206602 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion beam tubes for processing objects; Processing objects on a macro-scale Ion plating
Sub-classes:Method of extracting and accelerating ions
#2Systems for controlling a high power ion beam
#3Wafer stage for symmetric wafer processing
#4High-density ion transport measurement biochip devices and methods
#5Compact, filtered ion source
#6Gas cluster ion beam system with cleaning apparatus
#7Ion beam generator, and substrate processing apparatus and production method of electronic device using the ion beam generator
#8CHARGED PARTICLE SEPARATION APPARATUS AND CHARGED PARTICLE BOMBARDMENT APPARATUS
#9PLASMA GENERATING APPARATUS RENDERED ELECTRICALLY NEUTRAL ON THE PERIPHERY OF PLASMA GUN
#10APPARATUS
#11METHOD FOR FORMING TRENCH ISOLATION
#12HIGH-DENSITY ION TRANSPORT MEASUREMENT BIOCHIP DEVICES AND METHODS
#13Neutral beam-assisted atomic layer chemical vapor deposition apparatus and method of processing substrate using the same
#14Method and system for treating an interior surface of a workpiece using a charged particle beam
#15Charged particle-beam processing using a cluster source
#16Standard reference component for calibration, fabrication method for the same, and scanning electron microscope using the same
#17Ion source including magnet and magnet yoke assembly
#18Pulsed cathodic arc plasma
#19High-density ion transport measurement biochip devices and methods
#20Titanium nitride thin film formation on metal substrate by chemical vapor deposition in a magnetized sheet plasma source
#21Discharge apparatus, plasma processing method and solar cell