Automated ion-beam alignment for dual-beam instrument

Ion beam treatment apparatus

Covering material stripping method and stripping device using ion irradiation

Deposition tool for combinatorial thin film material libraries

Gas coupled arc chamber cooling

Method for dual energy implantation for ultra-shallow junction formation of MOS devices

Technique for processing a substrate

Technique for processing a substrate

Semiconductor structure made using improved pseudo-simultaneous multiple ion implantation process

Navigation and sample processing using an ion source containing both low-mass and high-mass species

Gas cluster ion beam system with cleaning apparatus

Method for dual energy implantation for ultra-shallow junction formation of MOS devices

Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzles

Multiple nozzle gas cluster ion beam system

Multiple nozzle gas cluster ion beam processing system and method of operating

Substrate processing apparatus, and magnetic recording medium manufacturing method

Multi-beam ion/electron spectra-microscope

Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample

Apparatus and methods of forming a gas cluster ion beam using a low-pressure source

Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms