206526 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Tubes for localised analysis using electron or ion beams characterised by their application Low energy electron microscopy [LEEM]
Sub-classes:Particle beam device and method for operating a particle beam device
#2SPHERICAL ABERRATION CORRECTION DECELERATING LENS, SPHERICAL ABERRATION CORRECTION LENS SYSTEM, ELECTRON SPECTROMETER, AND PHOTOELECTRON MICROSCOPE
#3Electron Microscope And Electron Beam Inspection System
#4Aberration-correcting cathode lens microscopy instrument
#5Energy-filtering cathode lens microscopy instrument
#6INSPECTION INSTRUMENT OF A MAGNETIC SPECIMEN
#7Electron microscope and electron bean inspection system.
#8Charged particle beam device for high spatial resolution and multiple perspective imaging
#9Charged-particle-beam mapping projection-optical systems and methods for adjusting same
#10Electron microscope and a method of imaging objects
#11System and method for evaluation using electron beam and manufacture of devices
#12Focusing system and method for a charged particle imaging system
#13Electron microscope
#14Electron microscope and electron beam inspection system
#15Low vacuum scanning electron microscope
#16Sample surface inspection method and inspection system
#17Beam separator device, charged particle beam device and methods of operating thereof