Patents-Review.com
ClassID:

206556 ⎘

H01J2237/2809 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion microscopes; Scanning microscopes characterised by the imaging problems involved

Sub-classes:
Recent Application in this class:
#1
20260094784
2026-04-02

FOIL LENS CORRECTORS, CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE SAME, AND ASSOCIATED METHODS

 #2
20250006456
2025-01-02

CROSS-TALK CANCELLATION IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION

 #3
20240395499
2024-11-28

FIVE-DIMENSIONAL ELECTRON MICROSCOPE AND ANALYSIS METHOD THEREFOR

 #4
20240212108
2024-06-27

SEM IMAGE ENHANCEMENT

 #5
20240177964
2024-05-30

Charged Particle Beam System

 #6
20230162944
2023-05-25

IMAGE ENHANCEMENT BASED ON CHARGE ACCUMULATION REDUCTION IN CHARGED-PARTICLE BEAM INSPECTION

 #7
20230127466
2023-04-27

Device for observing permeation and diffusion path of observation target gas, observation target gas measuring method, point-defect location detecting device, point-defect location detecting method, and observation samples

 #8
20230048580
2023-02-16

APPARATUS FOR AND METHOD OF CONTROL OF A CHARGED PARTICLE BEAM

 #9
20220328282
2022-10-13

Systems and methods of determining aberrations in images obtained by a charged-particle beam tool

 #10
20220319804
2022-10-06

Overlay Measurement System and Overlay Measurement Device

 #11
20220301811
2022-09-22

Cross-talk cancellation in multiple charged-particle beam inspection

 #12
20200312606
2020-10-01

Charged particle beam device

 #13
20200161081
2020-05-21

Using deep learning based defect detection and classification schemes for pixel level image quantification

 #14
20200144022
2020-05-07

Diffraction pattern detection in a transmission charged particle microscope

 #15
20200111638
2020-04-09

Measuring apparatus and method of setting observation condition

 #16
20200066480
2020-02-27

Crystal orientation figure creating device, charged particle beam device, crystal orientation figure creating method, and program

 #17
20190267210
2019-08-29

Method of aberration measurement and electron microscope

 #18
20190237289
2019-08-01

Electron beam apparatus

 #19
20190198284
2019-06-27

ELECTRON SOURCE AND ELECTRON BEAM IRRADIATION DEVICE

 #20
20190172676
2019-06-06

Charged particle beam apparatus and method for adjusting imaging conditions for the same

 #21
20190108970
2019-04-11

Charged particle beam device

 #22
20190066971
2019-02-28

Image generation method

 #23
20190051490
2019-02-14

Charged particle beam device with distance setting between irradiation regions in a scan line

 #24
20190051489
2019-02-14

Specimen observation method

 #25
20180374671
2018-12-27

Sample holder and electron microscope

 #26
20180315670
2018-11-01

Guided scanning electron microscopy metrology based on wafer topography

 #27
20180204706
2018-07-19

Charged particle beam device

 #28
20180190469
2018-07-05

Aberration correction method, aberration correction system, and charged particle beam apparatus

 #29
20180158646
2018-06-07

Method of image acquisition and electron microscope

 #30
20180025887
2018-01-25

Sparse sampling methods and probe systems for analytical instruments

 #31
20170316915
2017-11-02

Charged particle beam apparatus

 #32
20170084423
2017-03-23

Method and system for noise mitigation in a multi-beam scanning electron microscopy system

 #33
20160343540
2016-11-24

Method of improving quality of scanning charged particle microscope image, and scanning charged particle microscope apparatus

 #34
20160322192
2016-11-03

Inspection apparatus

 #35
20160300689
2016-10-13

Scanning transmission electron microscope having multiple beams and post-detection image correction

 #36
20160300688
2016-10-13

Scanning transmission electron microscope having multiple beams and post-detection image correction

 #37
20160282714
2016-09-29

Inspection of a lithographic mask that is protected by a pellicle

 #38
20160282287
2016-09-29

Circuit tracing using a focused ion beam

 #39
20160217967
2016-07-28

Charged particle beam device

 #40
20160203947
2016-07-14

Charged particle beam device and charged particle beam device control method

 #41
20160187419
2016-06-30

Circuit tracing using a focused ion beam

 #42
20160123726
2016-05-05

Method and device for line pattern shape evaluation

 #43
20160020066
2016-01-21

Device and method for computing angular range for measurement of aberrations and electron microscope

 #44
20160019696
2016-01-21

Device and method for computing amount of drift and charged particle beam system

 #45
20150371819
2015-12-24

Measurement and inspection device

 #46
20150348748
2015-12-03

Charged particle beam apparatus

 #47
20150348747
2015-12-03

Charged-particle beam device

 #48
20150228443
2015-08-13

Charged particle beam apparatus

 #49
20150144804
2015-05-28

Charged particle beam apparatus

 #50
20150076339
2015-03-19

SMS probe and SEM imaging system and methods of use

 #51
20150069233
2015-03-12

Sparse sampling and reconstruction for electron and scanning probe microscope imaging

 #52
20150060654
2015-03-05

Charged particle beam device and arithmetic device

 #53
20150053855
2015-02-26

Charged particle beam apparatus and method of correcting landing angle of charged particle beam

 #54
20150041649
2015-02-12

Pattern dimension measuring device, charged particle beam apparatus, and computer program

 #55
20150041644
2015-02-12

Electronic microscope, setting method of observation condition of electronic microscope, and observation method using electronic microscope

 #56
20150028203
2015-01-29

Inspection of a lithographic mask that is protected by a pellicle

 #57
20140353498
2014-12-04

System and method of SEM overlay metrology

 #58
20140319343
2014-10-30

Circuit tracing using a focused ion beam

 #59
20140197310
2014-07-17

Method of analyzing a sample and charged particle beam device for analyzing a sample

 #60
20140158883
2014-06-12

Characterization of nanoscale structures using an ultrafast electron microscope

 #61
20140092231
2014-04-03

Charged particle microscope device and image capturing method

 #62
20140084160
2014-03-27

Photon induced near field electron microscope and biological imaging system

 #63
20130301954
2013-11-14

Charged particle beam device, and image analysis device

 #64
20130174301
2013-07-04

Method and apparatus for in situ preparation of serial planar surfaces for microscopy

 #65
20130094716
2013-04-18

Dual image method and system for generating a multi-dimensional image of a sample

 #66
20130001445
2013-01-03

Phase-shifting element and particle beam device having a phase-shifting element

 #67
20120312986
2012-12-13

Characterization of nanoscale structures using an ultrafast electron microscope

 #68
20120307038
2012-12-06

Charged particle beam apparatus

 #69
20120298865
2012-11-29

Scanning electron microscope

 #70
20120287258
2012-11-15

Electric charged particle beam microscope and electric charged particle beam microscopy

 #71
20120274757
2012-11-01

Charged particle beam device and a method of improving image quality of the same

 #72
20120053892
2012-03-01

Pattern measurement apparatus

 #73
20110292385
2011-12-01

Producing images of a specimen

 #74
20110253893
2011-10-20

Charged particle beam device and a method of operating a charged particle beam device

 #75
20110233402
2011-09-29

Phase-shifting element and particle beam device having a phase-shifting element

 #76
20110220792
2011-09-15

Photon induced near field electron microscope and biological imaging system

 #77
20110001816
2011-01-06

Microstructure inspection method, microstructure inspection apparatus, and microstructure inspection program

 #78
20100320385
2010-12-23

Scanning electron microscope

 #79
20100108883
2010-05-06

Characterization of nanoscale structures using an ultrafast electron microscope

 #80
20100108882
2010-05-06

4D imaging in an ultrafast electron microscope

 #81
20100102223
2010-04-29

Method and device for examining a surface of an object

 #82
20100072365
2010-03-25

Variable rate scanning in an electron microscope

 #83
20090236521
2009-09-24

Method and system for ultrafast photoelectron microscope

 #84
20090133167
2009-05-21

Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus

 #85
20090121152
2009-05-14

Inspection method for semiconductor wafer and apparatus for reviewing defects

 #86
20090050805
2009-02-26

Scanning electron microscope

 #87
20090045335
2009-02-19

Inspection method for semiconductor wafer and apparatus for reviewing defects

 #88
20080296509
2008-12-04

Phase-shifting element and particle beam device having a phase-shifting element

 #89
20080054187
2008-03-06

Charged particle beam scanning method and charged particle beam apparatus

 #90
20080017796
2008-01-24

Method and system for ultrafast photoelectron microscope

 #91
20070221860
2007-09-27

Charged particle beam column

 #92
20070194228
2007-08-23

Charged particle beam device

 #93
20070114462
2007-05-24

Charged particle beam irradiation method and charged particle beam apparatus

 #94
20070114403
2007-05-24

Electron microscope

 #95
20060243907
2006-11-02

Substrate inspection method, manufacturing method of semiconductor device and substrate inspection apparatus

 #96
20060226362
2006-10-12

Scanning electron microscope

 #97
20060151696
2006-07-13

Electron microscope and a method of imaging objects

 #98
20060033037
2006-02-16

Charged particle beam column

 #99
20050253069
2005-11-17

Method and system for ultrafast photoelectron microscope

 #100
20050199808
2005-09-15

Method and apparatus for collecting defect images