206583 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion beam tubes for processing objects; Controlling tubes; System calibration; Registration Calibration grids
Device and Method for Calibrating a Charged-Particle Beam
#2Apparatus and method for investigating an object
#3Correcting substrate for charged particle beam lithography apparatus
#4Standard component for calibration and calibration method using it and electro beam system
#5Electron microscope and scanning probe microscope calibration device