Patents-Review.com
ClassID:

206391 ⎘

H01J2237/0822 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Sources; Ion sources Multiple sources

Sub-classes:
Recent Application in this class:
#1
20250087441
2025-03-13

ADJUSTABLE MULTIPLE FILAMENT ION BEAM DEPOSITION SYSTEM

 #2
20230377833
2023-11-23

System and methods for automated processing of multiple samples in a BIB system

 #3
20230352263
2023-11-02

Ion milling device

 #4
20230335375
2023-10-19

Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions

 #5
20210088474
2021-03-25

Ionization for tandem ion mobility spectrometry

 #6
20200194226
2020-06-18

Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions

 #7
20200027696
2020-01-23

Method for operating a plurality of FIB-SEM systems

 #8
20180308658
2018-10-25

Ion beam apparatus

 #9
20180218875
2018-08-02

Innovative source assembly for ion beam production

 #10
20180122618
2018-05-03

Boron implanting using a co-gas

 #11
20180068830
2018-03-08

Boron implanting using a co-gas

 #12
20160196951
2016-07-07

Device manufacturing apparatus and manufacturing method of magnetic device using structure to pass ion beam

 #13
20160163510
2016-06-09

Boron implanting using a co-gas

 #14
20160163509
2016-06-09

Boron implanting using a co-gas

 #15
20160024645
2016-01-28

Ion beam sample preparation and coating apparatus and methods

 #16
20140354149
2014-12-04

Apparatus for generating a hollow cathode arc discharge plasma

 #17
20130082189
2013-04-04

PRE-ALIGNED MULTI-BEAM NOZZLE/SKIMMER MODULE

 #18
20110140005
2011-06-16

Ion implanting system

 #19
20100193472
2010-08-05

Multiple nozzle gas cluster ion beam processing system and method of operating

 #20
20100096568
2010-04-22

Substrate processing apparatus and cleaning method of the same

 #21
20100025363
2010-02-04

Substrate processing apparatus, and magnetic recording medium manufacturing method

 #22
20090114838
2009-05-07

Focused ion beam field source

 #23
20070262271
2007-11-15

Ribbon beam ion implanter cluster tool

 #24
20070045570
2007-03-01

Technique for improving ion implanter productivity

 #25
20070023701
2007-02-01

Device and method for milling of material using ions

 #26
20060022148
2006-02-02

Device and method for milling of material using ions