperature RF ion source

Focused negative ion beam field source

Ion doping apparatus, ion doping method, semiconductor device and method of fabricating semiconductor device

Ion source and method for operating same

ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING BY THE IMPLANTATION OF IONS DERIVED FROM CARBORANE MOLECULAR SPECIES

Magneto-optical trap ion source

Charged particle-beam processing using a cluster source

Multivalent ion generating source and charged particle beam apparatus using such ion generating source

Dual mode ion source for ion implantation

Charged particle beam device with a gas field ion source and a gas supply system

Dual mode ion source for ion implantation

Magnetically enhanced, inductively coupled plasma source for a focused ion beam system

Ion implantation ion source, system and method

Dual mode ion source for ion implantation

Charged particle beam system, semiconductor inspection system, and method of machining sample

Dual mode ion source for ion implantation

Highly tetrahedral amorphous carbon coatings and systems and methods for their production

Highly tetrahedral amorphous carbon coatings and systems and methods for their production

Resonance method for production of intense low-impurity ion beams of atoms and molecules

Systems and methods for the production of highly tetrahedral amorphous carbon coatings

Method, apparatus and system for specimen fabrication by using an ion beam

Ion generation by the temporal control of gaseous dielectric breakdown

Beam plasma source

Dual mode ion source for ion implantation

Ion implantation ion source, system and method

Magnetically enhanced, inductively coupled plasma source for a focused ion beam system

System and method for performing SIMOX implants using an ion shower

Ion implantation ion source, system and method

Ion source with tubular cathode