206403 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Lenses electrostatic characterised by shape
Sub-classes:ELECTROSTATIC FILTER WITH SHAPED ELECTRODES
#2Multiple electron beam inspection apparatus with through-hole with spiral shape
#3Multi-beam electron characterization tool with telecentric illumination
#4Ion beam line
#5Cylindrical multi-reflecting time-of-flight mass spectrometer
#6High-energy ion implanter, beam collimator, and beam collimation method
#7Apparatus for treating ion beam
#8Projection lens arrangement
#9Focused charged particle column for operation at different beam energies at a target
#10Electrostatic lens for charged particle radiation
#11Electron microscope
#12Multiple beam charged particle optical system
#13Method and apparatus for controlling an asymmetric electrostatic lens about a central ray trajectory of an ion beam
#14Projection lens arrangement
#15Multiple beam charged particle optical system
#16Multiple beam charged particle optical system
#17Electrostatic corrector
#18Charged particle extraction device and method of design there for
#19Enhanced integrity projection lens assembly
#20MULTIPOLE LENS FOR ELECTRON COLUMN
#21Charged particle extraction device and method of design there for
#22PROJECTION LENS ARRANGEMENT
#23Projection lens arrangement
#24Electrostatic lens assembly
#25Column simultaneously focusing a particle beam and an optical beam
#26Multi-purpose electrostatic lens for an ion implanter system
#27Electric field lens and ion implanter having the same
#28Multiple beam charged particle optical system
#29Technique for shaping a ribbon-shaped ion beam
#30Multiple lens assembly and charged particle beam device comprising the same
#31Column simultaneously focusing a particle beam and an optical beam
#32Charged particle beam apparatus
#33Focused ion beam apparatus
#34Ion implanter electrodes