206527 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Tubes for localised analysis using electron or ion beams characterised by their application; Low energy electron microscopy [LEEM] Diffraction [LEED]
Sub-classes:Method of performing electron diffraction pattern analysis upon a sample
#2Image type electron spin polarimeter
#3Aberration-correcting cathode lens microscopy instrument
#4Energy-filtering cathode lens microscopy instrument
#5Method and apparatus for measuring the physical properties of micro region