206554 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion microscopes; Scanning microscopes characterised by the imaging method X-rays
Charged Particle Beam Apparatus and Image Production Method
#23D METROLOGY FROM 3D DATACUBE CREATED FROM STACK OF REGISTERED IMAGES OBTAINED DURING DELAYERING OF THE SAMPLE
#33D metrology from 3D datacube created from stack of registered images obtained during delayering of the sample
#4Semiconductor Analysis System
#5Method and apparatus for inspecting a sample by means of multiple charged particle beamlets
#6Method and system for determining sample composition from spectral data
#73D metrology from 3D datacube created from stack of registered images obtained during delayering of the sample
#8High-resolution x-ray spectroscopy surface material analysis
#9Charged particle beam apparatus and setting assisting method
#10Apparatus and method for nanoscale X-ray imaging
#11SCANNING ELECTRON MICROSCOPE
#12Nondestructive sample imaging
#13Systems and methods for in situ high temperature X-ray spectroscopy in electron microscopes
#14Scanning electron microscope and measurement method for obtaining images of a specimen using an ion beam and an electron beam
#15Retractable detector
#16Acquisition and processing of data in a tomographic imaging apparatus
#17Electron microscope and control method
#18Wide field atmospheric scanning electron microscope
#19Statistical analysis in X-ray imaging
#20Cross sectional depth composition generation utilizing scanning electron microscopy
#21Cross sectional depth composition generation utilizing scanning electron microscopy
#22Retractable detector
#23Multi mode system with a dispersion X-ray detector
#24Acquisition and processing of data in a tomographic imaging apparatus
#25INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENVIRONMENT AND A SCANNING ELECTRON MICROSCOPE
#26Method of constructing 3D image, image processor, and electron microscope
#27Notched magnetic lens for improved sample access in an SEM
#28Cross-section processing and observation method and cross-section processing and observation apparatus
#29Scanning ion microscope and secondary particle control method
#30Method and data analysis system for semi-automated particle analysis using a charged particle beam
#31Focused ion beam apparatus, method for observing cross-section of sample by using the same, and storage medium
#32Automated mineral classification
#33Method of performing tomographic imaging of a sample in a charged-particle microscope
#34Cluster analysis of unknowns in SEM-EDS dataset
#35Electron microscope with integrated detector(s)
#36COMBINE APPARATUS OF SCANNING ELECTRON MICROSCOPE AND ENERGY DISPERSIVE X-RAY SPECTROSCOPY
#37X-ray detection system
#38Charged-particle microscopy with occlusion detection
#39Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
#40High collection efficiency X-ray spectrometer system with integrated electron beam stop, electron detector and X-ray detector for use on electron-optical beam lines and microscopes
#41Specimen observation method
#42Electron microscope with integrated detector(s)
#43Method for quantitative analysis of a material
#44System and method for a charged particle beam
#45Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
#46Device and method for analyzing a sample
#47Method and Apparatus for Treating Workpieces
#48In-situ differential spectroscopy
#49Specimen observation method
#50Electronic microscope apparatus
#51System and method for a charged particle beam
#52Specimen observation method
#53Method and apparatus for displaying detected defects
#54Method of adjusting the operating region of a tool component to a pre-determined element
#55Charged-particle beam instrument
#56Method for non-destructive trench depth measurement using electron beam source and X-ray detection
#57Device and method for the examination of samples in a non vacuum environment using a scanning electron microscope
#58Method and system for component analysis of spectral data
#59Scanning charged-particle-beam microscopy with energy-dispersive x-ray spectroscopy