206600 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion beam tubes for processing objects; Processing objects on a macro-scale Evaporating
Sub-classes:APPARATUS AND METHOD FOR DEPOSITING HARD CARBON LAYERS
#2Forming method of plasma resistant oxyfluoride coating layer
#3Coating arrangement and method
#4Electron beam vaporizer and method for vaporizing a vaporization material by means of an electron beam
#5Method for determining the changing location of the point of incidence of an energetic beam on a delimited surface
#6Plasma driven particle propagation apparatus and pumping method
#7Electron radiation monitoring electrode system to prevent gold spitting and resist cross-linking during evaporation
#8Electron radiation monitoring system to prevent gold spitting and resist cross-linking during evaporation
#9Apparatus for coating substrates using the EB/PVD method
#10Deflecting device for electron beams, magnetic deflecting unit for such a deflecting device, and device for vapor coating a planar substrate using such a deflecting device
#11Coating and ion beam mixing apparatus and method to enhance the corrosion resistance of the materials at the elevated temperature using the same
#12OPTICAL THIN-FILM VAPOR DEPOSITION APPARATUS AND OPTICAL THIN-FILM PRODUCTION METHOD
#13Electron radiation monitoring system to prevent gold spitting and resist cross-linking during evaporation
#14Optical thin-film vapor deposition apparatus and optical thin-film production method
#15Vacuum processing apparatus and optical component manufacturing method
#16METHOD FOR PRODUCING METAL NANODOTS
#17EVAPORATION SYSTEM
#18Electron gun evaporation apparatus and film formation method using the electron gun evaporation apparatus
#19Electron beam vapor deposition apparatus and method of coating
#20Vacuum arc vaporisation source and also a vacuum arc vaporisation chamber with a vacuum arc vaporisation source
#21Electron beam vapor deposition apparatus and method
#22COATING AND ION BEAM MIXING APPARATUS AND METHOD TO ENHANCE THE CORROSION RESISTANCE OF THE MATERIALS AT THE ELEVATED TEMPERATURE USING THE SAME
#23PLASMA GENERATING APPARATUS AND FILM FORMING APPARATUS USING PLASMA GENERATING APPARATUS
#24Electron beam gun
#25Electron gun
#26Rapid-response electron-beam deposition system having a controller utilizing leading and trailing deposition indicators
#27High power, long focus electron source for beam processing
#28Discharge apparatus, plasma processing method and solar cell