H01J2237/30422 - CPC Classification Index

ClassID:

206579 ⎘

H01J2237/30422 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion beam tubes for processing objects; Controlling tubes; Details; Handling of data Data compression

Recent Application in this class:

20190155160

2019-05-23

Ebeam universal cutter

20190121236

2019-04-25

Cross scan proximity correction with ebeam universal cutter

20180143526

2018-05-24

Ebeam three beam aperture array

20170269481

2017-09-21

Cross scan proximity correction with ebeam universal cutter

20170077029

2017-03-16

Unidirectional metal on layer with ebeam

20170076905

2017-03-16

Ebeam three beam aperture array

20170069509

2017-03-09

DATA COMPRESSION FOR EBEAM THROUGHPUT

20150294836

2015-10-15

Shot data generation method and multi charged particle beam writing method