206560 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion microscopes; Scanning microscopes characterised by the application
Sub-classes:SCANNING ELECTRON MICROSCOPY-BASED TOMOGRAPHY OF SPECIMENS
#2ANALYSIS SYSTEM, ANALYSIS METHOD, COMPUTER PROGRAM PRODUCT AND SAMPLE HOLDER
#3Scanning electron microscope
#4Rapid and automatic virus imaging and analysis system as well as methods thereof
#5Sample preparation system and method for electron microscope observation, and tape feeding mechanism used for sample preparation
#6Graphene based substrates for imaging
#7Image forming method and impedance microscope
#8Method and system for inspecting an EUV mask
#9Wafer inspection based on electron beam induced current
#10Imaging apparatus and related control unit
#11Substrate positioning device and electron beam inspection tool
#12System for detection of passive voltage contrast
#13Defect inspection method and defect inspection device
#14Method for measuring critical dimension and image-processing apparatus for measuring critical dimension
#15Electron energy loss spectroscopy with adjustable energy resolution
#16Apparatus of plural charged-particle beams
#17Edge detection system and its use for optical proximity correction
#18Imaging of crystalline defects
#19Method and system for inspecting an EUV mask
#20System and method for performing nano beam diffraction analysis
#21Scanning electron microscope and image processing apparatus
#22Detecting method and detecting equipment therefor
#23Method for making transparent conductive layer
#24Observation method and specimen observation apparatus
#25Apparatus and method for correcting arrayed astigmatism in a multi-column scanning electron microscopy system
#26Generating an image of an object or a representation of data about the object
#27CD-SEM technique for wafers fabrication control
#28Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask
#29Method and system for inspecting an EUV mask
#30Range-based real-time scanning electron microscope non-visual binner
#31Review of suspected defects using one or more reference dies
#32System and method for scanning an object with an electron beam using overlapping scans and electron beam counter-deflection
#33Apparatus of plural charged-particle beams
#34Method and apparatus for inspection of scattered hot spot areas on a manufactured substrate
#35Method for determining 3D primitive reciprocal basis of unknown crystal based on single EBSD pattern
#36ACHROMATIC DUAL-FIB INSTRUMENT FOR MICROFABRICATION AND MICROANALYSIS
#37Characterization method for a reservoir micro pore structure and a system thereof
#38Charged particle beam device and sample preparation method
#39Bulk deposition for tilted mill protection
#40Particle analysis instrument and computer program
#41Method and system for inspecting an EUV mask
#42SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD
#43Sample supporting member for observing scanning electron microscopic image and method for observing scanning electron microscopic image
#44Characterization of nanoscale structures using an ultrafast electron microscope
#45Configurable charged-particle apparatus
#46Photon induced near field electron microscope and biological imaging system
#47Scanning microscope having an adaptive scan
#48Imaging modality using penetrating radiations
#49Characterization of nanoscale structures using an ultrafast electron microscope
#50Transmission electron microscope micro-grid
#51Method and apparatus for inspection of scattered hot spot areas on a manufactured substrate
#52Method and apparatus for laser machining
#53Photon induced near field electron microscope and biological imaging system
#54Method for laser machining a sample having a crystalline structure
#55Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
#563D atomic scale imaging methods
#57LASER ATOM PROBES
#58Graphical automated machine control and metrology
#59Characterization of nanoscale structures using an ultrafast electron microscope
#604D imaging in an ultrafast electron microscope
#61Method to create three-dimensional images of semiconductor structures using a focused ion beam device and a scanning electron microscope
#62Method and system for ultrafast photoelectron microscope
#63Dimension measuring apparatus and dimension measuring method for semiconductor device
#64Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
#65Method of inspecting pattern and inspecting instrument
#66Graphical automated machine control and metrology
#67Electron lens and charged particle beam apparatus
#68Method and system for ultrafast photoelectron microscope
#69SEM test apparatus
#70Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
#71Portable scanning electron microscope
#72Charged particle beam irradiation method and charged particle beam apparatus
#73Combined hardware and software instrument simulator for use as a teaching aid
#74Method of measurement accuracy improvement by control of pattern shrinkage
#75Method and apparatus for measuring the physical properties of micro region
#76Measurement system and method and computer program for processing measurement data
#77Method and system for ultrafast photoelectron microscope
#78Method of inspecting pattern and inspecting instrument
#79Graphical automated machine control and metrology
#80Method of measurement accuracy improvement by control of pattern shrinkage
#81Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
#82Film thickness measuring apparatus and a method for measuring a thickness of a film
#83Multi-beam electron microscope for electron channeling contrast imaging of semiconductor material