206404 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Lenses electrostatic characterised by shape Annular electrodes
AXIALLY PROGRESSIVE LENS FOR TRANSPORTING CHARGED PARTICLES
#2Vacuum chamber arrangement for charged particle beam generator
#3Axially progressive lens for transporting charged particles
#4Vacuum chamber arrangement for charged particle beam generator
#5Particle beam system for adjusting the current of individual particle beams
#6Objective lens arrangement usable in particle-optical systems
#7Vacuum chamber arrangement for charged particle beam generator
#8Objective lens arrangement usable in particle-optical systems
#9Vacuum chamber arrangement for charged particle beam generator
#10Multi-electrode stack arrangement
#11Multi-electrode cooling arrangement
#12Multi-electrode electron optics
#13Particle-Optical Component
#14Electronic optical lens barrel and production method therefor