ClassID:

206554

H01J2237/2807 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion microscopes; Scanning microscopes characterised by the imaging method X-rays

Recent Application in this class:
#1
20250391630
2025-12-25

Charged Particle Beam Apparatus and Image Production Method

#2
20250210301
2025-06-26

3D METROLOGY FROM 3D DATACUBE CREATED FROM STACK OF REGISTERED IMAGES OBTAINED DURING DELAYERING OF THE SAMPLE

#3
20230335370
2023-10-19

3D metrology from 3D datacube created from stack of registered images obtained during delayering of the sample

#4
20230055155
2023-02-23

Semiconductor Analysis System

#5
20230020967
2023-01-19

Method and apparatus for inspecting a sample by means of multiple charged particle beamlets

#6
20230003675
2023-01-05

Method and system for determining sample composition from spectral data

#7
20220415610
2022-12-29

3D metrology from 3D datacube created from stack of registered images obtained during delayering of the sample

#8
20220254598
2022-08-11

High-resolution x-ray spectroscopy surface material analysis

#9
20220028653
2022-01-27

Charged particle beam apparatus and setting assisting method

#10
20210151288
2021-05-20

Apparatus and method for nanoscale X-ray imaging

#11
20210042943
2021-02-11

SCANNING ELECTRON MICROSCOPE

#12
20190311881
2019-10-10

Nondestructive sample imaging

#13
20190242836
2019-08-08

Systems and methods for in situ high temperature X-ray spectroscopy in electron microscopes

#14
20190228948
2019-07-25

Scanning electron microscope and measurement method for obtaining images of a specimen using an ion beam and an electron beam

#15
20190189391
2019-06-20

Retractable detector

#16
20190187306
2019-06-20

Acquisition and processing of data in a tomographic imaging apparatus

#17
20180330917
2018-11-15

Electron microscope and control method

#18
20180226221
2018-08-09

Wide field atmospheric scanning electron microscope

#19
20180204647
2018-07-19

Statistical analysis in X-ray imaging

#20
20180158649
2018-06-07

Cross sectional depth composition generation utilizing scanning electron microscopy

#21
20180151330
2018-05-31

Cross sectional depth composition generation utilizing scanning electron microscopy

#22
20180012728
2018-01-11

Retractable detector

#23
20170213697
2017-07-27

Multi mode system with a dispersion X-ray detector

#24
20170052264
2017-02-23

Acquisition and processing of data in a tomographic imaging apparatus

#25
20160155606
2016-06-02

INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENVIRONMENT AND A SCANNING ELECTRON MICROSCOPE

#26
20160079031
2016-03-17

Method of constructing 3D image, image processor, and electron microscope

#27
20150279610
2015-10-01

Notched magnetic lens for improved sample access in an SEM

#28
20150262788
2015-09-17

Cross-section processing and observation method and cross-section processing and observation apparatus

#29
20150048247
2015-02-19

Scanning ion microscope and secondary particle control method

#30
20150046097
2015-02-12

Method and data analysis system for semi-automated particle analysis using a charged particle beam

#31
20140291508
2014-10-02

Focused ion beam apparatus, method for observing cross-section of sample by using the same, and storage medium

#32
20140117231
2014-05-01

Automated mineral classification

#33
20140070095
2014-03-13

Method of performing tomographic imaging of a sample in a charged-particle microscope

#34
20140001356
2014-01-02

Cluster analysis of unknowns in SEM-EDS dataset

#35
20130299698
2013-11-14

Electron microscope with integrated detector(s)

#36
20130070900
2013-03-21

COMBINE APPARATUS OF SCANNING ELECTRON MICROSCOPE AND ENERGY DISPERSIVE X-RAY SPECTROSCOPY

#37
20120292508
2012-11-22

X-ray detection system

#38
20120292503
2012-11-22

Charged-particle microscopy with occlusion detection

#39
20120241608
2012-09-27

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

#40
20120160999
2012-06-28

High collection efficiency X-ray spectrometer system with integrated electron beam stop, electron detector and X-ray detector for use on electron-optical beam lines and microscopes

#41
20120138795
2012-06-07

Specimen observation method

#42
20110204229
2011-08-25

Electron microscope with integrated detector(s)

#43
20110129066
2011-06-02

Method for quantitative analysis of a material

#44
20100270468
2010-10-28

System and method for a charged particle beam

#45
20100140470
2010-06-10

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

#46
20100059672
2010-03-11

Device and method for analyzing a sample

#47
20090323895
2009-12-31

Method and Apparatus for Treating Workpieces

#48
20090278044
2009-11-12

In-situ differential spectroscopy

#49
20090274359
2009-11-05

Specimen observation method

#50
20090194691
2009-08-06

Electronic microscope apparatus

#51
20080121810
2008-05-29

System and method for a charged particle beam

#52
20080073527
2008-03-27

Specimen observation method

#53
20070194231
2007-08-23

Method and apparatus for displaying detected defects

#54
20070075271
2007-04-05

Method of adjusting the operating region of a tool component to a pre-determined element

#55
20060219914
2006-10-05

Charged-particle beam instrument

#56
20060157649
2006-07-20

Method for non-destructive trench depth measurement using electron beam source and X-ray detection

#57
20060033038
2006-02-16

Device and method for the examination of samples in a non vacuum environment using a scanning electron microscope

#58
17166885
2022-06-28

Method and system for component analysis of spectral data

#59
16532459
2024-09-17

Scanning charged-particle-beam microscopy with energy-dispersive x-ray spectroscopy