ClassID:

206600

H01J2237/3132 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion beam tubes for processing objects; Processing objects on a macro-scale Evaporating

Sub-classes:
Recent Application in this class:
#1
20230223234
2023-07-13

APPARATUS AND METHOD FOR DEPOSITING HARD CARBON LAYERS

#2
20230215701
2023-07-06

Forming method of plasma resistant oxyfluoride coating layer

#3
20200017953
2020-01-16

Coating arrangement and method

#4
20190318909
2019-10-17

Electron beam vaporizer and method for vaporizing a vaporization material by means of an electron beam

#5
20180308660
2018-10-25

Method for determining the changing location of the point of incidence of an energetic beam on a delimited surface

#6
20180190471
2018-07-05

Plasma driven particle propagation apparatus and pumping method

#7
20150243567
2015-08-27

Electron radiation monitoring electrode system to prevent gold spitting and resist cross-linking during evaporation

#8
20130069622
2013-03-21

Electron radiation monitoring system to prevent gold spitting and resist cross-linking during evaporation

#9
20130032092
2013-02-07

Apparatus for coating substrates using the EB/PVD method

#10
20120298041
2012-11-29

Deflecting device for electron beams, magnetic deflecting unit for such a deflecting device, and device for vapor coating a planar substrate using such a deflecting device

#11
20120135157
2012-05-31

Coating and ion beam mixing apparatus and method to enhance the corrosion resistance of the materials at the elevated temperature using the same

#12
20110262656
2011-10-27

OPTICAL THIN-FILM VAPOR DEPOSITION APPARATUS AND OPTICAL THIN-FILM PRODUCTION METHOD

#13
20110193576
2011-08-11

Electron radiation monitoring system to prevent gold spitting and resist cross-linking during evaporation

#14
20110151135
2011-06-23

Optical thin-film vapor deposition apparatus and optical thin-film production method

#15
20110120858
2011-05-26

Vacuum processing apparatus and optical component manufacturing method

#16
20110117387
2011-05-19

METHOD FOR PRODUCING METAL NANODOTS

#17
20110101245
2011-05-05

EVAPORATION SYSTEM

#18
20100247807
2010-09-30

Electron gun evaporation apparatus and film formation method using the electron gun evaporation apparatus

#19
20100242841
2010-09-30

Electron beam vapor deposition apparatus and method of coating

#20
20100213055
2010-08-26

Vacuum arc vaporisation source and also a vacuum arc vaporisation chamber with a vacuum arc vaporisation source

#21
20100068417
2010-03-18

Electron beam vapor deposition apparatus and method

#22
20100032288
2010-02-11

COATING AND ION BEAM MIXING APPARATUS AND METHOD TO ENHANCE THE CORROSION RESISTANCE OF THE MATERIALS AT THE ELEVATED TEMPERATURE USING THE SAME

#23
20100003423
2010-01-07

PLASMA GENERATING APPARATUS AND FILM FORMING APPARATUS USING PLASMA GENERATING APPARATUS

#24
20070210691
2007-09-13

Electron beam gun

#25
20070096620
2007-05-03

Electron gun

#26
20060169920
2006-08-03

Rapid-response electron-beam deposition system having a controller utilizing leading and trailing deposition indicators

#27
20060061285
2006-03-23

High power, long focus electron source for beam processing

#28
20050067934
2005-03-31

Discharge apparatus, plasma processing method and solar cell