H01J2237/2811 - CPC Classification Index

ClassID:

206558 ⎘

H01J2237/2811 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion microscopes; Scanning microscopes characterised by the imaging problems involved Large objects

Recent Application in this class:

20250166961

2025-05-22

MICROSCOPY IMAGING METHOD AND SYSTEM

20240177966

2024-05-30

Fiducial guided cross-sectioning and lamella preparation with tomographic data collection

20230044598

2023-02-09

Microscopy imaging method for 3D tomography with predictive drift tracking for multiple charged particle beams

20210192700

2021-06-24

Method for detector equalization during the imaging of objects with a multi-beam particle microscope

20210172891

2021-06-10

Method and system for inspecting an EUV mask

20210159046

2021-05-27

Method and system for iteratively cross-sectioning a sample to correlatively targeted sites

20200203121

2020-06-25

OPTICAL SYSTEM ADJUSTMENT METHOD OF IMAGE ACQUISITION APPARATUS

20200176218

2020-06-04

Method and system for cross-sectioning a sample with a preset thickness or to a target site

20190170671

2019-06-06

Method and system for inspecting an EUV mask

#10

20190051487

2019-02-14

Optical system adjustment method of image acquisition apparatus

#11

20180226221

2018-08-09

Wide field atmospheric scanning electron microscope

#12

20180053627

2018-02-22

Microscopy imaging method and system

#13

20170361551

2017-12-21

Systems and methods for rapidly fabricating nanopatterns in a parallel fashion over large areas

#14

20170053774

2017-02-23

Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask

#15

20170052129

2017-02-23

Method and system for inspecting an EUV mask

#16

20160343541

2016-11-24

Cross-section processing-and-observation method and cross-section processing-and-observation apparatus

#17

20150371815

2015-12-24

Mathematical image assembly in a scanning-type microscope

#18

20150325402

2015-11-12

Method and system for inspecting and grounding an EUV mask

#19

20150305131

2015-10-22

Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask

#20

20150102220

2015-04-16

Method and system for inspecting an EUV mask

#21

20150060664

2015-03-05

Cross-section processing-and-observation method and cross-section processing-and-observation apparatus

#22

20140027634

2014-01-30

Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask

#23

20130313430

2013-11-28

Charged particle beam device

#24

20130235182

2013-09-12

Defect inspection method and device therefor

#25

20130010100

2013-01-10

IMAGE GENERATING METHOD AND DEVICE USING SCANNING CHARGED PARTICLE MICROSCOPE, SAMPLE OBSERVATION METHOD, AND OBSERVING DEVICE

#26

20120305768

2012-12-06

Circuit-pattern inspection device

#27

20120292509

2012-11-22

Structure for discharging extreme ultraviolet mask

#28

20120286160

2012-11-15

Charged particle instrument

#29

20120266700

2012-10-25

Detection apparatus and operating method

#30

20110284746

2011-11-24

Charged particle beam device

#31

20110260057

2011-10-27

Charged particle beam apparatus

#32

20110249885

2011-10-13

Mask inspection apparatus and image generation method

#33

20110181688

2011-07-28

Method and device for synthesizing panorama image using scanning charged-particle microscope

#34

20110129142

2011-06-02

Defect review system and method, and program

#35

20100327162

2010-12-30

In-line electron beam test system

#36

20100264330

2010-10-21

Charged particle beam application apparatus

#37

20090272902

2009-11-05

Electron microscope and observation method

#38

20090195262

2009-08-06

In-line electron beam test system

#39

20080308743

2008-12-18

Charged particle beam application apparatus

#40

20080048116

2008-02-28

Charged particle beam device and method for inspecting specimen

#41

20060244467

2006-11-02

In-line electron beam test system