ClassID:

206407

H01J2237/141 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Lenses magnetic; Constructional details Coils

Recent Application in this class:
#1
20260094783
2026-04-02

MULTIPLE PARTICLE BEAM SYSTEM, IN PARTICULAR MULTI-BEAM PARTICLE MICROSCOPE, HAVING A FAST MAGNETIC LENS AND THE USE THEREOF

#2
20250379030
2025-12-11

PARTICLE BEAM SYSTEM

#3
20250316439
2025-10-09

PROTECTING A DETECTOR WHILE DISCHARGING A REGION OF A SAMPLE

#4
20250232951
2025-07-17

PARTICLE BEAM SYSTEM

#5
20250046563
2025-02-06

MAGNETIC FOCUSING DEVICE LOW ENERGY ION BEAMS

#6
20250006453
2025-01-02

MAGNETIC LENSES, CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE SAME, AND ASSOCIATED METHODS

#7
20240429016
2024-12-26

MAGNETIC VECTOR POTENTIAL-BASED LENS

#8
20240371597
2024-11-07

MULTIPOLE ELEMENT, IMAGE ERROR CORRECTOR AND PARTICLE BEAM SYSTEM

#9
20240304410
2024-09-12

ELECTRON BEAM MICROSCOPE

#10
20240212968
2024-06-27

LENS FOR A CHARGED PARTICLE BEAM APPARATUS, CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF FOCUSING A CHARGED PARTICLE BEAM

#11
20230170186
2023-06-01

Plasma processing apparatus and method for using plasma processing apparatus

#12
20230119010
2023-04-20

Linear accelerator coil including multiple fluid channels

#13
20230005704
2023-01-05

Scanning electron microscope device and electron beam inspection apparatus

#14
20220319798
2022-10-06

Electron beam application apparatus

#15
20220270844
2022-08-25

Multipole unit and charged particle beam device

#16
20220230836
2022-07-21

Charged particle beam manipulation device and method for manipulating charged particle beamlets

#17
20220216028
2022-07-07

CATHODOLUMINESCENCE ELECTRON MICROSCOPE

#18
20220208522
2022-06-30

PLASMA JET SOLID ABLATION-BASED DIRECT ANALYSIS APPARATUS

#19
20220199353
2022-06-23

Magnetic field free sample plane for charged particle microscope

#20
20220068589
2022-03-03

CHARGED PARTICLE SOURCE

#21
20210327770
2021-10-21

Electron beam system for inspection and review of 3D devices

#22
20210313140
2021-10-07

Charged particle beam device

#23
20210142980
2021-05-13

Particle beam system

#24
20200381206
2020-12-03

Particle-optical apparatus and particle beam system

#25
20200335298
2020-10-22

Current source apparatus and method

#26
20200251304
2020-08-06

Charged particle beam device

#27
20200243297
2020-07-30

Deflector and charged particle beam system

#28
20200243296
2020-07-30

Objective lens arrangement usable in particle-optical systems

#29
20200219697
2020-07-09

Charged particle beam apparatus

#30
20200168431
2020-05-28

Charged particle beam apparatus and control method of charged particle beam apparatus

#31
20200126753
2020-04-23

Charged particle source

#32
20200090903
2020-03-19

Charged particle beam device

#33
20190311879
2019-10-10

Focusing magnet and charged particle irradiation apparatus

#34
20190311878
2019-10-10

Focusing magnet and charged particle irradiation apparatus

#35
20190295808
2019-09-26

Magnetic lens and exciting current control method

#36
20190295807
2019-09-26

Charged particle beam axial alignment device, charged particle beam irradiation device and charged particle beam axial alignment method

#37
20190295806
2019-09-26

Charged particle beam axial alignment device, charged particle beam irradiation device and charged particle beam axial alignment method

#38
20190172676
2019-06-06

Charged particle beam apparatus and method for adjusting imaging conditions for the same

#39
20190096632
2019-03-28

CHARGED PARTICLE BEAM IRRADIATION APPARATUS AND METHOD FOR REDUCING ELECTRIFICATION OF SUBSTRATE

#40
20190057833
2019-02-21

Charged particle source

#41
20180342366
2018-11-29

Charged particle beam writing method and charged particle beam writing apparatus

#42
20180286625
2018-10-04

Particle-optical apparatus and particle beam system

#43
20180269030
2018-09-20

Scanning transmission electron microscope with an objective electromagnetic lens and a method of use thereof

#44
20170323760
2017-11-09

Multicolumn charged particle beam exposure apparatus

#45
20170294287
2017-10-12

Objective lens arrangement usable in particle-optical systems

#46
20170125204
2017-05-04

Charged particle source

#47
20170125203
2017-05-04

Charged particle source

#48
20170125202
2017-05-04

Charged particle source

#49
20170007848
2017-01-12

Particle beam treatment system with solenoid magnets

#50
20160225576
2016-08-04

Multipole lens and charged particle beam system

#51
20160181054
2016-06-23

OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS

#52
20160163500
2016-06-09

Charged particle source

#53
20160064180
2016-03-03

Apparatus of plural charged particle beams with multi-axis magnetic lenses

#54
20160042911
2016-02-11

Desktop electron microscope and combined round-multipole magnetic lens thereof

#55
20160042910
2016-02-11

Desktop electron microscope and wide range tunable magnetic lens thereof

#56
20150294833
2015-10-15

Charged particle beam apparatus

#57
20150060662
2015-03-05

Apparatus of plural charged particle beams with multi-axis magnetic lens

#58
20120037813
2012-02-16

Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens

#59
20100051806
2010-03-04

Charged particle beam apparatus

#60
20090159810
2009-06-25

Particle-Optical Component

#61
20090084975
2009-04-02

Multipole coils

#62
20090079531
2009-03-26

Multipole coils

#63
20080135755
2008-06-12

Scanning electron microscope

#64
20070187619
2007-08-16

Electromagnet with active field containment

#65
20070181832
2007-08-09

Controlling the characteristics of implanter ion-beams

#66
20070023697
2007-02-01

Controlling the characteristics of implanter ion-beams

#67
20060169924
2006-08-03

Controlling the characteristics of implanter ion-beams

#68
20060151698
2006-07-13

Charged particle beam apparatus

#69
20060043311
2006-03-02

Thermal compensation in magnetic field influencing of an electron beam

#70
20050242294
2005-11-03

Controlling the characteristics of implanter ion-beams

#71
20050035292
2005-02-17

Charged particle deflecting system