206550 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion microscopes; Scanning microscopes characterised by the imaging method
Sub-classes:METHODS OF CROSS-SECTION IMAGING OF AN INSPECTION VOLUME IN A WAFER
#2ELECTRON MICROSCOPE AND IMAGE CAPTURING METHOD THEREOF
#33D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED THROUGHPUT AND ACCURACY
#4FIVE-DIMENSIONAL ELECTRON MICROSCOPE AND ANALYSIS METHOD THEREFOR
#5Entropy based image processing for focused ion beam delayer-edge slices detection
#6METHOD OF PREPARING A SAMPLE FOR TRANSMISSION ELECTRON MICROSCOPY (TEM) ANALYSIS
#7CHARGED PARTICLE OPTICS, CHARGED PARTICLE BEAM APPARATUS, AND METHOD FOR SCANNING A CHARGED PARTICLE BEAM
#8System comprising a multi-beam particle microscope and method for operating the same
#9METHOD OF AUTOMATED DATA ACQUISITION FOR A TRANSMISSION ELECTRON MICROSCOPE
#10Method Of Imaging And Milling A Sample
#11METHOD AND APPARATUS FOR ENERGY SELECTIVE DIRECT ELECTRON IMAGING
#12PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD
#13METHODS OF CROSS-SECTION IMAGING OF AN INSPECTION VOLUME IN A WAFER
#14MULTI-BEAM DIGITAL SCAN AND IMAGE ACQUISITION
#15Systems and methods of determining aberrations in images obtained by a charged-particle beam tool
#16Charged particle beam device
#17Method for measuring CD using scanning electron microscope
#18Charged particle beam system and method for determining observation conditions in charged particle beam device
#19Scintillator for charged particle beam apparatus and charged particle beam apparatus
#20Charged particle beam device
#21Rapid and automatic virus imaging and analysis system as well as methods thereof
#22Super-resolution microscopy
#23Charged-particle beam device and cross-sectional shape estimation program
#24System comprising a multi-beam particle microscope and method for operating the same
#25Image forming method and impedance microscope
#26Image generation method, non-transitory computer-readable medium, and system
#27Charged particle beam device
#28Diffraction pattern detection in a transmission charged particle microscope
#29Cross-section observation device, and control method
#30Methods and apparatus for high throughput SEM and AFM for characterization of nanostructured surfaces
#31Charged particle beam device
#32Specimen observation method
#33Charged particle beam device for imaging vias inside trenches
#34Scanning transmission electron microscope and method of image generation
#35Methods and apparatus for high throughput SEM and AFM for characterization of nanostructured surfaces
#36Electron microscope and control method
#37Scanning electron microscope and sample observation method
#38Wide field atmospheric scanning electron microscope
#39Method of image acquisition and electron microscope
#40Electron microscope and image acquisition method
#41Charged particle beam device
#42STRUCTURE ANALYSIS METHOD USING A SCANNING ELECTRON MICROSCOPE
#43Charged particle system and method for measuring deflection fields in a sample
#44Measurement system and measurement method
#45Circuit tracing using a focused ion beam
#46Measurement method and electron microscope
#47Charged particle beam device
#48Circuit tracing using a focused ion beam
#49System and method for simultaneous detection of secondary electrons and light in a charged particle beam system
#50SMS probe and SEM imaging system and methods of use
#51Protein layers and their use in electron microscopy
#52Automated slice milling for viewing a feature
#53Scanning-electron-microscope image processing device and scanning method
#54Ion beam device
#55Circuit tracing using a focused ion beam
#56Focused ion beam system
#57System and method for simultaneous detection of secondary electrons and light in a charged particle beam system
#58Electron microscope and image capturing method using electron beam
#59Hybrid microprobe for electrochemical and SERS monitoring, scanning and feedback stimulation and the preparation method thereof
#60Charged particle beam device, and image analysis device
#61System and method for localization of large numbers of fluorescent markers in biological samples
#62Scanning electron microscope and sample observation method
#63Signal Processing Method for Charged Particle Beam Device, and Signal Processing Device
#64Method and system for 4D tomography and ultrafast scanning electron microscopy
#65Automated slice milling for viewing a feature
#66Transmission electron microscope
#67Ion beam device
#68Sample inspection methods, systems and components
#69Charged particle beam system
#70Method for characterizing identified defects during charged particle beam inspection and application thereof
#71Protein Layers And Their Use In Electron Microscopy
#72Sample inspection apparatus
#73Method and system for ultrafast photoelectron microscope
#74Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus
#75Method and apparatus for a high-resolution three dimensional confocal scanning transmission electron microscope
#76Method and system for generating and reviewing a thin sample
#77Confocal secondary electron imaging
#78Method and system for ultrafast photoelectron microscope
#79Charged particle beam system
#80Method and sample for radiation microscopy including a particle beam channel formed in the sample source
#81Electron microscope
#82Scanning interference electron microscope
#83System and method for voltage contrast analysis of a wafer
#84Method and system for ultrafast photoelectron microscope