Method and apparatus for inspecting a sample by means of multiple charged particle beamlets

APPARATUS AND METHOD FOR DETECTING ONE OR MORE SCANNING CHARGED PARTICLE BEAMS

CATHODOLUMINESCENCE ELECTRON MICROSCOPE

Time-resolved cathodoluminescence sample probing

Apparatus for wavelength resolved angular resolved cathodoluminescence

System and method for alignment of cathodoluminescence optics

Apparatus and method for inspecting a sample using a plurality of charged particle beams

Apparatus for wavelength resolved angular resolved cathodoluminescence

Combined SEM-CL and FIB-IOE microscopy

Wide field atmospheric scanning electron microscope

Sample chamber device for electron microscope, and electron microscope comprising same

Apparatus and method for inspecting a sample using a plurality of charged particle beams

Sample holder with light emitting and transferring elements for a charged particle beam apparatus

Integrated optical and charged particle inspection apparatus

Holder device for electron microscope

Adjustable cathodoluminescence detection system and microscope employing such a system

Method of analyzing a sample and charged particle beam device for analyzing a sample

Multi-color nanoscale imaging based on nanoparticle cathodoluminescence

SYSTEM AND METHOD FOR MEASURING ANGULAR LUMINESCENCE IN A CHARGED PARTICLE MICROSCOPE

Method and system for improving characteristic peak signals in analytical electron microscopy

Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus

APPARATUS FOR COLLECTION OF CATHODOLUMINESCENCE SIGNALS

SYSTEM AND METHOD FOR SAMPLE ANALYSIS BY THREE DIMENSIONAL CATHODOLUMINESCENCE

Adjustable cathodoluminescence detection system and microscope employing such a system

X-ray detection system

OPTICAL PROBING IN ELECTRON MICROSCOPES

Detection device and particle beam device having a detection device

Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment

Sample inspection apparatus, sample inspection method and sample inspection system

Specimen holder, specimen inspection apparatus, and specimen inspection method

Method and apparatus for simultaneous SEM and optical examination

Inspection method and reagent solution

Apparatus and method for inspecting sample

Specimen holder, specimen inspection apparatus, specimen inspection method, and method of fabricating specimen holder

Particle-optical apparatus for simultaneous observing a sample with particles and photons

Emission detecting analysis system and method of detecting emission on object

SAMPLE ANALYZING APPARATUS

Wafer-level testing of light-emitting resonant structures

Diamond

Sample measuring device

SEM cathodoluminescent imaging using up-converting nanophosphors

Optical reflector and optical collection system