206578 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion beam tubes for processing objects; Controlling tubes; Details Handling of data
Sub-classes:METHOD FOR GENERATING WRITING DATA, WRITING DATA GENERATION APPARATUS, METHOD OF CHARGED-PARTICLE BEAM WRITING, CHARGED-PARTICLE BEAM WRITING APPARATUS, AND COMPUTER-READABLE RECORDING MEDIUM
#2CHARGED PARTICLE BEAM DEVICE
#3Ion implanter and model generation method
#4Data generation method and charged particle beam irradiation device
#5Ion implanter and model generation method
#6Multi-beam writing method and multi-beam writing apparatus
#7Particle beam system and method for operating a particle beam system
#8Data processing method, data processing apparatus, and multiple charged-particle beam writing apparatus
#9Process window analysis
#10Charged particle beam apparatus and method for controlling charged beam apparatus
#11Charged particle beam device and control method of charged particle beam device
#12Diagnosis method, charged particle beam lithography apparatus, and recording medium
#13Method of generating write data for energy beam writing apparatus, method of writing with energy beam, and energy beam writing apparatus
#14Charged particle beam writing apparatus and method utilizing a sum of the weighted area density of each figure pattern
#15Charged particle beam writing apparatus and charged particle beam writing method
#16Charged particle beam writing apparatus, and buffer memory data storage method
#17Pattern modification schemes for improved FIB patterning
#18Focused ion beam apparatus, sample processing method using the same, and computer program for focused ion beam processing
#19Graphical automated machine control and metrology
#20Method and apparatus for reviewing defects by detecting images having voltage contrast
#21Method and system for increasing throughput during location specific processing of a plurality of substrates
#22Graphical automated machine control and metrology
#23Writing error verification method of pattern writing apparatus and generation apparatus of writing error verification data for pattern writing apparatus
#24LITHOGRAPHY SYSTEM AND ERROR DETECTION METHOD IN SAME
#25Method and apparatus for reviewing defects by detecting images having voltage contrast
#26Graphical automated machine control and metrology
#27Electron microscope observation system and observation method
#28Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems
#29Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems