206407 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Lenses magnetic; Constructional details Coils
MULTIPLE PARTICLE BEAM SYSTEM, IN PARTICULAR MULTI-BEAM PARTICLE MICROSCOPE, HAVING A FAST MAGNETIC LENS AND THE USE THEREOF
#2PARTICLE BEAM SYSTEM
#3PROTECTING A DETECTOR WHILE DISCHARGING A REGION OF A SAMPLE
#4PARTICLE BEAM SYSTEM
#5MAGNETIC FOCUSING DEVICE LOW ENERGY ION BEAMS
#6MAGNETIC LENSES, CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE SAME, AND ASSOCIATED METHODS
#7MAGNETIC VECTOR POTENTIAL-BASED LENS
#8MULTIPOLE ELEMENT, IMAGE ERROR CORRECTOR AND PARTICLE BEAM SYSTEM
#9ELECTRON BEAM MICROSCOPE
#10LENS FOR A CHARGED PARTICLE BEAM APPARATUS, CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF FOCUSING A CHARGED PARTICLE BEAM
#11Plasma processing apparatus and method for using plasma processing apparatus
#12Linear accelerator coil including multiple fluid channels
#13Scanning electron microscope device and electron beam inspection apparatus
#14Electron beam application apparatus
#15Multipole unit and charged particle beam device
#16Charged particle beam manipulation device and method for manipulating charged particle beamlets
#17CATHODOLUMINESCENCE ELECTRON MICROSCOPE
#18PLASMA JET SOLID ABLATION-BASED DIRECT ANALYSIS APPARATUS
#19Magnetic field free sample plane for charged particle microscope
#20CHARGED PARTICLE SOURCE
#21Electron beam system for inspection and review of 3D devices
#22Charged particle beam device
#23Particle beam system
#24Particle-optical apparatus and particle beam system
#25Current source apparatus and method
#26Charged particle beam device
#27Deflector and charged particle beam system
#28Objective lens arrangement usable in particle-optical systems
#29Charged particle beam apparatus
#30Charged particle beam apparatus and control method of charged particle beam apparatus
#31Charged particle source
#32Charged particle beam device
#33Focusing magnet and charged particle irradiation apparatus
#34Focusing magnet and charged particle irradiation apparatus
#35Magnetic lens and exciting current control method
#36Charged particle beam axial alignment device, charged particle beam irradiation device and charged particle beam axial alignment method
#37Charged particle beam axial alignment device, charged particle beam irradiation device and charged particle beam axial alignment method
#38Charged particle beam apparatus and method for adjusting imaging conditions for the same
#39CHARGED PARTICLE BEAM IRRADIATION APPARATUS AND METHOD FOR REDUCING ELECTRIFICATION OF SUBSTRATE
#40Charged particle source
#41Charged particle beam writing method and charged particle beam writing apparatus
#42Particle-optical apparatus and particle beam system
#43Scanning transmission electron microscope with an objective electromagnetic lens and a method of use thereof
#44Multicolumn charged particle beam exposure apparatus
#45Objective lens arrangement usable in particle-optical systems
#46Charged particle source
#47Charged particle source
#48Charged particle source
#49Particle beam treatment system with solenoid magnets
#50Multipole lens and charged particle beam system
#51OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS
#52Charged particle source
#53Apparatus of plural charged particle beams with multi-axis magnetic lenses
#54Desktop electron microscope and combined round-multipole magnetic lens thereof
#55Desktop electron microscope and wide range tunable magnetic lens thereof
#56Charged particle beam apparatus
#57Apparatus of plural charged particle beams with multi-axis magnetic lens
#58Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens
#59Charged particle beam apparatus
#60Particle-Optical Component
#61Multipole coils
#62Multipole coils
#63Scanning electron microscope
#64Electromagnet with active field containment
#65Controlling the characteristics of implanter ion-beams
#66Controlling the characteristics of implanter ion-beams
#67Controlling the characteristics of implanter ion-beams
#68Charged particle beam apparatus
#69Thermal compensation in magnetic field influencing of an electron beam
#70Controlling the characteristics of implanter ion-beams
#71Charged particle deflecting system