206524 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Tubes for localised analysis using electron or ion beams characterised by their application; Secondary particles mass or energy spectrometry Ions [SIMS]
Methods and systems including pulsed dual-beam charge neutralization
#2Multiple beam secondary ion mass spectrometry device
#3Ion source, ion gun, and analysis instrument
#4Image processing method
#5Surface analyzer of object to be measured and analyzing method
#6Apparatus for transmission of energy and/or for transportation of an ion as well as a particle beam device having an apparatus such as this
#7Multi-beam ion/electron spectra-microscope
#8Method and apparatus for crystal analysis